Vibration-suppressing mechanism to be attached to charged particle beam device, and charged particle beam device
US-10591018-B2 · Mar 17, 2020 · US
Vibration damping system for charged particle beam apparatus
US11664185B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11664185-B2 |
| Application number | US-202117536223-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 29, 2021 |
| Priority date | Dec 25, 2020 |
| Publication date | May 30, 2023 |
| Grant date | May 30, 2023 |
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- Title
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Abstract
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A vibration damping system for a charged particle beam apparatus according to the present invention includes a column through which a charged particle beam passes, a vibration detection unit that detects vibration of the column, a damping mechanism that applies vibration to the column to suppress the vibration of the column, and a control device that controls the damping mechanism. The control device includes a damping gain control unit that amplifies a detection signal of the vibration detection unit with a set amplification factor and outputs an amplified detection signal as a control signal to the damping mechanism, and a saturation suppression unit that adjusts a feedback gain value of the damping gain control unit according to a detection signal of the vibration detection unit, a signal of the damping mechanism, and a maximum output value and a minimum output value of the damping mechanism.
First claim
Opening claim text (preview).
What is claimed is: 1. A vibration damping system for a charged particle beam apparatus, comprising: a column through which a charged particle beam passes; a vibration detection unit configured to detect vibration of the column; a damping mechanism configured to apply vibration to the column to suppress vibration of the column; and a control device configured to control the damping mechanism, wherein the control device includes: a damping gain control unit that amplifies a detection signal of the vibration detection unit with a set amplification factor and outputs an amplified detection signal to the damping mechanism as a control signal; and a saturation suppression unit that adjusts a feedback gain value of the damping gain control unit according to a detection signal of the vibration detection unit, a signal of the damping mechanism, and a maximum output value and a minimum output value of the damping mechanism. 2. The vibration damping system according to claim 1 , wherein the saturation suppression unit is configured to sequentially update the feedback gain value based on a signal of the vibration detection unit and a maximum output value and a minimum output value of the damping mechanism. 3. The vibration damping system according to claim 1 , wherein the saturation suppression unit configures the feedback gain value based on a magnitude relationship between an absolute value of a difference between the maximum output value and the minimum output value of the damping mechanism and an instantaneous amplitude of an output signal to the damping mechanism. 4. The vibration damping system according to claim 1 , wherein the saturation suppression unit includes a filter processing unit that filters a signal of a predetermined frequency among signals of the vibration detection unit. 5. The vibration damping system according to claim 4 , wherein the filter processing unit extracts a signal related to a column collapse primary mode related to collapse of the column in one direction.
Assignees
Inventors
Classifications
Multi-beam, e.g. fly's eye, comb probe · CPC title
- H01J37/023Primary
Means for mechanically adjusting components not otherwise provided for · CPC title
- H01J37/16Primary
Vessels; Containers · CPC title
taken directly from the generator circuit · CPC title
with electronic damping · CPC title
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Frequently asked questions
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- What does patent US11664185B2 cover?
- A vibration damping system for a charged particle beam apparatus according to the present invention includes a column through which a charged particle beam passes, a vibration detection unit that detects vibration of the column, a damping mechanism that applies vibration to the column to suppress the vibration of the column, and a control device that controls the damping mechanism. The control …
- Who is the assignee on this patent?
- Hitachi High Tech Corp
- What technology area does this patent fall under?
- Primary CPC classification H01J37/023. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue May 30 2023 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).