Mechanical shock detection and phase and frequency correction of a MEMS mirror

Patent metadata

Field	Value
Publication number	US-11664811-B2
Application number	US-202016996109-A
Country	US
Kind code	B2
Filing date	Aug 18, 2020
Priority date	Jun 24, 2019
Publication date	May 30, 2023
Grant date	May 30, 2023

Abstract

A system for driving a microelectromechanical system (MEMS) oscillating structure includes a phase error detector configured to generate a phase error signal based on measured event times and expected event times of the MEMS oscillating structure oscillating about a rotation axis; a disturbance event detector configured to detect a disturbance event based on the phase error signal and a disturbance threshold value; and a phase frequency detector (PFD) and correction circuit configured to, in response to the detected disturbance event, monitor for a plurality of measured crossing events of the MEMS oscillating structure oscillating about the rotation axis, generate a first compensation signal based on at least a first measured crossing event and a second measured crossing event to correct a frequency of the MEMS oscillating structure, and generate a second compensation signal based on a third measured crossing event to correct a phase of the MEMS oscillating structure.

First claim

What is claimed is:

1. A system for driving a microelectromechanical system (MEMS) oscillating structure, comprising:
the MEMS oscillating structure configured to oscillate about a rotation axis; and
a phase frequency detector (PFD) and correction circuit configured to monitor for a plurality of measured crossing events of the MEMS oscillating structure oscillating about the rotation axis, generate a first compensation signal based on at least a first measured crossing event and a second measured crossing event of the plurality of measured crossing events to correct a frequency of the MEMS oscillating structure, and generate a second compensation signal based on a third measured crossing event of the plurality of measured crossing events to correct a phase of the MEMS oscillating structure.

2. The system of claim 1 , wherein:
the first measured crossing event, the second measured crossing event, and the third measured crossing event occur sequentially as the MEMS oscillating structure oscillates about the rotation axis after a disturbance event, wherein the second measured crossing event is subsequent to the first measured crossing event, and the third measured crossing event is subsequent to the second measured crossing event.

3. The system of claim 1 , wherein a first time difference between the first measured crossing event and the second measured crossing event is representative of a half oscillation period of the MEMS oscillating structure and a second time difference between the first measured crossing event and the third measured crossing event is representative of a full oscillation period of the MEMS oscillating structure.

4. The system of claim 1 , wherein:
the first compensation signal includes a corrected digitally controlled oscillator (DCO) counter increment, and
the PFD and correction circuit is configured to determine a time period between the first measured crossing event and the second measured crossing event, and calculate the corrected DCO counter increment based on the time period.

5. The system of claim 4 , further comprising:
a DCO counter configured to receive the first compensation signal and update a DCO counter value used to set the frequency of the MEMS oscillating structure based on the corrected DCO counter increment.

6. The system of claim 4 , wherein:
the second compensation signal is a corrected phase counter signal configured to reset a subtiming counter to an event-crossing counter value, wherein the subtiming counter is used to drive the MEMS oscillating structure about the rotation axis, and
the PFD and correction circuit is configured to transmit the first compensation signal and the second compensation signal based on detecting the third measured crossing event.

7. The system of claim 6 , wherein:
the first measured crossing event, the second measured crossing event, and the third measured crossing event are zero-crossing events at which a rotation angle of the MEMS oscillating structure is 0° as the MEMS oscillating structure oscillates about the rotation axis.

8. The system of claim 1 , wherein:
the second compensation signal is a corrected phase counter signal configured to reset a subtiming counter to an event-crossing counter value, wherein the subtiming counter is used to drive the MEMS oscillating structure about the rotation axis, and
the PFD and correction circuit is configured to transmit the second compensation signal based on detecting the third measured crossing event.

9. The system of claim 8 , further comprising:
a driver configured to drive the MEMS oscillating structure about the rotation axis, the driver comprising the subtiming counter configured to control the phase of the MEMS oscillating structure.

10. The system of claim 1 , further comprising:
a driver configured to toggle a driving voltage on and off to drive the MEMS oscillating structure about the rotation axis,
wherein, based on a disturbance event, the PFD and correction circuit is configured to control the driver to maintain the driving voltage on for at least two oscillation periods of the MEMS oscillating structure.

11. The system of claim 10 , wherein the PFD and correction circuit is configured to monitor for the plurality of measured crossing events while the driver maintains the driving voltage on for the at least two oscillation periods.

12. A method of compensating a microelectromechanical system (MEMS) oscillating structure, the method comprising:
driving the MEMS oscillating structure configured to oscillate about a rotation axis;
detecting a disturbance event that disrupts an oscillation of the MEMS oscillating structure; and
based on the disturbance event:
monitoring for a plurality of measured crossing events of the MEMS oscillating structure oscillating about the rotation axis;
generating a first compensation signal based on at least a first measured crossing event and a second measured crossing event of the plurality of measured crossing events to correct a frequency of the MEMS oscillating structure; and
generating a second compensation signal based on a third measured crossing event of the plurality of measured crossing events to correct a phase of the MEMS oscillating structure.

13. A system for driving a microelectromechanical system (MEMS) oscillating structure, comprising:
the MEMS oscillating structure configured to oscillate about a rotation axis;
a disturbance event detector configured to detect a disturbance event that disrupts an oscillation of the MEMS oscillating structure; and
a phase frequency detector (PFD) and correction circuit configured to, based on the disturbance event, monitor for a plurality of measured crossing events of the MEMS oscillating structure oscillating about the rotation axis, generate a first compensation signal based on at least a first measured crossing event and a second measured crossing event of the plurality of measured crossing events to correct a frequency of the MEMS oscillating structure, and generate a second compensation signal based on a third measured crossing event of the plurality of measured crossing events to correct a phase of the MEMS oscillating structure.

14. The system of claim 13 , wherein the disturbance event is caused by vibration that is transferred to the MEMS oscillating structure.

15. The system of claim 13 , wherein the disturbance event is a mechanical shock.

16. The system of claim 13 , further comprising:
a driver configured to toggle a driving voltage on and off to drive the MEMS oscillating structure about the rotation axis,
wherein, based on the disturbance event, the PFD and correction circuit is configured to control the driver to maintain the driving voltage on for at least two oscillation periods of the MEMS oscillating structure.

17. The system of claim 13 , wherein:
the first measured crossing event, the second measured crossing event, and the third measured crossing event occur sequentially as the MEMS oscillating structure oscillates about the rotation axis after the disturbance event, wherein the second measured crossing event is subsequent to the first measured crossing event, and the third measured crossing event is subsequent to the second measured crossing event.

18. The system of claim 13 , wherein a first time difference between the first measured crossing event and the second measured crossing event is representative of a half oscillation period of the MEMS oscillating structure and a second time difference between the first measured crossing event and the third measured crossing event is representat

Assignees

• Infineon Technologies Ag

Inventors

• Stelzer Philipp
• Druml Norbert
• Steger Christian
• Strasser Andreas

Classifications

• G01S17/931

  of land vehicles · CPC title

• G01S17/14 Primary

  wherein a voltage or current pulse is initiated and terminated in accordance with the pulse transmission and echo reception respectively, e.g. using counters · CPC title

• H03L7/00 Primary

  Automatic control of frequency or phase; Synchronisation · CPC title

• G01S7/497

  Means for monitoring or calibrating · CPC title

• H03L7/0992 Primary

  comprising a counter or a frequency divider · CPC title