Laser light source and a laser crystallization apparatus including the same

Patent metadata

Field	Value
Publication number	US-11705348-B2
Application number	US-202016874198-A
Country	US
Kind code	B2
Filing date	May 14, 2020
Priority date	Aug 26, 2019
Publication date	Jul 18, 2023
Grant date	Jul 18, 2023

Abstract

A laser light source is provided including an airtight container. A first resonance mirror and a second resonance mirror are disposed outside the airtight container. The first resonance mirror includes a lens unit and a reflection coating layer. The lens unit includes a first surface and a second surface, and the first surface is inclined with respect to the second surface.

First claim

What is claimed is:

1. A laser light source, comprising:
an airtight container; and
a first resonance mirror and a second resonance mirror outside the airtight container,
wherein the first resonance mirror includes a lens unit and a reflection coating layer, the lens unit includes a first surface and a second surface, the first surface is inclined with respect to the second surface, and the first surface and the second surface are flat surfaces,
the first surface is disposed between the airtight container and the second surface,
the second resonance mirror includes a third surface and a fourth surface, and
the fourth surface is inclined with respect to the third surface.

2. The laser light source of claim 1 , wherein the third surface of the second resonance mirror is disposed between the fourth surface of the second resonance mirror and the airtight container.

3. The laser light source of claim 1 , wherein the third surface and the fourth surface of the second resonance mirror face each other.

4. A laser light source, comprising:
an airtight container; and
a first resonance mirror and a second resonance mirror outside the airtight container,
wherein the first resonance mirror includes a lens unit and a reflection coating layer, the lens unit includes a first surface and a second surface, and the first surface is inclined with respect to the second surface,
wherein the second resonance mirror includes a third surface and a fourth surface, and wherein the fourth surface is inclined with respect to the third surface,
wherein
the first resonance mirror includes a first point corresponding to a part where the first resonance mirror is thickest from the second surface of lens unit of the first resonance mirror, a second point corresponding to a part where the first resonance mirror is thinnest from the second surface of the lens unit of the first resonance mirror, and a first axis passing through the first point and the second point, and
wherein the second resonance mirror includes a third point corresponding to a part where the second resonance mirror is thickest from the third surface of the second resonance mirror, a fourth point corresponding to a part where the second resonance mirror is thinnest from the third surface of the second resonance mirror, and a second axis passing through the third point and the fourth point, and
wherein an angle between the first axis and the second axis is 80° to 100°.

5. The laser light source of claim 4 , wherein the reflection coating layer is disposed on the second surface of the lens unit of the first resonance mirror.

6. The laser light source of claim 4 , wherein the reflection coating layer is disposed inside the lens unit between the first surface and the second surface of the lens unit of the first resonance mirror.

7. The laser light source of claim 4 , wherein the reflection coating layer is disposed on the first surface of the lens unit of the first resonance mirror.

8. A laser crystallization apparatus, comprising:
a laser light source for generating laser light; and
a stage mounted with a substrate,
wherein the laser light source comprises an airtight container;
a first resonance mirror outside the airtight container; and
a second resonance mirror outside the airtight container,
wherein the first resonance mirror includes a lens unit and a reflection coating layer,
wherein the lens unit includes a first surface and a second surface facing each other,
wherein the first surface is inclined with respect to the second surface, and
the first surface and the second surface are flat surfaces, wherein
the second resonance mirror includes a third surface d a fourth surface facing each other, and
wherein the fourth surface is inclined with respect to the third surface.

9. A laser crystallization apparatus, comprising:
a laser light source for generating laser light; and
a stage mounted with a substrate,
wherein the laser light source comprises an airtight container;
a first resonance mirror outside the airtight container; and
a second resonance mirror outside the airtight container,
wherein the first resonance mirror includes a lens unit and a reflection coating layer,
wherein the lens unit includes a first surface and a second surface facing each other,
wherein the first surface is inclined with respect to the second surface,
wherein the second resonance mirror includes a third surface and a fourth surface facing each other, and
wherein the fourth surface is inclined with respect to the third surface,
wherein
the first resonance mirror includes a first point corresponding to a part where the first resonance mirror is thickest from the second surface of the lens unit of the first resonance mirror, a second point corresponding to a part where the first resonance mirror is thinnest from the second surface of the lens unit first resonance mirror, and a first axis passing through the first point and the second point, and
wherein the second resonance mirror includes a third point corresponding to a part where the second resonance mirror is thickest from the third surface of the second resonance mirror, a fourth point corresponding to a part where the second resonance mirror is thinnest from the third surface of the second resonance mirror, and a second axis passing through the third point and the fourth point, and
an angle between the first axis and the second axis is 80° to 100°.

10. The laser crystallization apparatus of claim 9 , further comprising:
a first beam splitter that reflects a first part of the laser light output from the laser light source and transmits a second part of the laser light output from the laser light source;
a second beam splitter for reflecting a third part of the laser light passing through the first beam splitter and transmitting a fourth part of the laser light;
a laser light intensity sensing unit measuring a pulse intensity of the first part of the laser light reflected from the first beam splitter;
a first monitoring unit for photographing a focus image of the third part of the laser light reflected from the second beam splitter;
a second monitoring unit for photographing a fifth part of the laser light that irradiates the substrate; and
a controller for adjusting an angle between the first axis of the first resonance mirror and the second axis of the second resonance mirror.

11. The laser crystallization apparatus of claim 9 , further comprising
a first optical system,
wherein the first optical system comprises:
a beam splitter disposed on a proceeding path of the laser light output from the laser light source;
a first mirror disposed on a proceeding path of the laser light passing through the beam splitter; and
a second mirror disposed on a proceeding path of the laser light reflected from the first mirror, and
wherein the laser light passing through the beam splitter and reflected from the first mirror and the second mirror is incident to the beam splitter.

12. The laser crystallization apparatus of claim 9 , further comprising
a second optical system,
wherein the second optical system includes:
a first beam splitter disposed on a proceeding path of the laser light output from the laser light source;
a second beam splitter disposed on a proceeding path of a first part of the laser light passing through the first beam splitter; and
a plurality of mirrors reflecting a second part of the laser light reflected from the first beam splitter towards the second beam splitter.

13. The laser crystallization apparatus of claim 9 , further comprising a Dove prism disposed on a proceeding path of the laser light output

Assignees

• Samsung Display Co Ltd

Inventors

• Choi Kyong Sik
• Shin Dong Hoon
• Ryoo Hoon Chul
• Kim Kyeong Mok
• Moon Jae-Woong
• Park Kyong Ho
• Seok Ki Hwan
• Son Myoung Seok
• Lee Hong Ro

Classifications

• H10P14/3808

  using laser beams · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• H10P34/42

  with electromagnetic radiation, e.g. laser annealing (laser cutting H10P54/20) · CPC title

• H01L21/67115 Primary

  Electricity · mapped topic

• H01L21/02675

  Electricity · mapped topic