Photon counting device and photon counting method

Patent metadata

Field	Value
Publication number	US-11656374-B2
Application number	US-202117502424-A
Country	US
Kind code	B2
Filing date	Oct 15, 2021
Priority date	Nov 24, 2017
Publication date	May 23, 2023
Grant date	May 23, 2023

Abstract

A photon counting device includes a plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage, an A/D converter configured to convert the voltages output from the amplifiers of the plurality of pixels to digital values; and a conversion unit configured to convert the digital value output from the A/D converter to the number of photons by referring to reference data, for each of the plurality of pixels, and the reference data is created based on a gain and an offset value for each of the plurality of pixels.

First claim

The invention claimed is:

1. A device for photon counting comprising:
a CMOS image sensor including plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage;
an A/D converter configured to convert the voltages output from the amplifiers of the plurality of pixels to digital values; and
a computer configured to convert the digital value output from the A/D converter to a number of photons by referring to reference data, for each of the plurality of pixels,
wherein a readout noise of the amplifier is equal to or less than 0.4 e-rms, and
wherein the reference data is threshold value data for distinguishing between adjacent numbers of photons.

2. The device according to claim 1 , wherein the computer is configured to convert the digital value of only the pixels of which the readout noise is equal to or less than 0.4 e-rms.

3. The device according to claim 1 , wherein the readout noise of the amplifier is equal to or less than 0.2 e-rms.

4. The device according to claim 1 , wherein the readout noise of the amplifier is equal to or less than 0.15 e-rms.

5. The device according to claim 1 , wherein the computer is further configured to create a two-dimensional image indicating the number of photons in each pixel based on the number of photons.

6. The device according to claim 1 , wherein the computer is further configured to create a histogram that is a plot of the number of pixels with respect to the number of photons.

7. The device according to claim 1 , wherein the A/D converter is provided in each pixel.

8. The device according to claim 1 , wherein the computer is configured to divide an average number of electrons for each pixel by a quantum efficiency to obtain an average number of photons.

9. The device according to claim 1 , wherein the reference data is a look-up table.

10. A method for photon counting the method comprising:
converting light input to respective photoelectric conversion elements of a plurality of pixels of a CMOS image sensor to charge;
amplifying, by an amplifier constituting each of the plurality of pixels, the converted charge and converting the charge to a voltage;
converting, by an A/D converter, the voltage output from the amplifier to a digital value and outputting the digital value; and
converting the digital value of each of the plurality of pixels output from the A/D converter to a number of photons by referring to reference data, for each of the plurality of pixels,
wherein a readout noise of the amplifier is equal to or less than 0.4 e-rms, and
wherein the reference data is threshold value data for distinguishing between adjacent numbers of photons.

11. The method according to claim 10 , wherein the converting converts the digital value of only the pixels of which the readout noise is equal to or less than 0.4 e-rms.

12. The method according to claim 10 , wherein the readout noise of the amplifier is equal to or less than 0.2 e-rms.

13. The method according to claim 10 , wherein the readout noise of the amplifier is equal to or less than 0.15 e-rms.

14. The method according to claim 10 , further comprising:
creating a two-dimensional image indicating the number of photons in each pixel based on the number of photons.

15. The method according to claim 10 , further comprising:
creating a histogram that is a plot of the number of pixels with respect to the number of photons.

16. The method according to claim 10 , wherein the A/D converter is provided in each pixel.

17. The method according to claim 10 , further comprising:
dividing an average number of electrons for each pixel by a quantum efficiency to obtain an average number of photons.

18. The method according to claim 10 , wherein the reference data is a look-up table.

19. A computer comprising:
a data processor configured to convert a digital value of each of the plurality of pixels output from an A/D converter of a CMOS image sensor to a number of photons by referring to reference data, for each of the plurality of pixels,
wherein the reference data is threshold value data for distinguishing between adjacent numbers of photons.

20. A non-transitory computer-readable storage medium storing a program, the program causing the computer to:
convert a digital value of each of the plurality of pixels output from an A/D converter of a CMOS image sensor to a number of photons by referring to reference data, for each of the plurality of pixels,
wherein the reference data is threshold value data for distinguishing between adjacent numbers of photons.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Maruno Tadashi
• Toda Eiji
• NAKAJIMA Mao
• Takahashi Teruo
• Higuchi Takafumi

Classifications

• H04N25/78

  Readout circuits for addressed sensors, e.g. output amplifiers or A/D converters · CPC title

• H04N25/773

  comprising photon counting circuits, e.g. single photon detection [SPD] or single photon avalanche diodes [SPAD] · CPC title

• H10F39/803

  Pixels having integrated switching, control, storage or amplification elements · CPC title

• H04N25/77

  Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components · CPC title

• H04N25/671

  for non-uniformity detection or correction · CPC title