MEMS resonance control using phase detection

Patent metadata

Field	Value
Publication number	US-11706392-B2
Application number	US-202117479176-A
Country	US
Kind code	B2
Filing date	Sep 20, 2021
Priority date	Dec 21, 2017
Publication date	Jul 18, 2023
Grant date	Jul 18, 2023

Abstract

A light projection system includes a MEMS mirror operating on a mirror drive signal to generate a mirror sense signal resulting from operation of the MEMS mirror based on the mirror drive signal. A mirror driver generates the mirror drive signal from a drive control signal. A controller receives the mirror sense signal from the MEMS mirror, obtains a first sample of the mirror sense signal at a first phase thereof, obtains a second sample of the mirror sense signal at a second phase thereof, wherein the first and second phases are separated by a half period of the mirror drive signal, with the second phase occurring after the first phase, and generates the drive control signal based on a difference between the first and second samples to keep the mirror drive signal separated in phase from the mirror sense signal by a desired amount of phase separation.

First claim

The invention claimed is:

1. A light projection system, comprising:
a microelectromechanical (MEMS) mirror configured to operate in response to a mirror drive signal and to generate a mirror sense signal as a result of the operation of the MEMS mirror in response to the mirror drive signal;
a mirror driver configured to generate the mirror drive signal in response to a drive control signal; and
a controller configured to, during each period of the mirror drive signal:
a) receive the mirror sense signal from the MEMS mirror;
b) obtain a first sample of the mirror sense signal at a first phase of the mirror drive signal, the first sample of the mirror sense signal being a first sample of the mirror sense signal taken during a current period of the mirror drive signal;
c) obtain a second sample of the mirror sense signal at a second phase of the mirror drive signal, wherein the first and second phases are separated by a half period of the mirror drive signal, with the second phase occurring after the first phase, wherein the second sample of the mirror sense signal is a next sample of the mirror sense signal taken after the first sample of the mirror sense signal during the current period of the mirror drive signal, and wherein the second sample of the mirror sense signal is a last sample of the mirror sense signal taken during the current period of the mirror drive signal; and
d) generate the drive control signal as a function of a difference between the first and second samples so as to keep the mirror drive signal separated in phase from the mirror sense signal by a desired amount of phase separation.

2. The light projection system of claim 1 , wherein the desired amount of phase separation is 90 degrees.

3. The light projection system of claim 1 , wherein the first phase is 90 degrees and the second phase is 270 degrees.

4. The light projection system of claim 1 , wherein the desired amount of phase separation is a phase separation at which the MEMS mirror is operating at its resonance frequency.

5. The light projection system of claim 1 , wherein the desired amount of phase separation is a phase separation at which the first and second samples are equal.

6. The light projection system of claim 1 , wherein the first sample being less than the second sample indicates that the phase separation between the mirror drive signal and mirror sense signal is less than 90 degrees; and wherein the mirror generates the drive control signal so as to increase the phase separation to 90 degrees.

7. The light projection system of claim 1 , wherein the first sample being greater than the second sample indicates that the phase separation between the mirror drive signal and mirror sense signal is greater than 90 degrees; and wherein the mirror generates the drive control signal so as to decrease the phase separation to 90 degrees.

8. The light projection system of claim 1 , wherein the controller is configured to, in an initial setup mode, generate the drive control signal so that the mirror drive signal is expected to be separated in phase from the mirror sense signal by the desired amount, and thereafter, in a normal operation mode, perform a), b), c), and d).

9. A light projection system, comprising:
a microelectromechanical (MEMS) mirror configured to operate based on a mirror drive signal and to generate a mirror sense signal as a result of the operation of the MEMS mirror based upon the mirror drive signal;
a mirror driver configured to generate the mirror drive signal in response to a drive control signal; and
a controller configured to, during each period of the mirror drive signal:
a) receive the mirror sense signal from the MEMS mirror;
b) obtain first and second samples of the mirror sense signal at times separated by a half period of the mirror drive signal, the first sample of the mirror sense signal being a first sample of the mirror sense signal taken during a current period of the mirror drive signal, wherein the second sample of the mirror sense signal is a next sample of the mirror sense signal taken after the first sample of the mirror sense signal during the current period of the mirror drive signal, and wherein the second sample of the mirror sense signal is a last sample of the mirror sense signal taken during the current period of the mirror drive signal; and
c) generate the drive control signal such the first and second samples are equal.

10. The light projection system of claim 9 , wherein the controller obtains the first and second samples at phases of the mirror drive signal at which the first and second samples would be expected to be equal, and the controller generates the drive control signal such that the first and second samples are actually equal.

11. The light projection system of claim 9 , wherein the first and second samples being equal indicates that the mirror drive signal and the mirror sense signal are separated in phase by a desired amount.

12. The light projection system of claim 9 , wherein the first and second samples being equal indicates that the MEMS mirror is operating at its resonance frequency.

13. The light projection system of claim 9 , wherein the controller is configured to, in an initial setup mode, generate the drive control signal so that the first and second samples will be expected to be equal, and thereafter, in a normal operation mode, perform a), b), and c) so that the first and second samples are actually equal.

14. A method, comprising steps of:
a) generating a mirror drive signal in response to a drive control signal and applying the mirror drive signal to a microelectromechanical (MEMS) mirror to drive oscillation of that mirror;
b) during each period of the mirror drive signal, sampling a mirror sense signal produced by the MEMS mirror twice at times separated by a half period of the mirror drive signal to produce first and second samples, the first sample being sampled when the mirror drive signal is at a first phase and being a first sample of the mirror sense signal taken during a current period of the mirror drive signal, the second sample being sampled when the mirror drive signal is at a second phase that occurs subsequent to the first phase by half a period of the mirror drive signal and being a next sample of the mirror sense signal taken during a current period of the mirror drive signal as well as a last sample of the mirror sense signal taken during the current period of the mirror drive signal;
c) determining a difference between the first and second samples;
d) adjusting the drive control signal based upon the difference, if the difference is other than zero; and
e) returning to step a).

15. The method of claim 14 , wherein the adjustment of the drive control signal serves to adjust a phase of the mirror drive signal so as to be separated from that of the mirror sense signal by 90 degrees, thereby operating the MEMS mirror at its resonance frequency.

16. The method of claim 14 , wherein the adjustment of the drive control signal serves to adjust phase of the mirror drive signal so as to be separated from that of the mirror sense signal by a desired phase difference, thereby operating the MEMS near its resonance frequency.

17. The method of claim 14 , wherein the first phase is 90 degrees and the second phase is 270 degrees.

18. The method of claim 14 , wherein the first sample being less than the second sample results in the adjustment of the drive control signal at step d) such that a frequency of the mirror drive signal decreases.

19. The method of claim 14 , whe

Assignees

• St Microelectronics Ltd
• St Microelectronics Srl

Inventors

• Ratti Massimo
• Yaser Eli
• Petrushevsky Naomi
• Nachmias Yotam

Classifications

• H04N9/3182 Primary

  Colour adjustment, e.g. white balance, shading or gamut (white balance per se H04N9/73; control of amplitude of colour signals H04N9/68; colour control circuits for displays in general G09G5/02, G09G3/2003, G09G3/3607) · CPC title

• G06T1/20

  Processor architectures; Processor configuration, e.g. pipelining · CPC title

• H04N9/3135

  Driving therefor · CPC title

• G02B26/0833

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• G02B26/0858

  the reflecting means being moved or deformed by piezoelectric means · CPC title