Optical scanner

Patent metadata

Field	Value
Publication number	US-11624874-B2
Application number	US-202117304570-A
Country	US
Kind code	B2
Filing date	Jun 23, 2021
Priority date	Jul 1, 2020
Publication date	Apr 11, 2023
Grant date	Apr 11, 2023

Abstract

A scanner is provided with a plurality of elementary scanners each able to scan a different surface by means of a light beam. Each elementary scanner comprises a beam, for example a vibrating beam, on or in which a phase-controlled array is formed, intended to extract, at a face of the beam, a light beam able to be emitted by a light source. At least one beam of one of the elementary scanners, referred to as the first scanner, has, at rest, a deflection different from that of the beams of the other elementary scanners. This arrangement enables the first scanner to scan a surface, referred to the first surface, different from that scanned by the other elementary scanners. The optical scanner according to the present invention makes it possible to cover a relatively large surface while keeping appreciable compactness.

First claim

The invention claimed is:

1. Optical scanner that comprises:
a support having a first plane face;
at least one optical source able to emit a main optical beam with a wavelength λ;
a plurality of elementary scanners that each comprise:
a beam that comprises a movable part and a fixed part, said fixed part resting on the first face;
a plurality of waveguides disposed on or in the movable part and intended to divide the main optical beam into a plurality of secondary optical beams;
a phase-control optical array that comprises a plurality of optical phase shifters each coupled to a waveguide, disposed on or in an emission section of the movable part and which extends from a free end of the beam opposite to a fixed end; the movable part of at least one of the beams has, at rest, a deflection different from the deflections at rest of the movable parts of the other beams.

2. Optical scanner according to claim 1 , wherein the movable parts of each of the beams all have, at rest, a different deflection.

3. Optical scanner according to claim 1 , wherein each beam comprises, from a first face towards a second face parallel to the first face, a first layer, a second layer and a third layer, the deflection of movable part of each of the beams being imposed by a stress level of one or other or both of the first layer and of the third layer, the stress level of one or other or both of the first layer and the third layer is a function of the thickness of the layer concerned.

4. Optical scanner according to claim 3 , wherein the first layer and the third layer each comprise a dielectric material, the dielectric material comprises silicon dioxide.

5. Optical scanner according to claim 1 , wherein each optical phase shifter comprises a diffraction grating coupled to phase-shifting means intended to impose a phase difference on the secondary optical beam coming from the waveguide to which the optical phase shifter in question is optically coupled.

6. Optical scanner according to claim 1 , wherein the waveguides and/or the diffraction gratings comprise silicon nitride.

7. Optical scanner according to claim 1 , wherein, for each of the beams, the optical phase shifters are arranged in lines parallel or perpendicular to an elongation axis XX′ defined by the fixed end and the free end.

8. Optical scanner according to claim 1 , wherein the optical phase shifters are arranged in a matrix.

9. Optical scanner according to claim 1 , wherein each elementary scanner is also provided with an actuator arranged to impose bending or twisting on the movable part of the beam in question.

10. Optical scanner according to claim 9 , wherein the actuator comprises at least one of the means chosen from: electrostatic means, magnetic means, piezoelectric means and thermal means.

11. Optical scanner according to claim 1 , wherein the support is parallelepipedal or cylindrical shaped.

Assignees

• Commissariat Energie Atomique

Inventors

• Mollard Laurent
• Dieppedale Christel
• Fanget Stéphane
• Fowler Daivid

Classifications

• G02B26/106

  having diffraction gratings as scanning elements, e.g. holographic scanners (holographic optical elements G02B5/32, holography G03H) · CPC title

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• G02B26/103

  having movable or deformable optical fibres, light guides or waveguides as scanning elements (light guides per se G02B6/00) · CPC title

• G02B27/0087

  Phased arrays · CPC title

• G02B26/06 Primary

  for controlling the phase of light (G02B26/08 takes precedence {, measuring optical phase difference G01J9/00}) · CPC title