Method of forming an anode structure with dielectric coating

Patent metadata

Field	Value
Publication number	US-11688851-B2
Application number	US-201916584660-A
Country	US
Kind code	B2
Filing date	Sep 26, 2019
Priority date	Jan 9, 2015
Publication date	Jun 27, 2023
Grant date	Jun 27, 2023

Abstract

ABSTRACT OF THE DISCLOSURE The present disclosure generally relates to battery anode structures with dielectric coating and methods of forming the same. In one implementation, a method of forming an anode structure is provided and includes exposing a material to be deposited on an anode positioned in a processing region to an evaporation process; flowing a reactive gas into the processing region; and reacting the reactive gas and the evaporated material to deposit a porous dielectric layer on at least a portion of the anode and form the anode structure. In another implementation, an anode electrode structure is provided and includes an anode containing at least one of lithium metal, lithium-alloy, or a mixture of lithium metal and lithium alloy; and at least one dielectric layer capable of conducting ions, wherein the at least one dielectric layer at least partially covers an anode surface and has a thickness of 1 to 2,000 nanometers.

First claim

The invention claimed is:

1. A method of forming an anode structure, comprising:
exposing a material to be deposited on an anode positioned in a processing region to an evaporation process;
flowing a reactive gas into the processing region; and
reacting the reactive gas and the evaporated material to deposit a porous dielectric layer on at least a portion of the anode and form the anode structure, the porous dielectric layer comprising:
a plurality of dielectric columnar projections; and
a nanoporous structure formed between the dielectric columnar projections.

2. The method of claim 1 , wherein the material is selected from the group consisting of: aluminum (Al), zirconium (Zr), hafnium (Hf), niobium (Nb), tantalum (Ta), titanium (Ti), yttrium (Y), lanthanum (La), silicon (Si), boron (B), silver (Ag), chromium (Cr), copper (Cu), indium (In), iron (Fe), magnesium (Mg), calcium (Ca), strontium (Sr), barium (Ba), nickel (Ni), tin (Sn), ytterbium (Yb), lithium (Li), calcium (Ca) and combinations thereof.

3. The method of claim 1 , wherein the reactive gas is an oxygen-containing gas selected from the group consisting of oxygen ( 02 ), ozone ( 03 ), oxygen radicals ( 0 *), ionized oxygen atoms, carbon dioxide (CO 2 ), nitric oxide (NO x ), water vapor, and combinations thereof.

4. The method of claim 1 , wherein the porous dielectric layer is a porous aluminum oxide.

5. The method of claim 4 , wherein the porous aluminum oxide further comprises zirconium oxide, silicon oxide, or combinations thereof.

6. The method of claim 1 , wherein the evaporation process is a thermal evaporation process or an electron beam evaporation process.

7. The method of claim 1 , wherein the anode is exposed to a surface modification treatment process to enhance nucleation conditions of the anode.

8. The method of claim 7 , wherein the surface modification treatment process comprises:
supplying a treatment gas mixture into the processing region; and
forming a plasma from the treatment gas mixture to plasma treat at least a portion of the anode, wherein the treatment gas mixture comprises an oxygen-containing gas, an inert gas, or combinations thereof.

9. The method of claim 1 , further comprising exposing the anode to a cooling process prior to exposing the material to the evaporation process.

10. The method of claim 9 , wherein the cooling process cools the anode to a temperature between −20 degrees Celsius and 22 degrees Celsius.

11. The method of claim 1 , further comprising forming a dielectric polymer layer on the porous dielectric layer.

12. The method of claim 1 , wherein the anode contains at least one of lithium metal, lithium-alloy, or a mixture of lithium metal and lithium alloy.

13. The method of claim 12 , wherein the anode further contains a material selected from the group consisting of carbon, nickel, copper, tin, indium, silicon, and combinations thereof.

Assignees

• Applied Materials Inc

Inventors

• Herle Subramanya P

Classifications

• H01M50/451

  comprising layers of only organic material and layers containing inorganic material · CPC title

• H01M50/426

  Fluorocarbon polymers · CPC title

• H01M4/382 Primary

  Lithium (H01M4/405 takes precedence) · CPC title

• H01M10/0525

  Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries · CPC title

• H01M50/497

  Ionic conductivity · CPC title