Micro pump having noise-reduced pressure-releasing structure

Patent metadata

Field	Value
Publication number	US-11668293-B2
Application number	US-202117142342-A
Country	US
Kind code	B2
Filing date	Jan 6, 2021
Priority date	Jan 13, 2020
Publication date	Jun 6, 2023
Grant date	Jun 6, 2023

Abstract

A micro pump having noise-reduced pressure-releasing structure includes a convergence plate, a valve sheet, a chamber plate, and a micro pump. The convergence plate has a convergence outlet and a discharge outlet. The valve sheet has a valve hole and a discharge recessed portion. The chamber plate has a recessed hole, a fluid determine hole, fluid through holes, and a receiving trough. The micro pump is in the receiving trough. During operation of the micro pump, the fluid is firstly transmitted to the fluid through hole and the fluid determine hole to push the valve sheet, and the fluid determine hole pushes the discharge recessed portion to block the discharge outlet. Then, since the pressure of the fluid at the fluid through hole pushes the valve sheet, the fluid flows through the valve hole so as to be discharged out from the convergence outlet.

First claim

What is claimed is:

1. A micro pump having noise-reduced pressure-releasing structure, comprising:
a convergence plate having a convergence plate first surface, a convergence plate second surface, a convergence outlet, and a discharge outlet, wherein the convergence plate second surface and the convergence plate first surface are opposite surfaces, wherein the convergence outlet and the discharge outlet both penetrate the convergence plate from the convergence plate first surface to the convergence plate second surface, wherein the convergence plate second surface further comprises at least one mortise and a discharge channel, and wherein the at least one mortise is symmetrically disposed on the convergence plate second surface, the discharge channel is in communication with the convergence outlet, and the discharge channel is in communication with the discharge outlet;
a valve sheet having a first contact surface and a second contact surface, wherein the first contact surface and the convergence plate second surface of the convergence plate form a connection surface, wherein the second contact surface and the first contact surface are opposite to each other, and wherein the first contact surface comprises a valve hole, at least one tenon through hole, and a discharge recessed portion, the valve hole and the at least one tenon through hole both penetrate the valve sheet from the first contact surface to the second contact surface, and the at least one tenon through hole and the at least one mortise are disposed correspondingly;
a chamber plate having a chamber plate first surface and a chamber plate second surface, wherein the chamber plate first surface and the second contact surface of the valve sheet form another connection surface, wherein the chamber plate second surface and the chamber plate first surface are opposite to each other, wherein the chamber plate first surface comprises a recessed hole, a fluid determine hole, at least one fluid through hole and at least one tenon, wherein the recessed hole does not penetrate the chamber plate from the chamber plate first surface to the chamber plate second surface, wherein the fluid determine hole and the at least one fluid through hole both penetrate the chamber plate from the chamber plate first surface to the chamber plate second surface, and wherein the at least one tenon, the at least one mortise of the convergence plate, and the at least one tenon through hole of the valve sheet are disposed correspondingly, and the chamber plate second surface has a receiving trough; and
a micro pump core, wherein the micro pump core is positioned in the receiving trough of the chamber plate so as to transmit a fluid to the convergence outlet of the convergence plate through the at least one fluid though hole of the chamber plate and the valve hole of the valve sheet;
wherein during operation of the micro pump core, the fluid is firstly transmitted to the at least one fluid through hole and the fluid determine hole of the chamber plate to push the valve sheet, meanwhile the fluid from the fluid determine hole of the chamber plate pushes the discharge recessed portion of the valve sheet above the fluid determine hole to block the discharge outlet of the convergence plate; then, since the pressure of the fluid at the at least one fluid through hole of the chamber plate pushes the valve sheet above the recessed hole of the chamber plate, the fluid is capable of flowing through the valve hole of the valve sheet so as to be discharged out from the convergence outlet of the convergence plate.

