Turntable mechanism

Patent metadata

Field	Value
Publication number	US-11685059-B2
Application number	US-202117170723-A
Country	US
Kind code	B2
Filing date	Feb 8, 2021
Priority date	Feb 18, 2020
Publication date	Jun 27, 2023
Grant date	Jun 27, 2023

Abstract

The present invention relates to a turntable mechanism, including a flat plate and a rotating device for driving the flat plate to rotate, where the flat plate rotates to generate a negative pressure between a lower surface of the flat plate and a surface of an adsorbed object, the flat plate and the adsorbed object adhere together by an adsorption force generated by the negative pressure, and in this case, a gap is kept between the lower surface of the flat plate and the surface of the adsorbed object. In the present invention, a continuous, consistent, and stable fluid film is formed between the turntable and the adsorbed object, and a secondary flow is not easily generated, thereby ensuring that the adsorption force between the rotating flat plate and the adsorbed object is more stable.

First claim

The invention claimed is:

1. A turntable mechanism, comprising a flat plate and a rotating device for driving the flat plate to rotate, wherein the flat plate rotates to generate a negative pressure between a lower surface of the flat plate and a surface of an adsorbed object, the flat plate and the adsorbed object adhere together by an adsorption force generated by the negative pressure, and in this case, a gap is kept between the lower surface of the flat plate and the surface of the adsorbed object;
wherein the flat plate is provided with a through hole, and the through hole is connected to fluid at upper and lower sides of the flat plate,
the turntable mechanism further comprising an ejector rod, wherein the ejector rod is fixedly connected to the rotating device through a connecting piece, and a front end of the ejector rod extends to the surface of the adsorbed object and is in contact with the surface of the adsorbed object, so that a gap is kept between the lower surface of the flat plate and the surface of the adsorbed object,
wherein the ejector rod is provided with a height adjustment device, and the height adjustment device can adjust a protruding position of the front end of the ejector rod, so as to adjust the size of the gap between the lower surface of the flat plate and the surface of the adsorbed object.

2. The turntable mechanism according to claim 1 , wherein the height adjustment device is a push rod device, which is fixedly connected to the rotating device, and after the push rod device operates, the protruding position of the front end of the ejector rod is adjusted to adjust the size of the gap between the lower surface of the flat plate and the surface of the adsorbed object.

3. The turntable mechanism according to claim 1 , wherein the rotating device comprises a motor and a rotating shaft, the rotating shaft is connected to the flat plate, and the motor drives the rotating shaft to drive the flat plate to rotate.

4. A turntable mechanism, comprising a flat plate and a rotating device for driving the flat plate to rotate, wherein the flat plate rotates to generate a negative pressure between a lower surface of the flat plate and a surface of an adsorbed object, the flat plate and the adsorbed object adhere together by an adsorption force generated by the negative pressure, and in this case, a gap is kept between the lower surface of the flat plate and the surface of the adsorbed object;
wherein the flat plate is provided with a through hole, and the through hole is connected to fluid at upper and lower sides of the flat plate, and
wherein a height adjustment device is provided comprising a push rod device, which is fixedly connected to the rotating device, and after the push rod device operates, a protruding position of a front end of an ejector rod is adjusted to adjust the size of the gap between the lower surface of the flat plate and the surface of the adsorbed object.

5. The turntable mechanism according to claim 4 , wherein the rotating device comprises a motor and a rotating shaft, the rotating shaft is connected to the flat plate, and the motor drives the rotating shaft to drive the flat plate to rotate.

6. A turntable mechanism, comprising a flat plate and a rotating device for driving the flat plate to rotate, the flat plate being provided with a through hole, wherein the through hole is connected to fluid at upper and lower sides of the flat plate, and wherein the flat plate rotates to generate a negative pressure between a lower surface of the flat plate and a surface of an adsorbed object, whereby the flat plate and the adsorbed object adhere toward one another by an adsorption force generated by the negative pressure, and in this case, a gap is kept between the lower surface of the flat plate and the surface of the adsorbed object such that all of the flat plate, when the flat plate is rotating, is not in contact with the surface of the adsorbed object.

Assignees

• Univ Zhejiang

Inventors

• Li Xin
• Yu Xubo
• Zhao Jianghong

Classifications

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• B25B11/005

  Vacuum work holders · CPC title

• B25J15/0616 Primary

  with vacuum · CPC title

• B65G47/911

  with air blasts producing partial vacuum · CPC title

• H01L21/6838

  Electricity · mapped topic