Substrate processing apparatus and substrate processing method

Patent metadata

Field	Value
Publication number	US-11640916-B2
Application number	US-202117443345-A
Country	US
Kind code	B2
Filing date	Jul 26, 2021
Priority date	Aug 28, 2020
Publication date	May 2, 2023
Grant date	May 2, 2023

Abstract

A substrate processing apparatus includes an indexer block and a processing block adjacent to the indexer block in a lateral direction of the indexer block. A plurality of processing block layers are stacked in an up-down direction in the processing block. The indexer block includes a container holding portion and a first transfer robot that transfers a substrate between the substrate container held by the container holding portion and the processing block. Each of the processing block layers includes a plurality of processing units, a substrate placing portion, a dummy-substrate housing portion, and a second transfer robot that transfers a substrate between the substrate placing portion and the plurality of processing units and that transfers a dummy substrate between the dummy-substrate housing portion and the plurality of processing units.

First claim

What is claimed is:

1. A substrate processing apparatus comprising:
an indexer block; and
a processing block that is adjacent to the indexer block in a lateral direction of the indexer block and in which a plurality of processing block layers are stacked in an up-down direction,
the indexer block comprising:
a container holding portion that holds a substrate container that houses a substrate; and
a first transfer robot that transfers the substrate between the substrate container held by the container holding portion and the processing block,
each processing block layer comprising:
a plurality of processing units that perform substrate processing;
a substrate placing portion that temporarily holds the substrate that is delivered between the first transfer robot and the processing block layer;
a dummy-substrate housing portion that houses at least one dummy substrate that is usable in the plurality of processing units; and
a second transfer robot that transfers the substrate between the substrate placing portion and the plurality of processing units and that transfers the dummy substrate between the dummy-substrate housing portion and the plurality of processing units,
wherein the dummy-substrate housing portion of each processing block layer includes a plurality of dummy-substrate slots that are equal in number to the plurality of processing units included in the processing block layer, and each dummy-substrate slot is configured to hold a single of the at least one dummy substrate.

2. The substrate processing apparatus according to claim 1 , wherein, in each processing block layer, the plurality of processing units are arranged along a transfer path along which the substrate is transferred by the second transfer robot on both sides of the transfer path, and are stacked in the up-down direction.

3. The substrate processing apparatus according to claim 1 ,
wherein the substrate placing portion is disposed between the first transfer robot and the second transfer robot, and the dummy-substrate housing portion is disposed between the first transfer robot and the second transfer robot.

4. The substrate processing apparatus according to claim 1 , wherein the dummy-substrate housing portion is disposed at a height different from a height of the substrate placing portion.

5. The substrate processing apparatus according to claim 4 , wherein the dummy-substrate housing portion is disposed so as to overlap the substrate placing portion when viewed in plan.

6. The substrate processing apparatus according to claim 1 ,
wherein the plurality of processing block layers include a first processing block layer and a second processing block layer disposed above the first processing block layer, and,
in the first processing block layer, the dummy-substrate housing portion is positioned below the substrate placing portion, and,
in the second processing block layer, the dummy-substrate housing portion is positioned above the substrate placing portion.

7. The substrate processing apparatus according to claim 1 , wherein the plurality of processing units of each processing block layer are correlated with the plurality of dummy-substrate slots of the processing block layer in a one-to-one correspondence, and the second transfer robot transfers the dummy substrate between the dummy-substrate slot and the processing unit that correspond to each other.

8. A substrate processing apparatus comprising:
an indexer block; and
a processing block that is adjacent to the indexer block in a lateral direction of the indexer block and in which a plurality of processing block layers are stacked in an up-down direction,
the indexer block comprising:
a container holding portion that holds a substrate container that houses a substrate; and
a first transfer robot that transfers the substrate between the substrate container held by the container holding portion and the processing block,
each processing block layer comprising:
a plurality of processing units that perform substrate processing;
a substrate placing portion that temporarily holds the substrate that is delivered between the first transfer robot and the processing block layer;
a dummy-substrate housing portion that houses at least one dummy substrate that is usable in the plurality of processing units; and
a second transfer robot that transfers the substrate between the substrate placing portion and the plurality of processing units and that transfers the dummy substrate between the dummy-substrate housing portion and the plurality of processing units,
the substrate processing apparatus further comprising a controller configured to record a usage history of the dummy substrate housed in the dummy-substrate housing portion and to issue a warning based on the usage history of the dummy substrate when the dummy substrate reaches a usage limit.

9. A substrate processing apparatus comprising:
an indexer block; and
a processing block that is adjacent to the indexer block in a lateral direction of the indexer block and in which a plurality of processing block layers are stacked in an up-down direction,
the indexer block comprising:
a container holding portion that holds a substrate container that houses a substrate; and
a first transfer robot that transfers the substrate between the substrate container held by the container holding portion and the processing block,
each processing block layer comprising:
a plurality of processing units that perform substrate processing;
a substrate placing portion that temporarily holds the substrate that is delivered between the first transfer robot and the processing block layer;
a dummy-substrate housing portion that houses at least one dummy substrate that is usable in the plurality of processing units for dummy processing;
a second transfer robot that transfers the substrate between the substrate placing portion and the plurality of processing units and that transfers the dummy substrate between the dummy-substrate housing portion and the plurality of processing units; and
a controller configured to control the second transfer robot and the processing unit,
wherein the dummy processing includes a maintenance process in which maintenance of the processing unit is performed, and
wherein the controller is configured to control the second transfer robot so as to transfer the dummy substrate from the dummy-substrate housing portion to the processing unit when a dummy processing condition is satisfied, and is configured to control the processing unit so as to perform dummy processing.

10. The substrate processing apparatus according to claim 9 , wherein the maintenance process includes at least one of a preparation process in which an environment is adjusted to process the substrate housed in the substrate container held by the container holding portion and a unit washing process in which an inside of the processing unit is washed and cleaned.

11. A substrate processing method that is executed in a substrate processing apparatus including a container holding portion that holds a substrate container that houses a substrate, an indexer block that has a first transfer robot that transfers the substrate between a substrate container held by the container holding portion and a processing block, and the processing block that is adjacent to the indexer block in a lateral direction of the indexer block and in which a plurality of processing block layers are stacked in an up-down direction,
each processing block layer including:
a plurality of processing units that perform substrate processing;
a substrate placing portion that temporarily holds the substrate that is delivered between the first transfer robot and th

Assignees

• Screen Holdings Co Ltd

Inventors

• Yamaguchi Takahiro
• Sawashima Jun
• Ensatsu Akihisa

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3404

  Storage means · CPC title

• H10P72/0458 Primary

  vertical arrangement · CPC title

• H10P72/0456

  in-line arrangement · CPC title

• H10P72/0454

  surrounding a central transfer chamber · CPC title