Substrate positioning for deposition machine

Patent metadata

Field	Value
Publication number	US-11679602-B2
Application number	US-202016915614-A
Country	US
Kind code	B2
Filing date	Jun 29, 2020
Priority date	Jul 10, 2019
Publication date	Jun 20, 2023
Grant date	Jun 20, 2023

Abstract

A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.

First claim

What is claimed is:

1. A deposition device, comprising:
a substrate support; and
a deposition assembly comprising a fiber-coupled laser imaging system disposed across the substrate support, wherein the laser imaging system comprises a fiber-coupled laser configured to direct laser radiation from the laser toward the substrate support to illuminate a portion of the substrate support.

2. The deposition device of claim 1 , wherein the deposition assembly comprises a rail attached to supports located on opposite sides of the substrate support, and a dispenser assembly movably coupled to the rail.

3. The deposition device of claim 2 , wherein the dispenser assembly houses the laser imaging system.

4. A deposition device, comprising:
a substrate support; and
a deposition assembly comprising a fiber-coupled laser imaging system disposed across the substrate support, wherein
the laser imaging system comprises a fiber-coupled laser, and
the laser imaging system comprises a laser source having an emission wavelength of at least about 600 nm.

5. The deposition device of claim 4 , wherein the laser imaging system further comprises an imaging unit having a sensitivity profile matched to the emission wavelength of the laser source.

6. The deposition device of claim 5 , wherein the laser source has a pulse duration of 1 μsec or less.

7. The deposition device of claim 6 , further comprising a controller configured to scan a substrate positioned on the substrate support relative to the laser imaging system, activate the imaging unit for an imaging time, and activate the laser source for an active time, wherein the active time is encompassed by the imaging time.

8. The deposition device of claim 7 , wherein the laser source is a laser diode.

9. A deposition device, comprising:
a substrate support; and
a deposition assembly comprising a fiber-coupled laser imaging system disposed across the substrate support, wherein
the laser imaging system is one laser imaging system among a plurality of laser imaging systems coupled to the deposition assembly, and
the laser imaging system is configured to direct laser radiation toward the substrate support to illuminate a portion of the substrate support.

10. A deposition device, comprising:
a substrate support; and
a deposition assembly comprising a laser imaging system disposed across the substrate support, the laser imaging system comprising:
a laser source fiber coupled to an optical assembly to direct laser radiation from the laser source toward the substrate support; and
an imaging unit disposed to capture laser radiation reflected through the optical assembly.

11. The deposition device of claim 10 , further comprising a position controller to position the laser imaging system.

12. The deposition device of claim 10 , wherein the deposition assembly comprises a rail attached to supports located on opposite sides of the substrate support, and a dispenser assembly movably coupled to the rail.

13. The deposition device of claim 12 , wherein the dispenser assembly houses the laser imaging system.

14. The deposition device of claim 10 , wherein the laser imaging system comprises a laser diode source having an emission wavelength of at least about 600 nm.

15. The deposition device of claim 14 , wherein the laser imaging system further comprises an imaging unit having a sensitivity profile matched to the emission wavelength of the laser source.

16. The deposition device of claim 15 , wherein the laser source has a pulse duration of 1 μsec or less.

17. The deposition device of claim 16 , further comprising a controller configured to scan a substrate positioned on the substrate support relative to the laser imaging system, activate the imaging unit for an imaging time, and activate the laser source for an active time, wherein the active time is encompassed by the imaging time.

18. A deposition device, comprising:
a substrate support; and
a deposition assembly comprising a laser imaging system disposed across the substrate support, the laser imaging system comprising:
a laser source fiber coupled to an optical assembly to direct laser radiation from the laser source toward the substrate support; and
an imaging unit disposed to capture laser radiation reflected through the optical assembly wherein the laser imaging system is one laser imaging system among a plurality of laser imaging systems coupled to the deposition assembly.

19. A deposition device, comprising:
a substrate support; and
a deposition assembly comprising an imaging rail attached to supports located on opposite sides of the substrate support and a plurality of laser imaging systems movably coupled to the imaging rail, each laser imaging system comprising:
a laser source fiber coupled to an optical assembly to direct laser radiation from the laser source toward the substrate support; and
an imaging unit disposed to capture laser radiation reflected through the optical assembly.

20. The deposition device of claim 19 , further comprising a controller configured to scan a substrate positioned on the substrate support relative to the plurality of laser imaging systems, activate one or more of the imaging units for an imaging time, and activate one or more of the laser sources for an active time, wherein the active time for one of the laser sources is encompassed by the imaging time for the corresponding imaging unit.

Assignees

• Kateeva Inc

Inventors

• Mathia Karl
• Lu Jesse
• Chang Jerry
• Audet Matt
• Baca Stephen
• Mashevsky Vadim
• Darrow David C

Classifications

• H05K3/1241

  by ink-jet printing or drawing by dispensing · CPC title

• B41J3/28

  for printing downwardly on flat surfaces, e.g. of books, drawings, boxes {, envelopes, e.g. flat-bed ink-jet printers} · CPC title

• B41J11/009

  Detecting type of paper, e.g. by automatic reading of a code that is printed on a paper package or on a paper roll or by sensing the grade of translucency of the paper · CPC title

• B41J11/42 Primary

  Controlling {printing material conveyance for accurate alignment of the printing material with the printhead; Print registering} · CPC title

• H05K3/125

  by ink-jet printing · CPC title