Chemical mechanical polishing apparatus for polishing workpiece
US-2019262968-A1 · Aug 29, 2019 · US
US11660723B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11660723-B2 |
| Application number | US-201916497095-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 4, 2019 |
| Priority date | Apr 13, 2018 |
| Publication date | May 30, 2023 |
| Grant date | May 30, 2023 |
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In an automatic polishing system configured such that under control of a polishing robot and/or a polishing tool by a polishing controller, the polishing tool provides a polishing action on a polishing subject face, a color intensity measurement instrument is provided for measuring an intensity of a specified color in the polishing subject face. Based on the intensity of the specified color measured by this color intensity measurement instrument, the polishing controller controls the polishing robot and/or the polishing tool, so that an amount of polishing work by the polishing tool onto the polishing subject face is adjusted according to the intensity of the specified color.
Opening claim text (preview).
The invention claimed is: 1. A polishing system for polishing a polishing subject article including a base material and a surface layer having a color different from the base material, comprising: a polishing tool for carrying out a polishing action on a polishing subject face of the polishing subject article; a color intensity analyzer for measuring intensity of a specified color on the polishing subject face; a rail for allowing the polishing tool and the color intensity analyzer to move along a longitudinal direction of the polishing subject article; and a controller for determining a speed of movement of the polishing tool relative to the polishing subject face based on the intensity of the specified color measured by the color intensity analyzer. 2. The polishing system of claim 1 , further comprising a shape measurement instrument for measuring a three-dimensional shape of the polishing subject face, wherein the controller controls the polishing tool to move to parts of the polishing subject face one after another based on the three-dimensional shape measured by the shape measurement instrument. 3. The polishing system of claim 2 , further comprising a camera for photographing the polishing subject face, wherein the shape measurement instrument measures the three-dimensional shape of the polishing subject face based on image data of the polishing subject face obtained by the camera; and the color intensity analyzer measures the intensity of the specified color on the polishing subject face, based on the image data. 4. The polishing system of claim 3 , further comprising a measurement robot holding the camera. 5. The polishing system of claim 1 , further comprising a shape measurement instrument for measuring a three-dimensional shape of the polishing subject face, wherein the controller carries out a first polishing action to the polishing subject face based on the three-dimensional shape measured by the shape measurement instrument, and then carries out a second polishing action to the polishing subject face based on the intensity of the specified color measured by the color intensity analyzer. 6. The polishing system of claim 1 , wherein the specified color whose intensity is measured by the color intensity analyzer comprises a plurality of different colors. 7. The polishing system according to claim 1 , wherein a first speed of movement of the polishing tool determined when a first intensity of the specified color is measured by the color intensity analyzer is larger than a second speed of movement of the polishing tool determined when a second intensity of the specified color which is larger than the first intensity of the specified color is measured by the color intensity analyzer. 8. The polishing system according to claim 1 , wherein the polishing tool and the color intensity analyzer are set side by side along the longitudinal direction of the polishing subject article.
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