Multifunctional heterojunction metal oxide gas sensor

Patent metadata

Field	Value
Publication number	US-11686697-B2
Application number	US-202017030675-A
Country	US
Kind code	B2
Filing date	Sep 24, 2020
Priority date	Sep 24, 2020
Publication date	Jun 27, 2023
Grant date	Jun 27, 2023

Abstract

A method of identifying a gas is provided. The method includes providing a gas sensor device comprising at least two stacked metal oxide layers, wherein a change in conductance of the gas sensor device in a presence of a gas varies with a temperature of the stacked metal oxide layers. The method includes bringing the gas into proximity with the stacked metal oxide layers. The method also includes measuring the conductance of the gas sensor device when the gas is in proximity with the stacked layers at multiple temperatures to generate a temperature-conductance profile. The method also includes identifying a gas of interest based on the temperature-conductance profile.

First claim

What is claimed is:

1. A method of identifying a gas, the method comprising:
providing a gas sensor device comprising two stacked metal oxide layers having different material compositions, wherein a change in conductance of the gas sensor device in a presence of a gas varies with a temperature of the metal oxide layers;
bringing the gas into proximity with the metal oxide layers;
measuring the conductance of the gas sensor device when the gas is in proximity with the metal oxide layers at multiple temperatures to generate a temperature-conductance profile; and
identifying a gas of interest based on the temperature-conductance profile,
wherein (i) over a first portion of a temperature range, the gas sensor device conductance is characteristic of a first one of the metal oxide layers when used alone, and
wherein (ii) over a second portion of the temperature range that is different from the first portion of the temperature range, the gas sensor device conductance is characteristic of a second one of the metal oxide layers when used alone.

2. The method of claim 1 , wherein the first one of the metal oxide layers is a p-type layer and the second one of the metal oxide layers is an n-type layer.

3. The method of claim 2 , wherein a thickness of the p-type layer is less than a thickness of the n-type layer.

4. The method of claim 1 , wherein the temperature-conductance profile depends on thicknesses of the metal oxide layers, and wherein the temperature-conductance profile is determined prior to identifying the gas of interest for certain thicknesses of the metal oxide layers.

5. The method of claim 1 , wherein the temperature-conductance profile is generated in a temperature range from 100° C. to 500° C.

6. The method of claim 1 , wherein over a third portion of the temperature range that is between the first portion of the temperature range and the second portion of the temperature range, the device conductance is characteristic of both of the first one of the metal oxide layers and the second one of the metal oxide layers.

7. The method of claim 1 , wherein
the first one of the metal oxide layers is an n-type metal oxide layer, and
the second one of the stacked layers is a p-type metal oxide layer.

8. The method of claim 1 , wherein the gas sensor device comprises at least three stacked metal oxide layers.

9. The method of claim 1 , wherein:
the first one of the metal oxide layers is a p-type layer and the second one of the metal oxide layers is a different p-type layer; or
the first one of the metal oxide layers is an n-type layer and the second one of the metal oxide layers is a different n-type layer.

10. A gas sensor device comprising:
a substrate;
at least two electrodes formed on the substrate;
a first metal oxide layer formed on the substrate and the electrodes; and
a second metal oxide layer formed on the first metal oxide layer, the first metal oxide layer having a different material composition than the second metal oxide layer,
wherein a change in conductance of the gas sensor device in a presence of a gas varies with a temperature of the first and second metal oxide layers,
wherein (i) over a first portion of a temperature range, the gas sensor device conductance is characteristic of the first metal oxide layer when used alone, and
wherein (ii) over a second portion of the temperature range that is different from the first portion of the temperature range, the gas sensor device conductance is characteristic of the second metal oxide layers when used alone.

11. The gas sensor device of claim 10 , wherein the first metal oxide layer is a p-type layer and the second metal oxide layer is an n-type layer.

12. The gas sensor device of claim 11 , wherein a thickness of the p-type layer is less than a thickness of the n-type layer.

13. The gas sensor device of claim 10 , wherein the first metal oxide layer includes at least one selected from the group consisting of NiO, Co 3 O 4 , PdO, and Ag 2 O.

14. The gas sensor device of claim 10 , wherein the second metal oxide layer includes at least one selected from the group consisting of SnO 2 , In 2 O 3 , WO 3 , ZnO, MgO, and TiO 2 .

15. The gas sensor device of claim 10 , wherein a combined film thickness of the first metal oxide layer and the second metal oxide layer ranges from 10-200 nm.

16. The gas sensor device of claim 10 , further comprising a heating element positioned adjacent to the substrate.

17. The gas sensor device of claim 10 , wherein the gas sensor device comprises at least three stacked metal oxide layers.

18. The gas sensor device of claim 10 , wherein the first metal oxide layer is a p-type layer and the second metal oxide layer is a different p-type layer.

19. The gas sensor device of claim 10 , wherein the first metal oxide layer is an n-type layer and the second metal oxide layer is a different n-type layer.

Assignees

• IBM

Inventors

• Fasoli Andrea

Classifications

• H10D62/80

  characterised by the materials · CPC title

• G01N27/12

  of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid {, for detecting components in the fluid} · CPC title

• G01N25/482

  concerning the temperature responsive elements (measuring temperature or quantity of heat, thermally-sensitive elements G01K; thermoelectric devices H10N10/00, H10N15/00) · CPC title

• G01N27/14 Primary

  of an electrically-heated body in dependence upon change of temperature · CPC title

• H01L29/24

  Electricity · mapped topic