Substrate connector including a spring pin assembly for electrostatic chucks
US-10141670-B1 · Nov 27, 2018 · US
US11626680B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11626680-B2 |
| Application number | US-202217667605-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 9, 2022 |
| Priority date | Sep 13, 2021 |
| Publication date | Apr 11, 2023 |
| Grant date | Apr 11, 2023 |
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According to a certain embodiment, a pin plunger includes: a first contact member; a second contact member that faces the first contact member and is apart from the first contact member; a spring arranged between the first contact member and the second contact member; and a housing that houses the first contact member, the second contact member, and the spring. The housing comprises a bimetal inside or outside the housing. The bimetal comprises a first metal and a second metal, the first metal having a thermal expansion coefficient different from a thermal expansion coefficient of the second metal. The elastic force decreased or increased by contracting or expanding of the spring due to a temperature change is compensated with a warping force due to stretching of the first metal and the second metal.
Opening claim text (preview).
What is claimed is: 1. A pin plunger comprising: a first contact member; a second contact member that faces the first contact member and is apart from the first contact member; a spring arranged between the first contact member and the second contact member; and a housing that houses the first contact member, the second contact member, and the spring, wherein the housing comprises a bimetal inside or outside the housing, the bimetal comprises a first metal and a second metal, the first metal having a thermal expansion coefficient different from a thermal expansion coefficient of the second metal, and an elastic force decreased or increased by contracting or expanding of the spring due to a temperature change is compensated with a warping force due to stretching of the first metal and the second metal. 2. The pin plunger according to claim 1 , wherein the bimetal arranged by bonding the second metal on the first metal, the first metal includes a thermal expansion coefficient larger than a thermal expansion coefficient of the second metal, and a cross section of the first metal and the second metal includes a convexly warped arc shape due to a temperature change. 3. The pin plunger according to claim 1 , wherein the bimetal arranged by bonding the first metal on the second metal, the first metal includes a thermal expansion coefficient larger than a thermal expansion coefficient of the second metal, and a cross section of the first metal and the second metal includes a concavely warped arc shape due to a temperature change. 4. The pin plunger according to claim 1 , wherein the bimetal is arranged inside the housing in plan view. 5. The pin plunger according to claim 4 , wherein the bimetal is provided in plurality in the pin plunger, the bimetals include: a first one end of a bimetal that is in contact with the housing; a first other end of the bimetal that is opposite the first one end; a second one end of a bimetal that is in contact with the housing; and a second other end of the bimetal that is opposite the second one end and that faces and is apart from the first other end, and the plurality of bimetals are arranged radially in plan view. 6. The pin plunger according to claim 5 , wherein a plurality of auxiliary bimetals are further provided, the auxiliary bimetals include: a third one end of an auxiliary bimetal that is in contact on the bimetal which includes the first one end and the first other end; a third other end of the auxiliary bimetal that is opposite the third one end; a fourth one end of an auxiliary bimetal that is in contact on the bimetal which includes the second one end and the second other end; and a fourth other end of the auxiliary bimetal that is opposite the fourth one end, and the plurality of auxiliary bimetals laminated on the plurality of bimetals are radially arranged in plan view. 7. The pin plunger according to claim 6 , wherein each auxiliary bimetal is arranged by bonding the first metal on the second metal, the first metal has a thermal expansion coefficient larger than a thermal expansion coefficient of the second metal, and a cross section of the first metal and the second metal includes a concavely warped arc shape due to a temperature change. 8. The pin plunger according to claim 6 , wherein the auxiliary bimetals are arranged inside the housing in plan view. 9. The pin plunger according to claim 1 , wherein: a fixing plate that is arranged outside the housing is provided; the bimetal arranged on the fixing plate is provided; and a housing adjusting plate that is arranged on the bimetal, is in contact with the housing, and is arranged outside the housing is provided. 10. The pin plunger according to claim 9 , wherein the bimetal is provided in plurality, and the bimetals are arranged outside the housing in plan view, are apart from each other to sandwich the housing, and are arranged on the fixing plate. 11. The pin plunger according to claim 10 , wherein the bimetals are arranged to be apart from each other and sandwich the housing, which extends in a thickness direction, from outside in a short-side direction in plan view. 12. The pin plunger according to claim 11 , wherein the fixing plate and the housing adjusting plate are provided outside a plurality of housings in plan view, the fixing plate is arranged to be apart from outside of each of the plurality of housings, and the housing adjusting plate is arranged to be adhered to outside of each of the plurality of housings. 13. A pin plunger comprising: a first contact member; a second contact member that faces and is apart from the first contact member; a spring arranged between the first contact member and the second contact member; a housing that houses the first contact member, the second contact member, and the spring; a fixing plate arranged outside the housing; a bimetal arranged on the fixing plate; and a housing adjusting plate arranged on the bimetal, in contact with the housing, and arranged outside the housing, wherein the bimetal comprises a first metal and a second metal, the first metal having a thermal expansion coefficient different from a thermal expansion coefficient of the second metal, and an elastic force decreased or increased by contracting or expanding of the spring due to a temperature change is compensated with a warping force due to stretching of the first metal and the second metal. 14. The pin plunger according to claim 13 , wherein the bimetal is provided in plurality, and the bimetals are arranged outside the housing in plan view, are apart from each other to sandwich the housing, and are arranged on the fixing plate. 15. The pin plunger according to claim 14 , wherein the bimetals are arranged to be apart from each other and sandwich the housing, which extends in a thickness direction, from outside in a short-side direction in plan view. 16. The pin plunger according to claim 15 , wherein the fixing plate and the housing adjusting plate are provided outside a plurality of housings in plan view, the fixing plate is arranged to be apart from outside of each of the plurality of housings, and the housing adjusting plate is arranged to be adhered to outside of each of the plurality of housings. 17. The pin plunger according to claim 13 , wherein the bimetal is arranged by bonding the second metal on the first metal, the first metal has a thermal expansion coefficient which is larger than a thermal expansion coefficient of the second metal, and a cross section of the first metal and the second metal includes a convexly warped arc shape due to a temperature change. 18. The pin plunger according to claim 13 , wherein the bimetal is arranged by bonding the first metal on the second metal, the first metal has a thermal expansion coefficient that is larger than a thermal expansion coefficient of the second metal, and a cross section of the first metal and the second metal includes a concavely warped arc shape due to a temperature change. 19. An IC socket comprising: a wiring board that comprises wiring; a socket pin arranged on the wiring and electrically connected to the wiring; a pin plunger arranged on the socket pin and electrically connected to the socket pin; and a socket body that comprises the socket pin and the pin plunger which are provided in a predetermined arrangement, wherein the pin plunger comprises a first contact member; a second contact member that faces the first contact member and is apar
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