Image sensor and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-11641000-B2
Application number	US-202017137300-A
Country	US
Kind code	B2
Filing date	Dec 29, 2020
Priority date	Nov 23, 2020
Publication date	May 2, 2023
Grant date	May 2, 2023

Abstract

The invention provides an image sensor, the image sensor includes a substrate, a first circuit layer located on the substrate, and at least one nanowire photodiode located on the first circuit layer and electrically connected to the first circuit layer, the nanowire photodiode comprises a lower material layer and an upper material layer with a P-N junction between the lower material layer and the upper material layer, the lower material layer includes perovskite material.

First claim

What is claimed is:

1. An image sensor, comprising:
a substrate;
a first circuit layer on the substrate;
at least one nanowire photodiode located on the first circuit layer and electrically connected with the first circuit layer, wherein the nanowire photodiode comprises a lower material layer and an upper material layer, and a P-N junction or a Schottky junction is arranged between the lower material layer and the upper material layer, wherein the lower material layer comprises a perovskite material; and
a precursor layer located under the lower material layer, wherein the precursor layer comprises the same metal as the lower material layer.

2. The image sensor according to claim 1 , wherein the general formula of the perovskite material is ABX 3 , where A contains methylamine ions, formamidine ions and metal cesium ions (Cs+), B contains metal cations (Pb2+, Sn2+, Bi2+), and X contains halogen anions (Cl—, Br—, I—).

3. The image sensor according to claim 1 , wherein the perovskite material comprises MAPbI 3 , FASnCl 3 , FASnBr 3 , FASnI 3 , FASnClxBryI 3 -x-y, MASnCl 3 , MASnBr 3 , MASnI 3 , MASnClxBryI 3 -x-y, CsSnCl 3 , CsSnBr 3 , CsSnI 3 , CsSnClxBryI 3 -x-y, FAPbCl 3 , FAPbBr 3 , FAPbI 3 , FAPbClxBryI 3 -x-y, MAPbCl 3 , MAPbBr 3 , MAPbI 3 , MAPbClxBryI 3 -x-y, CsPbCl 3 , CsPbBr 3 , CsPbI 3 , CsPbClxBryI 3 -x-y, FABiCl 3 , FABiBr 3 , FABiI 3 , FABiClxBryI 3 -x-y, MABiCl 3 , MABiBr 3 , MABiI 3 , MABiClxBryI 3 -x-y, CsBiCl 3 , CsBiBr 3 , CsBiI 3 , and CsBiClxBryI 3 -x-y, where parameters x and y range from 0 to 3.

4. The image sensor according to claim 1 , wherein the perovskite material contains N-type conductivity type, and the upper material layer has P-type conductivity type.

5. The image sensor according to claim 1 , wherein the upper material layer comprises a metal oxide layer.

6. The image sensor according to claim 5 , wherein the upper material layer comprises MnO 3 (molybdenum trioxide), V 2 O 5 , WO 3 , Si, Ge, GaAs, GaN, WSe 2 , NiO, Cu 2 O, CuO, TCNQ (Tetracyanoquinodimethane), and F4-TCNQ.

7. The image sensor according to claim 1 , further comprising at least one optical device located on the nanowire photodiode.

8. The image sensor according to claim 1 , further comprises a second device, the second device at least comprises a second substrate and a second circuit layer, and a contact structure passing through the substrate and electrically connecting the first circuit layer and the second circuit layer.

9. A method for forming an image sensor, comprising:
providing a substrate;
forming a first circuit layer on the substrate;
forming at least one nanowire photodiode on the first circuit layer and electrically connected with the first circuit layer, wherein the nanowire photodiode comprises a lower material layer and an upper material layer, and a P-N junction is formed between the lower material layer and the upper material layer, wherein the lower material layer comprises perovskite material; and
forming a precursor layer located under the lower material layer, wherein the precursor layer comprises the same metal as the lower material layer.

10. The method according to claim 9 , wherein the general formula of the perovskite material is ABX 3 , where A contains methylamine ions, formamidine ions and metal cesium ions (Cs+), B contains metal cations (Pb2+, Sn2+, Bi2+), and X contains halogen anions (Cl—, Br—, I—).

11. The method according to claim 10 wherein the perovskite material comprises MAPbI 3 , FASnCl 3 , FASnBr 3 , FASnI 3 , FASnClxBryI 3 -x-y, MASnCl 3 , MASnBr 3 , MASnI 3 , MASnClxBryI 3 -x-y, CsSnCl 3 , CsSnBr 3 , CsSnI 3 , CsSnClxBryI 3 -x-y, FAPbCl 3 , FAPbBr 3 , FAPbI 3 , FAPbClxBryI 3 -x-y, MAPbCl 3 , MAPbBr 3 , MAPbI 3 , MAPbClxBryI 3 -x-y, CsPbCl 3 , CsPbBr 3 , CsPbI 3 , CsPbClxBryI 3 -x-y, FABiCl 3 , FABiBr 3 , FABiI 3 , FABiClxBryI 3 -x-y, MABiCl 3 , MABiBr 3 , MABiI 3 , MABiClxBryI 3 -x-y, CsBiCl 3 , CsBiBr 3 , CsBiI 3 , and CsBiClxBryI 3 -x-y, where parameters x and y range from 0 to 3.

12. The method according to claim 9 , wherein the perovskite material contains n-type conductivity type.

13. The method according to claim 9 , wherein the upper material layer comprises a metal oxide layer, and the upper material layer has a p-type conductivity type.

14. The method according to claim 13 , wherein the upper material layer comprises MnO 3 (molybdenum trioxide), V 2 O 5 , WO 3 , Si, Ge, GaAs, GaN, WSe 2 , NiO, Cu 2 O, CuO, TCNQ (Tetracyanoquinodimethane), and F4-TCNQ.

15. The method according to claim 9 , further comprising forming at least one optical device on the nanowire photodiode.

16. The method according to claim 9 , further comprising forming a second device, the second device at least comprises a second substrate and a second circuit layer, and a contact structure passing through the substrate and electrically connecting the first circuit layer and the second circuit layer.

17. The method according to claim 9 , wherein the lower material layer is formed by chemical vapor deposition (CVD) or electrochemical method, and the processing temperature is lower than 400 degrees Celsius.

18. The method according to claim 9 , wherein the method for forming at least the nanowire photodiode comprises:
forming a dielectric layer on the first circuit layer, and a plurality of arrays of nanowire holes are etched on the dielectric layer.

19. The method according to claim 18 , wherein the method for forming at least the nanowire photodiode further comprises:
forming a lower material layer in the nanowire holes, and filling part of the nanowire holes with the lower material layer by a chemical mechanical polishing or an etching back method.

20. The method according to claim 19 , wherein the method for forming at least the nanowire photodiode further comprises:
forming an upper material layer on the lower material layer and fills the nanowire holes, wherein a P-N junction or a Schottky junction is formed between the lower material layer and the upper material layer.

Assignees

• United Microelectronics Corp

Inventors

• Zhan Zhaoyao
• Ding Qianwei
• Jiang Xiaohong
• Tey Ching Hwa

Classifications

• H10F77/1437

  Quantum wires or nanorods · CPC title

• H10F77/122

  comprising only Group IV materials · CPC title

• H10F39/8063

  Microlenses · CPC title

• H10F39/8053 Primary

  Colour filters · CPC title

• H10F39/811

  Interconnections · CPC title