Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article
US-2024393682-A1 · Nov 28, 2024 · US
US11660731B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11660731-B2 |
| Application number | US-202117454393-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 10, 2021 |
| Priority date | Jan 25, 2021 |
| Publication date | May 30, 2023 |
| Grant date | May 30, 2023 |
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Disclosed are a negative pressure driven sucking apparatus and a preparation method thereof. The sucking apparatus comprises a sucking disc body, wherein a negative pressure cavity is formed in the middle of the sucking disc body, and the negative pressure cavity is connected with a vacuum line, and the bottom of the negative pressure cavity having a flexible section, and an annular wedge-shaped microstructure is formed at the bottom of the body surrounding the flexible section. Stable loading and release processes of the annular wedge-shaped microstructure are realized.
Opening claim text (preview).
What is claimed is: 1. A negative pressure driven sucking apparatus, comprising: a sucking disc body including a cavity being connected with a vacuum line for generating a negative pressure in the cavity, a floor of the cavity forming a part of a bottom of the sucking disc body, the floor of the cavity having a flexible section and the floor having a sealing and fixed connection with an inner wall of the sucking disc body while the negative pressure is generated in the cavity; and an annular wedge-shaped microstructure formed on the bottom of the sucking disc body surrounding the flexible section. 2. The negative pressure driven sucking apparatus according to claim 1 , wherein the sucking disc body is cylindrical, the bottom has a circular ring surface, and the cavity is a cylindrical cavity. 3. The negative pressure driven sucking apparatus according to claim 1 , wherein the annular wedge-shaped microstructure comprises multiple circles of micro wedge-shaped structures, the multiple circles of micro wedge-shaped structures are distributed in an annular array mode, and each circle of micro wedge-shaped structures is provided with multiple micro wedge-shaped structures. 4. The negative pressure driven sucking apparatus according to claim 3 , wherein the micro wedge-shaped structure comprises a first inclined plane and a second inclined plane, and the bottom of the first inclined plane is connected with the bottom of the second inclined plane to form a protruding tip; the included angle between the first inclined plane and the vertical plane ranges from 50° to 80°, the included angle between the second inclined plane and the vertical plane ranges from 20° to 60°, and the height of the single micro wedge-shaped structure in the vertical direction ranges from 40 to 200 microns. 5. The negative pressure driven sucking apparatus according to claim 4 , wherein a groove is formed between every two adjacent circles of micro wedge-shaped structures, the adjacent circles of micro wedge-shaped structures are sequentially connected, or a spacing of 30-100 microns between every two adjacent circles of micro wedge-shaped structures. 6. The negative pressure driven sucking apparatus according to claim 1 , wherein the flexible section is of a hemispherical or arc-shaped arch structure. 7. The negative pressure driven sucking apparatus according to claim 1 , wherein the sucking disc body and the annular wedge-shaped microstructure are made of a liquid silicone rubber. 8. The negative pressure driven sucking apparatus according to claim 7 , wherein the sucking disc body is formed through a mold casting process or a 3D printing process; and the annular wedge-shaped microstructure and the bottom of the sucking disc body are bonded by a glue, or the liquid silicone rubber is poured on the mold with the annular micro wedge-shaped structures, and the annular wedge-shaped microstructure and the bottom of the sucking disc body are integrated into a whole.
for making articles of definite length, i.e. discrete articles · CPC title
Microarticles, nanoarticles · CPC title
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Casting under special conditions, e.g. vacuum · CPC title
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