Deposition apparatus with gas supply and method for depositing material
US-2015368783-A1 · Dec 24, 2015 · US
US11629306B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11629306-B2 |
| Application number | US-201816027568-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 5, 2018 |
| Priority date | Mar 12, 2012 |
| Publication date | Apr 18, 2023 |
| Grant date | Apr 18, 2023 |
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The present invention relates to coated sliding parts having coating systems which allow better sliding performance under dry and/or under lubricated conditions. The coating systems according to the present invention being characterized by having an outermost layer which—is a smooth oxide-containing layer in case of sliding applications under lubricated conditions, or—is a self-lubricated layer comprising molybdenum nitride, in case of sliding applications under dry or lubricated conditions, is a self lubricated layer with a structured surface comprising a multitude of essentially circular recesses with diameters of several micrometers or below, the recesses randomly distributed over the surface.
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The invention claimed is: 1. A sliding component having a sliding surface to be exposed to relative movement with respect to another component under dry or lubricated conditions, wherein the sliding surface of the sliding component is at least partially coated with a coating system comprising a nitride-containing running-in layer deposited as outermost layer, wherein, the outermost layer comprises molybdenum nitride and at least one element or a mixture of elements whose melting point is lower than the molybdenum melting point, or the outermost layer consists of molybdenum oxynitride having an element composition Mo d O e N f , with d+e+f=1, f >e, and d >e, where d, e and f are the concentrations in atomic percent of molybdenum, oxygen and nitrogen, respectively. 2. A sliding component having a sliding surface to be exposed to relative movement with respect to another component under dry or lubricated conditions, wherein the sliding surface of the sliding component is at least partially coated with a coating system comprising a nitride-containing running-in layer deposited as outermost layer, wherein the outermost layer exhibits a multilayer architecture consisting of a combination of molybdenum nitride and molybdenum oxide single layers, wherein the molybdenum oxide single layers have element composition according to the formula Mo v O w with v≥w, where v and w are the concentration in atomic percent of molybdenum and oxygen, respectively, and/or a combination of oxynitride single layers having different element compositions along the running-in layer thickness. 3. The sliding component according to claim 2 , wherein the thickness of the single layers in the multilayer architecture is smaller than 300 nm. 4. The sliding component according to claim 1 , wherein the coating system further comprises: at least one bonding strength layer for improving coating adhesion, deposited directly on the substrate, and/or at least one metal nitride containing layer or deposited directly on the substrate or if given on the bonding strength layer. 5. The sliding component according to claim 1 , wherein the nitride-containing running-in layer is an arc-PVD-deposited layer comprising droplets embedded in the layer. 6. A sliding component having a sliding surface exposed to relative movement with respect to another component under dry or lubricated conditions, wherein the sliding surface of the sliding component is at least partially coated with a coating system comprising an outermost layer, wherein the outermost layer is a self-lubricated layer with a structured surface comprising a multitude of circular recesses with diameters of several micrometers or less, the recesses randomly distributed over the surface, wherein the self-lubricated layer consists of a molybdenum oxynitride layer or a layer having element composition M Oh -Z LMPi N j with j+h+i≈1 and j >h >i, where Z LMP is one element or a mixture of elements whose melting point is lower than the molybdenum melting point, and j, h and i are the element concentration in atomic percentage of nitrogen, molybdenum and Z LMP . 7. The sliding component according to claim 6 , wherein the coating system further comprises: at least one metal oxide containing layer arranged directly under the outermost layer, or at least one structured metal oxide containing layer arranged directly under the outermost layer. 8. A method for producing the sliding component according to claim 6 , comprising the step of depositing by arc PVD a layer forming an outermost layer comprising essentially Mo—Z LMP N where Z LMP is an element or mixture of elements having lower melting point than molybdenum, wherein the arc PVD deposited technique involves a reactive deposition process in which at least one target comprising Mo and Z LMP is arc-evaporated in nitrogen atmosphere thereby creating an ensemble of droplets which at least partially does not adhere to the surface leading to a surface with a multitude of essentially circular recesses with diameters of several micrometers or below, the recesses randomly distributed over the surface. 9. A tribological system comprising at least a first and a second sliding component, each sliding component having respectively at least one sliding surface to be exposed to tribological contact, characterized in that, the sliding surface of the first sliding component and/or the sliding surface of the second sliding component is at least partially coated according to claim 1 . 10. The sliding component according to claim 3 , wherein the thickness of the single layers in the multilayer architecture is smaller than 150 nm and at least the thickness of at least one single layer is smaller than 100 nm. 11. The sliding component according to claim 4 , wherein the coating system further comprises at least one metal oxide containing layer deposited on the bonding strength layer or on the metal nitride containing layer, and at least one metal nitride containing layer deposited on the metal oxide containing layer. 12. The sliding component according to claim 11 , wherein the at least one metal oxide containing layer deposited on the bonding strength layer or on the metal nitride containing layer comprises a zircon oxide, aluminum chromium carbon oxide, or aluminum chromium oxide layer. 13. The sliding component according to claim 6 , wherein Z LMP is Cu. 14. The sliding component according to claim 7 , wherein the coating system further comprises at least one bonding strength layer for improving coating adhesion, deposited directly on the substrate and at least one metal nitride containing layer deposited directly on the substrate or on the bonding strength layer.
Electric arc evaporation · CPC title
Oxynitrides · CPC title
by exposing the substrates to reactive gases intermittently · CPC title
Nitrides (C23C14/0617 takes precedence) · CPC title
Metal compounds · CPC title
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