Manufacturing flexible organic electronic devices

Patent metadata

Field	Value
Publication number	US-11637271-B2
Application number	US-202017084684-A
Country	US
Kind code	B2
Filing date	Oct 30, 2020
Priority date	Dec 17, 2012
Publication date	Apr 25, 2023
Grant date	Apr 25, 2023

Abstract

A method of forming microelectronic systems on a flexible substrate includes depositing a plurality of layers on one side of the flexible substrate. Each of the plurality of layers is deposited from one of a plurality of sources. A vertical projection of a perimeter of each one of the plurality of sources does not intersect the flexible substrate. The flexible substrate is in motion during the depositing the plurality of layers via a roll to roll feed and retrieval system.

First claim

What is claimed is:

1. A system for depositing a material onto a moving substrate web, comprising:
a system for moving the web;
a cylinder comprising at least one opening therein through which the material within an interior of the cylinder passes to exit the interior of the cylinder at less than atmospheric pressure; and
a control system to rotate the cylinder in a controlled manner so that the material passes through the at least one opening to be deposited upon the moving web in a determined pattern.

2. The system of claim 1 , wherein the material is deposited at a pressure between 10 to 10 −8 torr.

3. The system of claim 1 , wherein the material is deposited at a pressure between 10 −4 to 10 −7 torr.

4. The system of claim 1 , wherein a source of the material is positioned within the cylinder.

5. The system of claim 1 , wherein an axis of the cylinder is generally perpendicular to a direction of motion of the web.

6. The system of claim 1 , wherein microelectronic systems are formed on the web.

7. The system of claim 6 , wherein the material is an organic material.

8. The system of claim 6 , wherein the material is a conductive material.

9. The system of claim 8 , wherein the determined pattern comprises bus lines over a transparent conductor on the web.

Assignees

• Universal Display Corp

Inventors

• Ma Ruiqing
• Silvernail Jeffrey
• Mandlik Prashant
• Brown Julia J
• Felts John

Classifications

• H10K71/40

  Thermal treatment, e.g. annealing in the presence of a solvent vapour · CPC title

• H10K50/814

  combined with auxiliary electrodes, e.g. ITO layer combined with metal lines · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• H10K71/164 Primary

  using vacuum deposition · CPC title

• Y02E10/549

  Organic PV cells · CPC title