Quality factor compensation in microelectromechanical system (mems) gyroscopes
US-2019219394-A1 · Jul 18, 2019 · US
US11680799B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11680799-B2 |
| Application number | US-202016839669-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 3, 2020 |
| Priority date | Oct 16, 2017 |
| Publication date | Jun 20, 2023 |
| Grant date | Jun 20, 2023 |
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A vibratory gyroscope system having a mechanical resonator (proof mass) and drive circuitry for maintaining oscillation in two axes at a small frequency split. Angular rate input is shifted to the frequency split and modulates both the frequency (FM) and the amplitude (AM) of the oscillations. Unlike other gyroscope modulation techniques which derive rate information from only the FM information and are subject to aliasing for rate signals with bandwidth exceeding the modulation frequency, the innovation uses both the FM and AM information. By exploiting their orthogonality, the image frequencies from the modulation cancel, thus removing the bandwidth limitation.
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What is claimed is: 1. An electromechanical system, comprising: a mechanical resonator having a first mode of vibration and an associated first natural frequency, and a second mode of vibration having an associated second natural frequency, wherein angular rate of motion input couples energy between said first mode of vibration and said second mode of vibration; sensors and actuators for each of said first mode and said second mode for transducing an electrical signal into a mechanical vibration and transducing a mechanical vibration into an electrical signal; sustaining circuitry connected to the actuators to maintain vibrations in the first mode at a first frequency and the second mode at the second frequency; an amplitude and frequency measurement circuit configured for determining the instantaneous amplitude and frequency variation and outputting modulated versions of mode vibration amplitude and frequency as a representation of vibration amplitude and frequency; a phase determination circuit configured for receiving mode vibration signals and generating rate reference signals, and outputting demodulated frequency and amplitude rate signals; and a processing element configured for summing demodulated frequency and amplitude rate signals to generate an output rate in which the image spectra of the demodulation are eliminated from the angular rate determination, by exploiting the opposite polarity of the image spectra during summing. 2. The electromechanical system as recited in claim 1 , wherein said electromechanical system comprises a continuous mode reversal gyroscope. 3. The electromechanical system as recited in claim 2 , wherein said gyroscope is configured with a proof mass configured to move along at least two orthogonal axes. 4. The electromechanical system as recited in claim 2 , wherein said proof mass is suspended by springs. 5. The electromechanical system as recited in claim 1 , wherein said mechanical resonator comprises a gyroscope transducer. 6. The electromechanical system as recited in claim 1 , wherein said mechanical resonator is symmetric with respect to Coriolis coupled vibration modes. 7. The electromechanical system as recited in claim 1 , wherein said first natural frequency and said second natural frequency of said mechanical resonator differs by a range of approximately 1 to 100 Hz. 8. The electromechanical system as recited in claim 7 , wherein said mechanical resonator is manufactured or trimmed to achieve said difference between said first natural frequency and said second natural frequency, or a phase frequency control circuit is utilized which is configured to determine these natural frequencies and make adjustments to operation the mechanical resonator. 9. The electromechanical system as recited in claim 1 , wherein said system is configured to infer an angular rate of motion from the gains of the sustaining circuitry, the frequency of vibration of the first mode, and the frequency of vibration of the second mode. 10. The electromechanical system as recited in claim 1 , wherein said system is configured to infer an angular rate of motion from the sum of the gains of the sustaining circuitry and the frequencies of vibration of the first mode and the frequency of vibration of the second mode. 11. The electromechanical system as recited in claim 1 , wherein said system is configured to infer an estimate of the errors of the inferred angular rate from gains of the sustaining circuitry and the frequencies of vibration of the first mode and the second mode, and subtracting this estimate from the inferred output rate. 12. The electromechanical system as recited in claim 11 , further comprising a circuit configured for estimating temperature of the mechanical resonator from an estimate of the errors of the inferred angular rate. 13. The electromechanical system as recited in claim 12 , further comprising a circuit configured to compensate for errors due to variations in the temperature of the mechanical resonator using the temperature estimate. 14. An electromechanical system, comprising: a mechanical resonator having a first mode of vibration and an associated first natural frequency, and a second mode of vibration having an associated second natural frequency, wherein angular rate of motion input couples energy between said first mode of vibration and said second mode of vibration; sensors and actuators for each of the first mode and second mode of vibration for transducing an electrical signal into a mechanical vibration and transducing a mechanical vibration into an electrical signal; sustaining circuitry with variable gains connected to the actuators to maintain vibrations in the first mode and the second mode with gains adjusted to maintain substantially constant, non-zero velocity amplitude vibrations in the first mode at the first frequency of vibration and the second mode at the second frequency of vibration; an amplitude and frequency measurement circuit configured for determining the instantaneous amplitude and frequency variation and outputting modulated versions of mode vibration amplitude and frequency as a representation of vibration amplitude and frequency; a phase determination circuit configured for receiving mode vibration signals and generating rate reference signals, and outputting demodulated frequency and amplitude rate signals; and output circuitry to infer an angular rate of motion in response to summing demodulated frequency and amplitude rate signals to generate an output rate in which the image spectra of the demodulation are eliminated from the angular rate determination, by exploiting the opposite polarity of the image spectra during summing. 15. The electromechanical system as recited in claim 14 , wherein said electromechanical system comprises a continuous mode reversal gyroscope. 16. The electromechanical system as recited in claim 15 , wherein said gyroscope is configured with a proof mass configured to move along at least two orthogonal axes. 17. The electromechanical system as recited in claim 15 , wherein said proof mass is suspended by springs. 18. The electromechanical system as recited in claim 14 , wherein said mechanical resonator comprises a gyroscope transducer. 19. The electromechanical system as recited in claim 14 , wherein said mechanical resonator is symmetric with respect to Coriolis coupled vibration modes. 20. The electromechanical system as recited in claim 14 , wherein said first natural frequency and said second natural frequency differ by a range of approximately 1 to 100 Hz. 21. The electromechanical system as recited in claim 20 , wherein said mechanical resonator is manufactured or trimmed to achieve said difference between said first natural frequency and said second natural frequency, or a phase frequency control circuit is utilized which is configured to determined these natural frequencies and make adjustments to operation the mechanical resonator. 22. The electromechanical system as recited in claim 14 , wherein said output circuitry is configured to infer an angular rate of motion from the gains of the sustaining circuitry, and the frequency of vibration of the first mode and the second mode. 23. The electromechanical system as recited in claim 14 , wherein said output circuitry is configured to infer an angular rate of motion from a sum of the gains of the sustaining circuitry and the frequencies of vibration of the first mode and second mode.
Signal processing · CPC title
the devices having a single sensing mass · CPC title
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