2. The micro pump having noise-reduced pressure-releasing structure according to claim 1 , wherein when the micro pump core is not in operation, the fluid is firstly flowed back below the convergence outlet of the convergence plate, and the pressure of the fluid pushes the valve sheet below the convergence outlet, and wherein since the valve hole is blocked by an outer peripheral portion of the recessed hole of the chamber plate, the fluid flows toward the discharge channel and downwardly pushes the discharge recessed portion of the valve sheet below the discharge outlet, so that the fluid flows out from the discharge outlet through the discharge channel, thereby completing a pressure-releasing procedure.

3. The micro pump having noise-reduced pressure-releasing structure according to claim 2 , wherein the micro pump core comprises:
an inlet plate having at least one inlet hole, at least one convergence channel, and a convergence chamber, wherein the at least one inlet hole is configured to guide the outside fluid to flow into the micro pump, the at least one inlet hole penetrates the inlet plate and is in communication with the at least one convergence channel, and the at least one convergence channel is in communication with the convergence chamber, so that the fluid guided from the at least one inlet hole is converged at the convergence chamber via the at least one convergence channel;
a resonance sheet attached to the inlet plate, wherein the resonance sheet has a perforation, a movable portion, and a fixed portion, wherein the perforation is located at a center portion of the resonance sheet and corresponds to the convergence chamber of the inlet plate, the movable portion is disposed at a periphery of the perforation, and the fixed portion is disposed at an outer periphery of the resonance sheet and attached to the inlet plate; and
a piezoelectric actuator attached to the resonance sheet;
wherein a chamber space is formed between the resonance sheet and the piezoelectric actuator, so that when the piezoelectric actuator is driven, the piezoelectric actuator resonates with the movable portion of the resonance sheet, and the fluid outside the micro pump is guided into the micro pump through the at least one inlet hole of the inlet plate, converged at the convergence chamber via the at least one convergence channel, and flowed through the perforation of the resonance sheet, thereby achieving transmission of the fluid.

4. The micro pump having noise-reduced pressure-releasing structure according to claim 3 , wherein the piezoelectric actuator comprises:
a suspension plate having a square shape, wherein the suspension plate is capable of bending and vibrating;
an outer frame disposed around a periphery of the suspension plate;
at least one supporting element connected between the suspension plate and the outer frame to provide a flexible support for the suspension plate; and
a piezoelectric element having a side length, wherein the side length of the piezoelectric element is smaller than or equal to a side length of the suspension plate, and the piezoelectric element is attached to a surface of the suspension plate so as to drive the suspension plate to bend and vibrate when a voltage is applied thereto.

5. The micro pump having noise-reduced pressure-releasing structure according to claim 4 , wherein the suspension plate has a protruding portion disposed on a surface of the suspension plate opposite to the surface of the suspension plate where the piezoelectric element is attached.

6. The micro pump having noise-reduced pressure-releasing structure according to claim 4 , wherein the suspension plate has a protruding portion integrally formed by a lithography process, and the protruding portion is a protruding structure protruding from a surface of the suspension plate opposite to the surface of the suspension plate where the piezoelectric element is attached.

7. The micro pump having noise-reduced pressure-releasing structure according to claim 3 , wherein the micro pump core further comprises a first insulation sheet, a conductive sheet, and a second insulation sheet, and wherein the inlet plate, the resonance sheet, the piezoelectric actuator, the first

Assignees

• Microjet Technology Co Ltd

Inventors

• Mou Hao-Jan
• Kao Chung-Wei
• Chen Shih-Chang
• Yang Chi-Chang
• Han Yung-Lung
• Huang Chi-Feng
• Kuo Chun-Yi
• Ku Yang

Classifications

• F16K99/0015

  Diaphragm or membrane valves · CPC title

• F04B43/046 Primary

  with piezoelectric drive · CPC title

• F16K2099/0094

  Micropumps · CPC title

• F04B53/001

  Noise damping · CPC title