Dual pressure sensor with improved disturbance detection

Patent metadata

Field	Value
Publication number	US-11680856-B2
Application number	US-202117518746-A
Country	US
Kind code	B2
Filing date	Nov 4, 2021
Priority date	Nov 5, 2020
Publication date	Jun 20, 2023
Grant date	Jun 20, 2023

Abstract

A controller configured for detecting a disturbance using a comparison of outputs of at least two sensors and for determining a pressure from the outputs of the at least two sensors. A ratio of the measurement sensitivity and the disturbance sensitivity should be different for the at least two sensors. A method for monitoring disturbances of a sensor assembly includes comparing the outputs of the at least two sensors. The controller and related method provide, while requiring only two sensors, a redundant system that is also able to detect excessive disturbances on a sensor assembly.

First claim

The invention claimed is:

1. A controller configured for monitoring disturbances of a pressure sensor assembly,
the pressure sensor assembly comprising at least two sensors, wherein the sensors are configured for measuring a pressure and wherein the at least two sensors have a sensor dependent measurement sensitivity for the pressure, and at least one of the sensors is sensitive for a disturbance with a sensor dependent disturbance sensitivity, wherein a ratio of the measurement sensitivity and the disturbance sensitivity is different for at least two sensors,
wherein the controller is configured for detecting the disturbance by comparing outputs of the at least two sensors and the controller is configured for determining the pressure from the outputs of both of the at least two sensors.

2. A sensor system, for measuring a pressure, the sensor system comprising
a pressure sensor assembly comprising at least two sensors, wherein the sensors are configured for measuring the pressure and wherein each sensor has a sensor dependent measurement sensitivity for the pressure, and at least one of the sensors is sensitive for a disturbance with a sensor dependent disturbance sensitivity, wherein a ratio of the measurement sensitivity and the disturbance sensitivity is different for at least two sensors,
a controller according to claim 1 configured for monitoring disturbances of the pressure sensor assembly.

3. The sensor system according to claim 2 , wherein the sensors are made on a same substrate.

4. The sensor system according to claim 2 , wherein the sensors are using the same sensing principle.

5. The sensor system according to claim 2 , wherein the sensors have a different sensitivity for the pressure.

6. The sensor system according to claim 2 , wherein at least one sensor is insensitive to the disturbance.

7. The sensor system according to claim 2 , wherein the disturbance is caused by mechanical stress.

8. The sensor system according to claim 2 , wherein the disturbance is caused by charges in the pressure sensor assembly or by leakage currents through the pressure sensor assembly.

9. The sensor system according to claim 8 , wherein the sensor system is configured for having different supply voltages for the at least two sensors.

10. The sensor system according to claim 8 , wherein the sensor system is configured for applying a supply voltage only part of the time for at least one of the two sensors such that the supply duration during which a voltage is applied is different for the at least two sensors.

11. The sensor system according to claim 2 , wherein the sensor system is configured for swapping the supply voltage of at least one of the sensors.

12. The sensor system according to claim 2 , wherein the sensors are provided on one or more membranes.

13. The sensor system according to claim 2 , wherein the sensors are piezo-resistors.

14. The sensor system according to claim 2 , wherein the sensors comprise strain gauges.

15. A method for monitoring disturbances of a sensor assembly, the method comprising:
measuring an output of at least two sensors, wherein the sensors are configured for measuring a pressure and wherein the at least two sensors have a sensor dependent measurement sensitivity for the pressure, and at least one of the sensors is sensitive for a disturbance with a sensor dependent disturbance sensitivity:
wherein a ratio of the measurement sensitivity and the disturbance sensitivity is different for at least two sensors;
detecting the disturbance by comparing the output of the at least two sensors and determining the pressure from the outputs of both of the at least two sensors.

Assignees

• Melexis Technologies Nv

Inventors

• Vergauwen Johan
• Maes Ben
• Ramezani Maliheh
• Van Der Wiel Appolonius Jacobus

Classifications

• G01L1/2293

  of the semi-conductor type · CPC title

• G01L1/2268 Primary

  Arrangements for correcting or for compensating unwanted effects · CPC title

• G01L7/088 Primary

  correcting or regulating means for flexible diaphragms · CPC title

• G01L27/00

  Testing or calibrating of apparatus for measuring fluid pressure · CPC title

• G01L19/069 Primary

  Protection against electromagnetic or electrostatic interferences · CPC title