Surface protection of lithium metal anode

Patent metadata

Field	Value
Publication number	US-11631840-B2
Application number	US-201916658286-A
Country	US
Kind code	B2
Filing date	Oct 21, 2019
Priority date	Apr 26, 2019
Publication date	Apr 18, 2023
Grant date	Apr 18, 2023

Abstract

A method and apparatus for forming metal electrode structures, more specifically lithium-containing anodes, high performance electrochemical devices, such as primary and secondary electrochemical devices, including the aforementioned lithium-containing electrodes. In one implementation, the method comprises forming a lithium metal film on a current collector. The current collector comprises copper and/or stainless steel. The method further comprises forming a protective film stack on the lithium metal film, comprising forming a first protective film on the lithium metal film. The first protective film is selected from a bismuth chalcogenide film, a copper chalcogenide film, a tin chalcogenide film, a gallium chalcogenide film, a germanium chalcogenide film, an indium chalcogenide film, a silver chalcogenide film, a dielectric film, a lithium fluoride film, or a combination thereof.

First claim

The invention claimed is:

1. A method, comprising:
forming a lithium metal film on a current collector, the current collector comprising copper, stainless steel, or a combination thereof; and
forming a protective film stack on the lithium metal film, comprising:
forming a first protective film on the lithium metal film, wherein the first protective film is, a silver chalcogenide film; and
forming a second protective film on the first protective film, the second protective film selected from a metallic film, a carbon-containing film, or a combination thereof, wherein, when the second protective film comprises the carbon-containing film, the carbon-containing film is selected from a diamond-like carbon film or a graphene oxide film.

2. The method of claim 1 , wherein the second protective film comprises the metallic film and the metallic film is selected from tin (Sn), antimony (Sb), bismuth (Bi), gallium (Ga), germanium (Ge), copper (Cu), silver (Ag), gold (Au), or a combination thereof.

3. The method of claim 1 , wherein the second protective film is the metallic film.

4. The method of claim 1 , wherein the second protective film is the carbon-containing film.

5. The method of claim 1 , wherein the first protective film has a thickness of 100 nanometers or less.

6. The method of claim 1 , further comprising exposing the current collector to a plasma treatment or corona discharge process to remove organic materials from exposed surfaces of the current collector prior to forming the lithium metal film on the current collector.

7. The method of claim 1 , wherein forming the first protective film comprises performing at least one of a sputtering process, a thermal evaporation process, an e-beam evaporation process, and a chemical vapor deposition (CVD) process.

8. The method of claim 1 , wherein forming the second protective film comprises performing at least one of a sputtering process, a thermal evaporation process, an e-beam evaporation process, and a chemical vapor deposition (CVD) process.

9. An anode electrode structure, comprising:
a current collector comprising copper, stainless steel, or a combination thereof;
a lithium metal film formed on the current collector; and
a protective film stack formed on the lithium metal film, the protective film stack comprising:
a first protective film formed on the lithium metal film, wherein—the first protective film is; and
a second protective film formed on the first protective film, the second protective film selected from a metallic film, a carbon-containing film, or a combination thereof, wherein, when the second protective film comprises the carbon-containing film, the carbon-containing film is selected from a diamond-like carbon film or a graphene oxide film.

10. The anode electrode structure of claim 9 , wherein the second protective film comprises the metallic film and the metallic film is selected from tin (Sn), antimony (Sb), bismuth (Bi), gallium (Ga), germanium (Ge), copper (Cu), silver (Ag), gold (Au), or a combination thereof.

11. The anode electrode structure of claim 9 , wherein the second protective film is the metallic film.

12. An energy storage device, comprising:
the anode electrode structure of claim 9 ;
a cathode electrode structure; and
a solid electrolyte film formed between the anode electrode structure and the cathode electrode structure.

13. The energy storage device of claim 12 , wherein the solid electrolyte film is comprised of LiPON, doped variants of either crystalline or amorphous phases of Li 7 La 3 Zr 2 O 12 , doped anti-perovskite compositions, argyrodite compositions, lithium-sulfur-phosphorous materials, Li 2 S—P 2 S 5 , Li 10 GeP 2 S 12 , and Li 3 PS 4 , lithium phosphate glasses, (1−x)LiI-(x)Li 4 SnS 4 , xLiI-(1−x)Li 4 SnS 4 , mixed sulfide and oxide electrolytes (crystalline LLZO, amorphous (1−x)LiI-(x)Li 4 SnS 4 mixture, amorphous xLiI-(1−x)Li 4 SnS 4 ), Li 3 S(BF 4 ) 0.5 Cl 0.5 , Li 4 Ti 5 O 12 , lithium doped lanthanum titanate (LATP), Li 2+2x Zn 1−x GeO 4 , LiTi 2 (PO 4 ) 3 , LiHf 2 (PO 4 ) 3 , LiGe 2 (PO 4 ) 3 , or a combination thereof.

14. A method, comprising:
forming a lithium metal film on a current collector, the current collector comprising copper, stainless steel, or a combination thereof; and
forming a protective film stack on the lithium metal film, comprising:
forming a first protective film on the lithium metal film, wherein the first protective film is a silver chalcogenide film; and
forming a second protective film on the first protective film, wherein the second protective film is a metallic film.

15. The method of claim 14 , wherein the first protective film has a thickness of 100 nanometers or less.

16. The method of claim 14 , wherein the metallic film is selected from tin (Sn), antimony (Sb), bismuth (Bi), gallium (Ga), germanium (Ge), copper (Cu), silver (Ag), gold (Au), or a combination thereof.

17. The method of claim 14 , further comprising exposing the current collector to a plasma treatment or corona discharge process to remove organic materials from exposed surfaces of the current collector prior to forming the lithium metal film on the current collector.

18. An anode electrode structure, comprising:
a current collector comprising copper, stainless steel, or a combination thereof;
a lithium metal film on the current collector; and
a protective film stack on the lithium metal film, the protective film stack comprising:
a first protective film on the lithium metal film, wherein the first protective film is a silver chalcogenide film; and
a second protective film on the first protective film, wherein the second protective film is a metallic film.

19. The anode electrode structure of claim 18 , wherein the metallic film is selected from tin (Sn), antimony (Sb), bismuth (Bi), gallium (Ga), germanium (Ge), copper (Cu), silver (Ag), gold (Au), or a combination thereof.

20. An energy storage device, comprising:
the anode electrode structure of claim 18 ;
a cathode electrode structure; and
a solid electrolyte film positioned between the anode electrode structure and the cathode electrode structure.

Assignees

• Applied Materials Inc

Inventors

• Herle Subramanya P

Classifications

• H01M4/134 Primary

  Electrodes based on metals, Si or alloys · CPC title

• H01M4/0404 Primary

  by coating on electrode collectors · CPC title

• H01M10/052

  Li-accumulators · CPC title

• Y02E60/10

  Energy storage using batteries · CPC title

• H01M10/0562

  Solid materials · CPC title