Nozzle installation jig

Patent metadata

Field	Value
Publication number	US-11633753-B2
Application number	US-202117143704-A
Country	US
Kind code	B2
Filing date	Jan 7, 2021
Priority date	Feb 14, 2020
Publication date	Apr 25, 2023
Grant date	Apr 25, 2023

Abstract

Described herein is a technique capable of properly attaching a nozzle to a reaction tube. According to one aspect thereof, there is provided a nozzle installation jig including: a lower plate configured to make contact with a process vessel in a vicinity of a lower end opening of the process vessel in which a nozzle is provided; a frame fixed to the lower plate and extending upward with respect to the lower plate; an upper plate fixed to the frame and provided with a sensor configured to detect a position of the nozzle in the process vessel; and a notification device configured to transmit a notification to an operator according to a detection result of the sensor.

First claim

What is claimed is:

1. A nozzle installation jig comprising:
a lower plate configured to make contact with a process vessel in a vicinity of a lower end opening of the process vessel in which a nozzle is provided;
a frame fixed to the lower plate and extending upward with respect to the lower plate;
an upper plate fixed to the frame and provided with at least one sensor configured to detect a position of the nozzle in the process vessel; and
a notification device configured to transmit a notification to an operator according to a detection result of the at least one sensor.

2. The nozzle installation jig of claim 1 , wherein the lower plate is provided with a reference surface configured to make contact with a peripheral vicinity of the lower end opening of the process vessel.

3. The nozzle installation jig of claim 2 , wherein the at least one sensor is configured to detect the position of the nozzle in a radial direction of the process vessel while the lower plate is in contact with a lower end of the peripheral vicinity of the lower end opening of the process vessel.

4. The nozzle installation jig of claim 1 , wherein the notification device is fixed to the upper plate.

5. The nozzle installation jig of claim 4 , wherein the notification device comprises a lamp configured to emit a light downward.

6. The nozzle installation jig of claim 4 , wherein the upper plate is provided with a contact structure made of a fluororesin such that at least two points on the contact structure are configured to make contact with the inner surface of the process vessel.

7. The nozzle installation jig of claim 6 , wherein the at least two points of the contact structure are separated from each other by a width wider than a width of a nozzle chamber of the process vessel, and the contact structure is configured to make contact with a cylindrical portion of the process vessel.

8. The nozzle installation jig of claim 1 , wherein a length of the frame corresponds to a length of the nozzle in a vertical direction.

9. The nozzle installation jig of claim 1 , wherein the at least one sensor is configured to detect a relative position of the nozzle with respect to an inner surface of the process vessel while the lower plate is in contact with a lower end of a peripheral vicinity of the lower end opening of the process vessel and the upper plate is in contact with the inner surface of the process vessel.

10. The nozzle installation jig of claim 1 , wherein the at least one sensor comprises a contact type sensor configured to be turned on and off according to a displacement amount of a detector.

11. The nozzle installation jig of claim 10 , wherein the notification device is turned on when the nozzle is farther from an inner surface of the process vessel than a predetermined position or when the nozzle is tilted inward in a radial direction of the process vessel.

12. The nozzle installation jig of claim 1 , wherein the at least one sensor comprises a plurality of sensors, the notification device comprises a plurality of notification devices, the plurality of the sensors are configured to detect positions of a plurality of nozzles arranged adjacent to each other in the process vessel, respectively, and the plurality of the notification devices are configured to light in different colors.

13. The nozzle installation jig of claim 1 , wherein the lower plate is provided with a hole through which a screwdriver is inserted, and the screwdriver is configured to tighten and loosen a tilt adjusting screw configured to correct a tilt of the nozzle.

14. The nozzle installation jig of claim 1 , wherein the lower plate is configured to make contact with an inner surface of the process vessel in a vicinity of a lower end of the process vessel.

15. The nozzle installation jig of claim 1 , wherein the lower plate is provided with a step configured to make contact with a corner of the lower end opening of the process vessel.

16. The nozzle installation jig of claim 1 , wherein the lower plate is provided with an engaging structure configured to engage with a positioning structure provided on a lower surface or an outer peripheral surface of a flange defining the lower end opening of the process vessel.

Assignees

• Kokusai Electric Corp

Inventors

• Abe Yoshitaka
• Shima Nobuhito
• Okada Hiromi
• Morita Shinya
• Ohishi Mamoru

Classifications

• H10P74/277

  Circuits for electrically characterising or monitoring manufacturing processes, e.g. circuits in tested chips or circuits in testing wafers · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/00

  Handling or holding of wafers, substrates or devices during manufacture or treatment thereof · CPC title

• H10P72/0606 Primary

  Position monitoring, e.g. misposition detection or presence detection · CPC title