Mask, method of manufacturing the same, and method of manufacturing display panel

Patent metadata

Field	Value
Publication number	US-11653554-B2
Application number	US-202017014841-A
Country	US
Kind code	B2
Filing date	Sep 8, 2020
Priority date	Jan 13, 2020
Publication date	May 16, 2023
Grant date	May 16, 2023

Abstract

Provided is a mask which includes a mask body having a plurality of through hole portions and including a polymer film and a plurality of magnetic particles dispersed in the polymer film, and a polymer coating layer disposed on an outer surface of the mask body. Accordingly, the time and cost of manufacturing a mask are reduced and the precision of a deposition process is improved as well, so that the manufacturing yield of a display panel using the mask is improved and a display panel manufactured using the same has improved reliability.

First claim

What is claimed is:

1. A mask, comprising:
a mask body having a plurality of through hole portions, and including a polymer film and a plurality of magnetic particles dispersed in the polymer film; and
a polymer coating layer disposed on an outer surface of the mask body.

2. The mask of claim 1 , wherein each of the polymer film and the polymer coating layer comprises polyimide (PI) respectively.

3. The mask of claim 1 , wherein each of the magnetic particles comprises at least one metal selected from the group consisting of iron (Fe), manganese (Mn), nickel (Ni), and cobalt (Co), or an alloy containing at least one selected from the group.

4. The mask of claim 1 , wherein the polymer coating layer contacts the polymer film.

5. The mask of claim 1 , wherein the polymer film and the polymer coating layer are made out of the same material.

6. The mask of claim 1 , wherein the polymer film has a thickness of about 3 μm to about 50 μm.

7. The mask of claim 1 , wherein the magnetic particle has a diameter of about 3 nm to about less than 10 μm.

8. The mask of claim 1 , wherein the polymer coating layer has a thickness of about 1 μm to about 10 μm.

9. The mask of claim 1 , wherein the polymer coating layer covers an entireties of an upper surface and a lower surface of the polymer film, and covers inner walls of the plurality of through hole portions.

10. A method of manufacturing a mask, comprising steps of:
forming a mask body part through a polymer resin in which a plurality of magnetic particles are dispersed;
patterning a plurality of through hole portions in the mask body part; and
forming a polymer coating layer by coating and covering inner walls of the plurality of through hole portions with a polymer resin.

11. The method of claim 10 , wherein in the forming of the mask body part,
the polymer resin comprises polyimide (PI), and
the magnetic particles comprise at least one metal selected from the group consisting of iron (Fe), manganese (Mn), nickel (Ni), and cobalt (Co), or an alloy containing at least one selected from the group.

12. The method of claim 10 , wherein the forming of the mask body part comprises coating a carrier substrate with the polymer resin in which the magnetic particles are dispersed.

13. The method of claim 10 , wherein the forming of the mask body part is accomplished by steps of:
performing a primary coating with the polymer resin,
dispersing the magnetic particles in the polymer resin subjected to the primary coating, and
performing a secondary coating with the polymer resin on the polymer resin subjected to the primary coating.

14. The method of claim 10 , wherein the plurality of through hole portions are patterned using a laser.

15. The method of claim 10 , wherein the polymer coating layer covers an entireties of an upper surface and a lower surface of the mask body part.

16. The method of claim 10 , wherein the mask body part and the polymer coating layer are formed through the same polymer resin.

17. A method of manufacturing a display panel, comprising:
preparing a target substrate;
disposing, below the target substrate, a mask in which a plurality of through hole portions are defined;
forming, below the target substrate, a plurality of light emitting patterns corresponding to the plurality of through hole portions; and
removing the mask,
wherein the mask comprises:
a mask body having the plurality of through hole portions and including a polymer film and a plurality of magnetic particles dispersed in the polymer film; and
a polymer coating layer disposed on an outer surface of the mask body.

18. The method of claim 17 , wherein during the disposing of the mask below the target substrate, a magnetic plate spaced apart from the mask with respect to the target substrate which is disposed in-between is disposed.

19. The method of claim 17 , wherein during the disposing of the mask below the target substrate, the target substrate and the mask contacts each other.

20. The method of claim 17 , wherein the display panel comprises a plurality of pixels, and
each of the plurality of light emitting patterns are arranged in the pixels respectively.

Assignees

• Samsung Display Co Ltd

Inventors

• Im Sungsoon
• Moon Youngmin
• Son Ji-Hee
• Moon Minho
• Song Seungyong
• Lee Duckjung
• Lee Seul

Classifications

• H10P50/695 Primary

  characterised by the process involved to create the mask, e.g. lift-off masks or sidewalls or to modify the mask · CPC title

• H10K71/166

  using selective deposition, e.g. using a mask · CPC title

• C23C14/042 Primary

  using masks · CPC title

• C09D179/08

  Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors · CPC title

• B05D7/02

  to macromolecular substances, e.g. rubber (treatment or coating of shaped articles made of macromolecular substances C08J7/00) · CPC title