Control apparatus, exposure apparatus, and method of manufacturing article

Patent metadata

Field	Value
Publication number	US-11630398-B2
Application number	US-202117193075-A
Country	US
Kind code	B2
Filing date	Mar 5, 2021
Priority date	Jul 4, 2018
Publication date	Apr 18, 2023
Grant date	Apr 18, 2023

Abstract

The present invention provides a control apparatus for performing synchronous control to synchronize driving of a second moving member so as to follow driving of a first moving member, including a feedforward control system that includes a calculator configured to obtain an input/output response of the second moving member and position deviations of the first moving member and the second moving member while driving the first moving member and the second moving member in synchronism with each other, and calculate a feedforward manipulated variable based on the input/output response of the second moving member and the synchronous error between the first moving member and the second moving member obtained from the position deviations of the first moving member and the second moving member.

First claim

What is claimed is:

1. A control apparatus for controlling driving of a moving member including a plurality of drive axes, including a first drive axis and a second drive axis different from the first drive axis, the control apparatus comprising:
a feedback control system configured to perform feedback control to reduce a position deviation of the moving member from a target position with respect to driving of the moving member along each of the first drive axis and the second drive axis; and
a feedforward control system configured to perform feedforward control by providing the moving member with a first feedforward manipulated variable with respect to the driving of the moving member along the second drive axis to reduce an influence of the driving of the moving member along the first drive axis on the driving of the moving member along the second drive axis, in a state where the feedback control is being performed,
wherein the feedforward control system includes a calculator configured to:
obtain a second feedforward manipulated variable to be provided to the moving member with respect to the driving along the first drive axis;
obtain a first input/output response in the second drive axis of the moving member to inputting of the manipulated variable with respect to the driving along the first drive axis;
obtain a second input/output response in the second drive axis of the moving member to inputting of the manipulated variable with respect to the driving along the second drive axis; and
calculate the first feedforward manipulated variable based on the second feedforward manipulated variable, the first input/output response, and the second input/output response.

2. The apparatus according to claim 1 , wherein the feedforward control system includes a storage unit configured to store the first feedforward manipulated variable calculated by the calculator, and provides, when driving the moving member along the first drive axis and the second drive axis, the moving member with the first feedforward manipulated variable stored in the storage unit with respect to the driving of the moving member along the second drive axis.

3. The apparatus according to claim 1 , wherein the calculator:
obtains data by measuring a position deviation of the moving member along the first drive axis while driving the moving member along the first drive axis and the second drive axis in a state where only the feedback control is being performed for the moving member;
obtains a third input/output response in the first drive axis of the moving member to the inputting of the manipulated variable with respect to the driving along the first drive axis; and
calculates the second feedforward manipulated variable based on the obtained data and the third input/output response.

4. The apparatus according to claim 1 , wherein each of the first input/output response and the second input/output response includes one of an impulse response or a step response.

5. The apparatus according to claim 1 , wherein the moving member includes a substrate stage configured to hold a substrate onto which a pattern of a reticle is transferred.

6. An exposure apparatus for exposing a substrate, the exposure apparatus comprising:
a substrate stage configured to hold the substrate and including a plurality of drive axis, including a first drive axis and a second drive axis different from the first drive axis; and
a control apparatus configured to control driving of the substrate stage, and comprising:
a feedback control system configured to perform feedback control to reduce a position deviation of the substrate stage from a target position with respect to driving of the substrate stage along each of the first drive axis and the second drive axis; and
a feedforward control system configured to perform feedforward control by providing the substrate stage with a first feedforward manipulated variable with respect to the driving of the substrate stage along the second drive axis to reduce an influence of the driving of the substrate stage along the first drive axis on the driving of the substrate stage along the second drive axis, in a state where the feedback control is being performed,
wherein the feedforward control system includes a calculator configured to:
obtain a second feedforward manipulated variable to be provided to the substrate stage with respect to the driving along the first drive axis;
obtain a first input/output response in the second drive axis of the substrate stage to inputting of the manipulated variable with respect to the driving along the first drive axis;
obtain a second input/output response in the second drive axis of the substrate stage to inputting of the manipulated variable with respect to the driving along the second drive axis; and
calculate the first feedforward manipulated variable based on the second feedforward manipulated variable, the first input/output response, and the second input/output response.

7. A method of manufacturing an article, the method comprising:
exposing a substrate using an exposure apparatus defined in claim 6 ;
developing the exposed substrate; and
manufacturing the article from the developed substrate.

8. A control apparatus for performing control related to a first control target and a second control target, the apparatus comprising:
a feedback control system configured to perform feedback control related to each of the first control target and the second control target; and
a feedforward control system configured to perform feedforward control related to each of the first control target and the second control target using a first feedforward manipulated variable and a second feedforward manipulated variable, in a state where the feedback control is being performed,
wherein the feedforward control system includes a calculator configured to:
obtain first data obtained by measuring a first deviation related to the first control target in a state where the feedback control related to each of the first control target and the second control target is being performed, and the feedforward control related to each of the first control target and the second control target is not being performed,
obtain a first control response obtained by providing the first control target with a predetermined first control amount in a state where a control amount of the first control target is not changed, and a second control response obtained by providing the second control target with a predetermined second control amount in a state where a control amount of the second control target is not changed,
calculate the first feedforward manipulated variable based on the first data and the first control response,
obtain second data obtained by measuring a second deviation related to the second control target in a state where the feedback control related to each of the first control target and the second control target is being performed, and the feedforward control related to the first control target is being performed using the first feedforward manipulated variable, and
calculates the second feedforward manipulated variable based on the second data and the second control response.

9. The apparatus according to claim 8 , wherein the calculator:
obtains third data obtained by measuring a third deviation related to the second control target in a state where the feedback control related to each of the first control target and the second control target is being performed, and the feedforward control related to each of the first control target and the second control target is not being performed, and
calculates the second feedforward manipulated variable based on a third feedforward manipulated variable calculated based on the second

Assignees

• Canon Kk

Inventors

• Kurihara Takashi

Classifications

• G03F7/70758

  Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving · CPC title

• G03F7/70775

  Position control, e.g. interferometers or encoders for determining the stage position · CPC title

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• G05B11/32

  with inputs from more than one sensing element; with outputs to more than one correcting element · CPC title

• G03F7/70358

  Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging · CPC title