High frequency magnetic films, method of manufacture, and uses thereof

Patent metadata

Field	Value
Publication number	US-11682509-B2
Application number	US-201916676736-A
Country	US
Kind code	B2
Filing date	Nov 7, 2019
Priority date	Nov 15, 2018
Publication date	Jun 20, 2023
Grant date	Jun 20, 2023

Abstract

A multilayer film includes a substrate; a first magnetic layer disposed on the substrate and a second magnetic layer disposed on the first magnetic layer. The first magnetic layer includes Fe (50-80) N (10-20) B (1-20) M (0-10) , wherein M is Si, Ta, Zr, Ti, Co, or a combination thereof. The second magnetic layer includes Fe (50-90) N (10-50) or Fe (60-90) N (1-10) Ta (5-30) . The multilayer magnetic film has, over a frequency range of 50 MHz to 10 GHz, a magnetic permeability of greater than or equal to 1800 over a selected frequency band in the frequency range; a magnetic loss tangent of less than or equal to 0.3 over a selected frequency band in the frequency range; and a cutoff frequency of greater than or equal to 1 GHz, or greater than or equal to 2 GHz.

First claim

What is claimed is:

1. A multilayer magnetic film, comprising:
a substrate;
a first magnetic layer disposed on the substrate, wherein the first magnetic layer comprises Fe (50-80) N (10-20) B (1-20) M (0-10) , wherein M is Si, Ta, Zr, Ti, Co, or a combination thereof; and
a second magnetic layer disposed on the first magnetic layer, wherein the second magnetic layer comprises Fe (50-90) N (10-50) or Fe (60-90) N (1-10) Ta (5-30) ;
wherein the multilayer magnetic film has, over a frequency range of 50 MHz to 10 GHz,
a magnetic permeability of greater than or equal to 1800 over a selected frequency band in the frequency range;
a magnetic loss tangent of less than or equal to 0.3 over a selected frequency band in the frequency range; and
a cutoff frequency of greater than or equal to 1 GHz.

2. The multilayer magnetic film of claim 1 , wherein the substrate comprises a glass, polymer, or ceramic.

3. The multilayer magnetic film of claim 1 , wherein
the first magnetic layer has a thickness of 10 to 100 nanometers, and
the second magnetic layer has a thickness of 10 to 400 nanometers.

4. The multilayer magnetic film of claim 1 , further comprising:
an additional first layer comprising Fe (50-80) N (10-20) B (1-20) disposed on the second layer; and
an additional second magnetic layer comprising Fe (50-90) N (10-50) or Fe (60-90) N (1-10) Ta (5-30) disposed on the additional first magnetic layer.

5. The multilayer magnetic film of claim 4 , comprising further additional first and second magnetic layers disposed on the additional second magnetic layer in alternation.

6. The multilayer magnetic film of claim 4 , wherein the first magnetic layer and the second magnetic layer have a total thickness of 20 to 500 nanometers.

7. An article comprising the multilayer film of claim 1 .

8. The article of claim 7 , wherein the article is a component of an electronic device.

9. A method of forming the multilayer magnetic film of claim 1 , the method comprising:
depositing the first magnetic layer onto a side of the substrate; and
depositing the second magnetic layer onto a side of the first magnetic layer opposite to the substrate.

10. The method of claim 9 , wherein the depositing comprises rf/DC sputtering, electron beam deposition, or a combination thereof.

11. The method of claim 10 , further comprising depositing an additional first layer on a side of the second layer opposite the first layer.

12. The method of claim 11 , further comprising depositing an additional second layer on a side of the additional first layer opposite the second layer.

13. The method of claim 9 , comprising adjusting the thickness of each layer to adjust the magnetic loss tangent of the multilayer magnetic film, the magnetic anisotropy of the magnetic multilayer film, or both.

Assignees

• Rogers Corp

Inventors

• Chen Yajie
• Zhang Xiaoyu
• Zhang Li
• Xing Yuanyuan

Classifications

• H01F1/38

  amorphous, e.g. amorphous oxides · CPC title

• H01F41/18

  by cathode sputtering · CPC title

• H01F1/16 Primary

  in the form of sheets (H01F1/147 takes precedence) · CPC title

• H01F41/32

  for applying conductive, insulating or magnetic material on a magnetic film {, specially adapted for a thin magnetic film} · CPC title

• Y10T428/32

  Composite [nonstructural laminate] of inorganic material having metal-compound-containing layer and having defined magnetic layer · CPC title