Adiabatic optical switch using a waveguide on a MEMS cantilever

Patent metadata

Field	Value
Publication number	US-11630266-B2
Application number	US-201917421389-A
Country	US
Kind code	B2
Filing date	Jan 17, 2019
Priority date	Jan 17, 2019
Publication date	Apr 18, 2023
Grant date	Apr 18, 2023

Abstract

An optical switching device (20) includes a substrate (39) and first and second optical waveguides (23, 25) having respective first and second tapered ends (62, 64), which are fixed on the substrate in mutual proximity one to another. A pair of electrodes (36, 38) is disposed on the substrate with a gap therebetween. A cantilever beam (32) is disposed on the substrate within the gap and configured to deflect transversely between first and second positions within the gap in response to a potential applied between the electrodes. A third optical waveguide (21) is mounted on the cantilever beam and has a third tapered end (60) disposed between the first and second tapered ends of the first and second waveguides, so that the third tapered end is in proximity with the first tapered end when the cantilever beam is in the first position and is in proximity with the second tapered end when the cantilever beam is in the second position.

First claim

The invention claimed is:

1. An optical switching device, comprising:
a substrate;
first and second optical waveguides having respective first and second tapered ends, which are fixed on the substrate in mutual proximity one to another;
a pair of electrodes disposed on the substrate with a gap therebetween;
a cantilever beam disposed on the substrate within the gap and configured to deflect transversely between first and second positions within the gap in response to a potential applied between the electrodes;
a third optical waveguide mounted on the cantilever beam and having a third tapered end disposed between the first and second tapered ends of the first and second waveguides, so that the third tapered end is in proximity with the first tapered end so that optical radiation is transferred adiabatically between the third tapered end and the first tapered end when the cantilever beam is in the first position and is in proximity with the second tapered end so that optical radiation is transferred adiabatically between the third tapered end and the second tapered end when the cantilever beam is in the second position,
wherein the third waveguide does not make physical contact with either of the first and second waveguides; and
a controller, which is coupled to apply the potential to the electrodes with voltages that vary so as to switch the cantilever beam between the first and second positions, thereby switching a path of the optical radiation between the first and second optical waveguides.

2. The device according to claim 1 , wherein the cantilever beam is conductive, and the device comprises an insulating layer disposed over the cantilever beam, and the third optical waveguide is disposed over the insulating layer.

3. The device according to claim 2 , wherein the cantilever beam and the third optical waveguide comprise silicon, and the insulating layer comprises silicon dioxide.

4. The device according to claim 1 , wherein the substrate comprises a silicon-on-insulator (SOI) substrate, comprising:
a silicon layer;
an isolation layer, comprising a dielectric material formed on the silicon layer; and
an actuation layer formed on the isolation layer, wherein the actuation layer comprises silicon, which is doped for conducting electricity,
wherein the cantilever beam is formed in the actuation layer.

5. The device according to claim 4 , wherein the dielectric material comprises silicon dioxide.

6. A method for optical switching, comprising:
fixing first and second optical waveguides, having respective first and second tapered ends, on a substrate in mutual proximity one to another;
forming a pair of electrodes on the substrate with a gap therebetween;
etching a cantilever beam from the substrate within the gap so that the beam is able to deflect transversely between first and second positions within the gap in response to a potential applied between the electrodes;
mounting on the cantilever beam a third optical waveguide having a third tapered end disposed between the first and second tapered ends of the first and second waveguides, so that the third tapered end comes into proximity with the first tapered end so that optical radiation is transferred adiabatically between the third tapered end and the first tapered end when the cantilever beam is in the first position and comes into proximity with the second tapered end so that optical radiation is transferred adiabatically between the third tapered end and the second tapered end when the cantilever beam is in the second position; and
applying the potential to the electrodes with voltages that vary so as to switch the cantilever beam between the first and second positions, thereby switching a path of the optical radiation between the first and second optical waveguides,
wherein the third waveguide does not make physical contact with either of the first and second waveguides.

7. The method according to claim 6 , wherein the cantilever beam is conductive, and mounting the third optical waveguide comprises forming an insulating layer over the cantilever beam, and forming the third optical waveguide over the insulating layer.

8. The method according to claim 7 , wherein the cantilever beam and the third optical waveguide comprise silicon, and the insulating layer comprises silicon dioxide.

9. The method according to claim 6 , wherein the substrate comprises a silicon-on-insulator (SOI) substrate, comprising:
a silicon layer;
an isolation layer, comprising a dielectric material formed on the silicon layer; and
an actuation layer formed on the isolation layer, wherein the actuation layer comprises silicon, which is doped for conducting electricity,
wherein etching the cantilever beam comprises forming the cantilever beam in the actuation layer.

10. The method according to claim 9 , wherein the dielectric material comprises silicon dioxide.

Assignees

• Mellanox Technologies Ltd
• Yissum Research Development Company Of The Hebrew Univ Ltd

Inventors

• Aharon Eran
• Marom Dan Mark
• Kalavrouziotis Dimitrios
• Bakopoulos Paraskevas
• Mentovich Elad

Classifications

• G02B6/3566 Primary

  involving bending a beam, e.g. with cantilever · CPC title

• G02B6/125

  Bends, branchings or intersections · CPC title

• G02B6/1228

  Tapered waveguides, e.g. integrated spot-size transformers (for coupling with fibres G02B6/305) · CPC title

• G02B6/3596

  With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate · CPC title

• G02B6/3546

  NxM switch, i.e. a regular array of switches elements of matrix type constellation · CPC title