Methods for photo-induced metal printing

Patent metadata

Field	Value
Publication number	US-11639025-B2
Application number	US-201917045036-A
Country	US
Kind code	B2
Filing date	Apr 3, 2019
Priority date	Apr 3, 2018
Publication date	May 2, 2023
Grant date	May 2, 2023

Abstract

Methods and apparatus for fabricating high-resolution thin-layer metal patterns and 3D Metal structures are provided. The methods and apparatus operate via photo-(stereo)lithography at room temperature. The printed metal patterns, for example silver patterns, exhibit high electrical conductivity, comparable to or better than the conductivity of the silver printed by current laser sintering or thermal annealing at high temperature.

First claim

What is claimed is:

1. A method for printing metal patterns comprising:
immersing a substrate into a bath of photosensitive metal ink, wherein the photo sensitive metal ink comprises an aqueous solution including a decomposable organic silver salt or a decomposable inorganic silver salt; and
while the substrate is immersed in the bath of photosensitive metal ink, focusing an emission of a light source through a light patterning structure onto at least a portion of the substrate such that a patterned design of light is projected thereon;
wherein the emission has a wavelength such that a metal ion reduction reaction is initiated in the photosensitive metal ink at the portion of the substrate onto which the patterned design of light is projected such that the metal ink is decomposed to form and dispose a metal pattern on the substrate, said metal pattern being identical in conformation to the patterned design of light.

2. The method of claim 1 , wherein the light source is one of either monochromatic or polychromatic and spans a specified wavelength range of light.

3. The method of claim 1 , wherein the light patterning structure is selected from the group consisting of a projector, a digital micromirror device (DMD), liquid-crystal display (LCD), and a digital light processing (DLP) apparatus.

4. The method of claim 1 further comprising one or more optical elements disposed between the light source and the substrate selected from the group consisting of light convergent, divergent, and collimating elements.

5. The method of claim 1 , wherein organic silver salt or the inorganic silver salt is decomposable to form a metal element under the exposure of the emission.

6. The method of claim 1 , wherein the organic silver salt or the inorganic salt is selected from the group of silver citrate, silver acetate, and modified Tollens' reagent.

7. The method of claim 6 , wherein the photosensitive metal ink further comprises an additive component disposed within the photosensitive metal ink selected from the group of inorganic salts, and silver nanoseeds.

8. The method of claim 1 , wherein the substrate is polyethylene terephthalate.

9. The method of claim 1 , wherein the substrate is pretreated with aminopropyltriethoxysilane.

10. The method of claim 1 further comprising annealing the metal pattern is using a material selected from the group of calcium chloride, calcium nitrate, sodium chloride, and sodium nitrate.

11. An apparatus for printing metal patterns comprising:
a substrate;
a light source for producing an emission;
a light patterning structure in optical alignment between the light source and the substrate such that the emission forms a patterned design of light on the substrate; and
a reservoir of a photosensitive metal ink comprising an aqueous solution including a decomposable organic silver salt or a decomposable inorganic silver salt in moving relation relative to the substrate such that at least the portion of the substrate having the patterned design of light projected thereon is immersed within the reservoir;
wherein the emission has a wavelength such that when the substrate is immersed in the reservoir a metal ion reduction reaction is initiated in the photosensitive metal ink at the portion of the substrate onto which the patterned design of light is projected such that the metal ink is decomposed to form and dispose a metal pattern on the substrate, said metal pattern being identical in conformation to the patterned design of light.

12. The apparatus of claim 11 , wherein the light source is one of either monochromatic or polychromatic and spans a specified wavelength range of light.

13. The apparatus of claim 11 , wherein the light patterning structure is selected from the group consisting of a projector, a digital micromirror device (DMD), liquid-crystal display (LCD), and a digital light processing (DLP) apparatus.

14. The apparatus of claim 11 further comprising one or more optical elements disposed between the light source and the substrate selected from the group consisting of light convergent, divergent, and collimating elements.

15. The apparatus of claim 11 , wherein the photosensitive metal ink is one or more organic or inorganic metal salts decomposable to form a metal element under the exposure of the emission.

16. The apparatus of claim 11 , wherein the photosensitive metal ink is selected from the group of silver citrate, silver acetate, and modified Tollens' reagent.

17. The apparatus of claim 16 , wherein the photosensitive metal ink further comprises an additive component disposed within the photosensitive metal ink selected from the group of inorganic salts, and silver nanoseeds.

18. The apparatus of claim 11 , wherein the substrate is polyethylene terephthalate.

19. The apparatus of claim 11 , wherein the substrate is pretreated with aminopropyltriethoxysilane.

Assignees

• Univ California

Inventors

• He Ximin
• Yang Xingyun
• Wu Dong
• Hua Mutian

Classifications

• C23C18/1667

  Radiant energy, e.g. laser · CPC title

• B33Y30/00

  Apparatus for additive manufacturing; Details thereof or accessories therefor · CPC title

• C23C18/44

  using reducing agents · CPC title

• B33Y10/00

  Processes of additive manufacturing · CPC title

• G03F7/2051

  Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source (G03F7/70 takes precedence) · CPC title