Photocathode, electron tube, and method for manufacturing photocathode

Patent metadata

Field	Value
Publication number	US-11688592-B2
Application number	US-202017609519-A
Country	US
Kind code	B2
Filing date	May 12, 2020
Priority date	Jun 26, 2019
Publication date	Jun 27, 2023
Grant date	Jun 27, 2023

Abstract

A photocathode including a substrate, a photoelectric conversion layer provided on the substrate and generating photoelectrons in response to incidence of light, and an underlayer provided between the substrate and the photoelectric conversion layer and containing beryllium, in which the underlayer has a first underlayer containing a nitride of beryllium.

First claim

The invention claimed is:

1. A photocathode comprising:
a substrate;
a photoelectric conversion layer provided on the substrate and configured to generate photoelectrons in response to incidence of light; and
an underlayer provided between the substrate and the photoelectric conversion layer and containing beryllium, wherein
the underlayer has a first underlayer containing a nitride of beryllium.

2. The photocathode according to claim 1 , wherein the underlayer has a second underlayer provided between the first underlayer and the photoelectric conversion layer and containing an oxide of beryllium.

3. The photocathode according to claim 2 , wherein an amount of the oxide of beryllium is larger than an amount of the nitride of beryllium in the second underlayer.

4. The photocathode according to claim 1 , wherein the underlayer is in contact with the substrate.

5. The photocathode according to claim 1 , wherein the photoelectric conversion layer is in contact with the underlayer.

6. The photocathode according to claim 1 , wherein the substrate is composed of a material that transmits the light.

7. The photocathode according to claim 1 , wherein the amount of the oxide of beryllium is larger than the amount of the nitride of beryllium in the underlayer.

8. The photocathode according to claim 1 , wherein in the underlayer, the amount of at least one of the nitride of beryllium and the oxide of beryllium is unevenly distributed in a thickness direction of the underlayer.

9. The photocathode according to claim 8 , wherein in the underlayer, the amount of the nitride of beryllium is larger on the substrate side than on the photoelectric conversion layer side, and the amount of the oxide of beryllium is larger on the photoelectric conversion layer side than on the substrate side.

10. The photocathode according to claim 1 , wherein in the underlayer, the amount of the nitride of beryllium is substantially uniformly distributed in the thickness direction of the underlayer, and the amount of the oxide of beryllium is substantially uniformly distributed in the thickness direction of the underlayer.

11. An electron tube comprising:
the photocathode according to claim 1 ; and
an anode configured to collect electrons.

12. A method for manufacturing a photocathode, the method comprising:
a first step of preparing a substrate;
a second step of forming an underlayer containing beryllium on the substrate; and
a third step of forming a photoelectric conversion layer configured to generate photoelectrons in response to incidence of light on the underlayer, wherein
the second step has
a forming step of forming an intermediate layer containing a nitride of beryllium on the substrate, and
a treatment step of performing an oxidation treatment with respect to the intermediate layer so as to form a first underlayer provided on the substrate and containing a nitride of beryllium and a second underlayer provided on the first underlayer and containing an oxide of beryllium as the underlayer.

13. The method for manufacturing a photocathode according to claim 12 , wherein in the forming step, the intermediate layer is formed by evaporation or sputtering of beryllium in a nitrogen atmosphere.

14. The method for manufacturing a photocathode according to claim 13 , wherein in the forming step, the intermediate layer is formed by evaporation or sputtering of beryllium in a state of mixing an inert gas different from nitrogen in a nitrogen atmosphere.

15. The method for manufacturing a photocathode according to claim 12 , wherein the oxidation treatment includes a heating treatment and/or a discharge treatment.

16. The method for manufacturing a photocathode according to claim 12 , wherein in the treatment step, the oxidation treatment is performed so that an amount of the oxide of beryllium is larger than an amount of the nitride of beryllium in the second underlayer.

17. The method for manufacturing a photocathode according to claim 12 , wherein in the second step, the underlayer is formed directly on the substrate.

18. The method for manufacturing a photocathode according to claim 12 , wherein in the third step, the photoelectric conversion layer is formed directly on the underlayer.

19. The method for manufacturing a photocathode according to claim 12 , wherein the substrate is composed of a material that transmits the light.

Assignees

• Hamamatsu Photonics Kk

Inventors

• KAWAI Terunori
• Torii Yoshitaka
• Shibayama Masami
• Watanabe Hiroyuki
• Yamashita Shinichi

Classifications

• H01J11/34

  Vessels, containers or parts thereof, e.g. substrates · CPC title

• H01J9/12

  of photo-emissive cathodes; of secondary-emission electrodes · CPC title

• H01J43/24 Primary

  Dynodes having potential gradient along their surfaces · CPC title

• H01J40/06 Primary

  Photo-emissive cathodes · CPC title

• H01J43/18

  Electrode arrangements using essentially more than one dynode · CPC title