Detection of contaminations on a sensing surface of a thermal sensor

Patent metadata

Field	Value
Publication number	US-11674833-B2
Application number	US-201916709043-A
Country	US
Kind code	B2
Filing date	Dec 10, 2019
Priority date	Dec 20, 2018
Publication date	Jun 13, 2023
Grant date	Jun 13, 2023

Abstract

A thermal sensor comprises an active element (41), e.g., a heater or cooler, at least one temperature sensor (31), and processing circuitry (50). The processing circuitry causes a change of power supplied to the active element (41). It then determines, at a plurality of times, a thermal parameter based on an output signal of the temperature sensors and analyzes the transient behavior of the thermal parameter. Based on this analysis, the processing circuitry determines a contamination signal that is indicative of a contamination on a sensing surface of the thermal sensor. If the thermal sensor comprises a plurality of temperature sensors arranged in different sectors of the sensing surface, a multi-sector thermal signal can be derived from the outputs of the sensors, and determination of the contamination signal can be based on the multi-sector thermal signal.

First claim

The invention claimed is:

1. A thermal sensor comprising:
an active element configured to be supplied with power so as to cause a temperature change of the active element;
at least one temperature sensor; and
processing circuitry configured to carry out the following steps:
causing a change of power supplied to the active element;
at a plurality of times after said change of power, determining a thermal parameter based on at least one output signal of the at least one temperature sensor to obtain a time-dependent transient behavior of the thermal parameter in response to the change of power;
analyzing said time-dependent transient behavior of the thermal parameter in response to the change of power;
based on the analysis of the time-dependent transient behavior of the thermal parameter, determining a contamination signal that is indicative of a contamination on a sensing surface of the thermal sensor.

2. The thermal sensor of claim 1 ,
wherein the step of analyzing the time-dependent transient behavior of the thermal parameter comprises comparing the time-dependent transient behavior of the thermal parameter to a time-dependent reference transient, and/or
wherein the step of analyzing the time-dependent transient behavior of the thermal parameter comprises deriving a transient amplitude and comparing the transient amplitude to a reference amplitude or to a threshold.

3. The thermal sensor of claim 1 ,
wherein the step of analyzing the time-dependent transient behavior of the thermal parameter comprises carrying out a fitting procedure of a superposition of at least two time-dependent functions to the time-dependent transient behavior of the thermal parameter to obtain a weighting factor for at least one of the functions; and
wherein the step of determining the contamination signal includes taking into account the at least one weighting factor determined by the fitting procedure.

4. The thermal sensor of claim 1 , wherein the thermal sensor comprises a plurality of temperature sensors arranged in different sectors of the sensing surface, and wherein the thermal parameter is a multi-sector thermal parameter based on a combination of output signals of the plurality of temperature sensors.

5. The thermal sensor of claim 4 ,
wherein the temperature sensors include at least one first temperature sensor and at least one second temperature sensor, and
wherein the multi-sector thermal parameter is a temperature-difference parameter that is indicative of a temperature difference between the first and second temperature sensors.

6. The thermal sensor of claim 5 , wherein the at least one first temperature sensor is arranged on a first side of the active element, and wherein the at least one second temperature sensor is arranged on a second side of the active element opposite to the first side.

7. The thermal sensor of claim 4 ,
wherein the thermal sensor comprises at least two first temperature sensors and at least two second temperature sensors, and
wherein the multi-sector thermal parameter is indicative of a sum or difference of a first temperature inhomogeneity parameter and a second temperature inhomogeneity parameter, the first temperature inhomogeneity parameter being indicative of a temperature inhomogeneity among the first temperature sensors, and the second temperature inhomogeneity parameter being indicative of a temperature inhomogeneity among the second temperature sensors.

8. The thermal sensor of claim 7 ,
wherein the first temperature sensors are left and right first temperature sensors arranged on the first side of the active element, wherein the second temperature sensors are left and right second temperature sensors arranged on the second side of the active element, the left second temperature sensor being aligned with the left first temperature sensor, and the right second temperature sensor being aligned with the right first temperature sensor, and
wherein the multi-sector thermal parameter is a diagonal-difference parameter, the diagonal-difference parameter being indicative of a difference between a first temperature inhomogeneity parameter and a second temperature inhomogeneity parameter, the first temperature inhomogeneity parameter being indicative of a temperature inhomogeneity between the left and right first temperature sensors, and the second temperature inhomogeneity parameter being indicative of a temperature difference between the left and right second temperature sensors.

9. A thermal sensor comprising:
an active element configured to be supplied with power so as to cause a temperature change of the active element;
at least two first temperature sensors arranged in different sectors of the sensing surface;
at least two second temperature sensors arranged in different sectors of the sensing surface; and
processing circuitry configured to carry out the following steps:
causing power to be supplied to the active element;
determining a multi-sector thermal parameter based on a combination of output signals of the at least two first temperature sensors and the at least two second temperature sensors, the multi-sector thermal parameter being indicative of a difference of a first temperature inhomogeneity parameter and a second temperature inhomogeneity parameter, the first temperature inhomogeneity parameter being indicative of a temperature inhomogeneity among the first temperature sensors, and the second temperature inhomogeneity parameter being indicative of a temperature inhomogeneity among the second temperature sensors; and
determining a contamination signal that is indicative of a contamination on a surface of the thermal sensor based on the multi-sector thermal parameter.

10. The thermal sensor of claim 9 , wherein the at least two first temperature sensors are arranged on a first side of the active element, and wherein the at least two second temperature sensors are arranged on a second side of the active element opposite to the first side.

11. The thermal sensor of claim 9 ,
wherein the first temperature sensors are left and right first temperature sensors arranged on the first side of the active element, wherein the second temperature sensors are left and right second temperature sensors arranged on the second side of the active element, the left second temperature sensor being aligned with the left first temperature sensor, and the right second temperature sensor being aligned with the right first temperature sensor, and
wherein the multi-sector thermal parameter is a diagonal-difference parameter, the diagonal-difference parameter being indicative of a difference between a first temperature inhomogeneity parameter and a second temperature inhomogeneity parameter, the first temperature inhomogeneity parameter being indicative of a temperature inhomogeneity between the left and right first temperature sensors, and the second temperature inhomogeneity parameter being indicative of a temperature difference between the left and right second temperature sensors.

12. A method of determining contaminations on a sensing surface of a thermal sensor, the thermal sensor comprising an active element comprised of a heater or cooler that is configured to be supplied with power so as to cause a temperature change of the active element, and at least one temperature sensor, the method comprising:
causing a change of power supplied to the active element;
at a plurality of times after said change of power, determining a thermal parameter based on output signals from the at least one temperature sensor to obtain a time-dependent transient behavior of the thermal parameter in response to the change of power;
analyzing said time-dependent

Assignees

• Sensirion Ag

Inventors

• Hornung Mark
• Rüegg Andreas
• Figi Harry
• Huber Lucas

Classifications

• G01F1/6888

  Thermoelectric elements, e.g. thermocouples, thermopiles · CPC title

• G01F1/7084 Primary

  using thermal detecting arrangements · CPC title

• G01N25/72

  Investigating presence of flaws · CPC title

• G01F1/698

  Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters · CPC title

• G01F1/6845

  Micromachined devices · CPC title