Pressure type flowmeter and fluid control device

Patent metadata

Field	Value
Publication number	US-11686603-B2
Application number	US-202117447217-A
Country	US
Kind code	B2
Filing date	Sep 9, 2021
Priority date	Sep 11, 2020
Publication date	Jun 27, 2023
Grant date	Jun 27, 2023

Abstract

A pressure type flowmeter includes a fluid resistance element provided in a flow path through which fluid flows, and in which a resistance flow path communicating with the flow path is formed, an upstream-side pressure sensor that detects upstream-side pressure of the fluid resistance element, and a downstream-side pressure sensor that detects downstream-side pressure of the fluid resistance element, in which the fluid resistance element is sandwiched and fixed by a pair of sandwiching components sealing components having a sheet-like shape are provided between the fluid resistance element and the sandwiching components and protrusions that partially press the sealing components are formed on at least one of the fluid resistance element and the sandwiching components.

First claim

What is claimed is:

1. A pressure type flowmeter comprising:
a fluid resistance element that is provided in a flow path through which fluid flows, and in which a resistance flow path communicating with the flow path is formed;
an upstream-side pressure sensor configured to detect upstream-side pressure of the fluid resistance element; and
a downstream-side pressure sensor configured to detect downstream-side pressure of the fluid resistance element,
wherein the fluid resistance element is sandwiched and fixed by a pair of sandwiching components,
a sealing component having a sheet-like shape is provided between the fluid resistance element and the pair of sandwiching components, and
a protrusion that partially presses the sealing component is formed on at least one of the fluid resistance element and the pair of sandwiching components.

2. The pressure type flowmeter according to claim 1 , wherein
the fluid resistance element includes a stack, in which the resistance flow path is formed in a direction intersecting a stacking direction of the stack, and
the pair of sandwiching components are configured to sandwich and fix the fluid resistance element from the stacking direction.

3. The pressure type flowmeter according to claim 2 , wherein
in the fluid resistance element, a fluid inflow portion to which a starting end of the resistance flow path is open is formed in a central portion of the fluid resistance element when viewed from the stacking direction, and the resistance flow path extends from the fluid inflow portion toward an outer peripheral portion,
the sealing component is provided so as to surround the fluid inflow portion, and
the protrusion is formed so as to surround the fluid inflow portion.

4. The pressure type flowmeter according to claim 3 , wherein the protrusion is one ridge having an annular shape formed so as to surround the fluid inflow portion.

5. The pressure type flowmeter according to claim 3 , wherein
the fluid inflow portion of the fluid resistance element is a through hole penetrating the fluid resistance element along the stacking direction,
the upstream-side pressure sensor detects upstream-side pressure of the fluid resistance element through the through hole, and
the pair of sandwiching components includes:
a block body in which an upstream-side flow path communicating with the through hole is formed; and
a fixing flange by which the upstream-side pressure sensor is fixed to the block body, and in which a detection communication path configured to detect pressure in communication with the through hole is formed.

6. A fluid control device comprising:
the pressure type flowmeter according to claim 5 ; and
a fluid control valve provided on an upstream side of the pressure type flowmeter,
wherein in the block body, the fluid control valve, the fluid resistance element, and the upstream-side pressure sensor are disposed in this order in one line along an advancing and retracting direction of a valve body of the fluid control valve.

7. The pressure type flowmeter according to claim 1 , wherein
the sealing component is provided between the fluid resistance element and each of the pair of sandwiching components, and
the protrusion is formed on each of the pair of sandwiching components.

8. The pressure type flowmeter according to claim 1 , wherein the sealing component is made of a fluorine-based resin.

9. A fluid control device comprising:
the pressure type flowmeter according to claim 1 ; and
a fluid control valve provided on an upstream side or a downstream side of the pressure type flowmeter.

Assignees

• Horiba Stec Co Ltd

Inventors

• Horiguchi Hiroshi
• Yasuda Tadahiro
• Nagai Kentaro

Classifications

• G01F1/12 Primary

  Adjusting, correcting, or compensating means therefor · CPC title

• F16J15/06

  with solid packing compressed between sealing surfaces · CPC title

• G01F1/34 Primary

  by measuring pressure or differential pressure · CPC title

• G01F1/363 Primary

  with electrical or electro-mechanical indication (G01F1/37 and G01F1/38 take precedence) · CPC title

• G01F1/42 Primary

  Orifices or nozzles · CPC title