Optical element, spectroscopic apparatus, and method for manufacturing the same

Patent metadata

Field	Value
Publication number	US-11624862-B2
Application number	US-201816156302-A
Country	US
Kind code	B2
Filing date	Oct 10, 2018
Priority date	Jun 19, 2014
Publication date	Apr 11, 2023
Grant date	Apr 11, 2023

Abstract

An optical element formed of a plurality of materials includes a middle layer between a base material and a reflecting member so as to suppress stripping, cracking and the like of the optical surface due to the difference in coefficients of thermal expansion among the component materials, in the case where a temperature difference in the service environment or a temperature difference between a manufacturing environment and the service environment is large.

First claim

What is claimed is:

1. A manufacturing method of an optical element, wherein the optical element comprises a middle layer between a base and a reflecting layer, the middle layer having an intermediate thermal expansion coefficient that is between a thermal expansion coefficient of the base and a thermal expansion coefficient of the reflecting layer, the method comprising:
forming the middle layer;
forming a plurality of concave-convex structures in the middle layer; and
forming the reflecting layer on the plurality of concave-convex structures,
wherein the middle layer is formed by a copper sulfate plating.

2. A manufacturing method of an optical element, wherein the optical element comprises a middle layer between a base and a reflecting layer, the middle layer having an intermediate thermal expansion coefficient that is between a thermal expansion coefficient of the base and a thermal expansion coefficient of the reflecting layer, the method comprising:
forming the middle layer;
forming a plurality of concave-convex structures in the middle layer; and
forming the reflecting layer on the plurality of concave-convex structures,
wherein the middle layer comprises a plurality of stacked layers, and
wherein the plurality of layers are formed from respectively different materials.

3. A manufacturing method of an optical element, the method comprising:
forming a plated film by a copper sulfate plating on a base;
forming a plurality of concave-convex structures in the plated film; and
forming a reflecting film on the plurality of concave-convex structures,
wherein a layer having the plurality of concave-convex structures is between the base and the reflecting film.

4. The manufacturing method according to claim 3 , wherein the plated film is formed by an electroplating.

5. The manufacturing method according to claim 3 , wherein the plurality of concave-convex structures is formed by cutting the plated film.

6. A spectroscopic apparatus using light dispersed by the optical element manufactured by the manufacturing method according to claim 3 .

7. The manufacturing method according to claim 3 , wherein the plated film contains Cu as a main ingredient.

8. The manufacturing method according to claim 5 , wherein the plated film as a thickness of 3000 μm or less before the cutting, and
wherein the reflecting film is formed on the plated film subjected to the cutting.

9. The manufacturing method according to claim 3 , wherein the plurality of concave-convex structures have surface roughness of 2 nm RMS or less.

10. The manufacturing method according to claim 3 , wherein the plated film has a thickness of 10 μm or more.

11. The manufacturing method according to claim 3 , wherein the reflecting film contains one or more of Au, Ag, and Al as a main ingredient.

12. The manufacturing method according to claim 11 , wherein the base comprises glass.

13. The manufacturing method according to claim 3 , wherein the plurality of concave-convex structures are formed such that normal lines on the plurality of concave-convex structures are in a plurality of directions.

14. The manufacturing method according to claim 3 , wherein the plurality of concave-convex structures are gratings.

15. The manufacturing method according to claim 3 , wherein each of the plurality of concave-convex structures comprises a concave surface.

16. The manufacturing method according to claim 11 , wherein the plurality of concave-convex structures are formed such that normal lines on the plurality of concave-convex structures are in a plurality of directions.

17. The manufacturing method according to claim 11 , wherein the plurality of concave-convex structures are gratings.

18. The manufacturing method according to claim 11 , wherein each of the plurality of concave-convex structures comprises a concave surface.

19. The manufacturing method according to claim 3 , wherein the reflecting film has, on a side opposite to the base, a shape corresponding to the plurality of concave-convex structures in the plated film.

20. The manufacturing method according to claim 3 , wherein the plated film has, on a side of the base, a surface flatter than the plurality of concave-convex structures in the plated film.

Assignees

• Canon Kk

Inventors

• Enokida Yukiya
• Koyama Masatsugu
• Okura Yukinobu

Classifications

• C25D3/38

  of copper · CPC title

• G02B5/1847

  Manufacturing methods · CPC title

• G02B5/1861 Primary

  Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials (G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence) · CPC title

• G02B5/1814

  structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings (G02B5/189 takes precedence) · CPC title

• C25D7/08

  Mirrors; Reflectors · CPC title