Fast image acquisition system and method using pulsed light illumination and sample scanning to capture optical micrographs with sub-micron features

Patent metadata

Field	Value
Publication number	US-11624710-B2
Application number	US-201916421710-A
Country	US
Kind code	B2
Filing date	May 24, 2019
Priority date	May 24, 2019
Publication date	Apr 11, 2023
Grant date	Apr 11, 2023

Abstract

An optical inspection system for detecting sub-micron features on a sample component. The system may have a controller, a camera responsive to the controller for capturing images, an objective lens able to capture submicron scale features on the sample component, and a pulsed light source. The pulsed light source may be used to generate light pulses. The camera may be controlled to acquire images, using the objective lens, only while the pulsed light source is providing light pulses illuminating a portion of the sample component. Relative movement between the sample component and the objective lens is provided to enable at least one of a desired subportion or an entirety of the sample component to be scanned with the camera.

First claim

What is claimed is:

1. An optical inspection system for detecting sub-micron features on a sample component, the system comprising:
a controller;
a camera responsive to the controller for capturing images;
an objective lens able to capture submicron scale features on the sample component;
a pulsed light source which generates light pulses through the objective lens, wherein each said light pulse has a duration of no more than one microsecond; and
operation of the camera being synchronized with operation of the pulsed light source such that the camera is controlled to acquire images, using the objective lens, during a time interval while the pulsed light source is providing light pulses illuminating a portion of the sample component, with the light pulses travelling through the objective lens and being received by the camera to create the images captured by the camera; and
wherein continuous relative lateral movement between the sample component and the objective lens is provided at a speed correlated in part on a specific selected value for the duration of each said light pulse, while the light pulses are being generated, to enable at least one of a desired subportion or an entirety of the sample component to be scanned with the camera.

2. The system of claim 1 , wherein the pulsed light source provides light pulses each having a duration of no longer than 10 ns.

3. The system of claim 1 , further comprising a movable stage for supporting the sample component and enabling movement of the sample component relative to the camera.

4. The system of claim 3 , wherein the movable stage comprises a motorized stage.

5. The system of claim 1 , wherein the objective lens comprises a numerical aperture of at least 0.5.

6. The system of claim 1 , wherein the camera is turned on and off in accordance with a frequency of between 1 Hz and 20 kHz.

7. The system of claim 1 , further wherein the system includes software for stitching separate images together to form a larger composite image.

8. The system of claim 1 , further comprising a beam splitter for directing the light pulses from the pulsed light source toward an aperture of the camera after the light pulses have passed through the sample component, while the camera is turned on to capture an image.

9. The system of claim 1 , further comprising a beam splitter for redirecting light pulses reflecting off of the sample component back toward an aperture of the camera while the camera is turned on to capture an image.

10. An optical inspection system for detecting sub-micron features on a sample component, the system comprising:
an electronic controller;
a camera responsive to the controller for capturing images, the camera including an aperture;
an objective lens able to capture submicron scale features on the sample component;
a pulsed light source which is controlled to generate light pulses each having a duration of no longer than one microsecond;
a beam splitter for directing light pulses at least one of having passed through the sample component or having been reflected from the sample component, toward the aperture of the camera;
operation of the camera being synchronized with the pulsed light source such that the camera is controlled to acquire images, using the objective lens, while the pulsed light source is providing light pulses illuminating a portion of the sample component, with the light pulses travelling through the objective lens and being received by the camera to create the images captured by the camera;
a stage for supporting the sample component, wherein at least one of the stage or the camera is moved continuously laterally of the other in a plane while the light pulses are being generated, at a speed correlated in part on a specific selected value for the duration of the light pulses, to create continuous relative movement between the sample component and the camera while the images are being acquired; and
stitching software for stitching the images together to form a larger composite image.

11. The system of claim 10 , wherein the stage comprises a movable stage.

12. The system of claim 10 , wherein the objective lens comprises an objective lens having a numerical aperture of at least 0.5.

13. The system of claim 10 , wherein the light source is pulsed on at a frequency of between about 1 Hz to 20 kHz.

14. The system of claim 10 , wherein the light source is pulsed on for a time duration of no longer than 10 ns.

15. The system of claim 10 , wherein the camera comprises at least one of a CMOS device or a charge coupled device (CCD).

16. The system of claim 11 , wherein the electronic controller controls movement of the stage.

17. A method for performing optical inspection of a sample component to detect sub-micron features associated with the sample, the method comprising:
generating a plurality of light pulses directed at the sample, wherein each said light pulse has a duration of no more than one microsecond;
directing the light pulses through an objective lens having a numerical aperture which provides a resolution sufficient to identify submicron features;
synchronizing operation of a camera with the light pulses such that the camera is capturing images while the light pulses are being generated and while relative lateral planar movement is occurring between the sample and the objective lens at a speed correlated in part on a specific selected duration for the light pulses, and such that the light pulses pass through the objective lens after at least one of passing through or reflecting from the sample, and are received by the camera and used to create images of portions of the sample, and while continuous relative movement between the sample and the objective lens is occurring; and
using the images of subportions of the sample to reveal one or more submicron features associated with the sample.

18. The method of claim 17 , wherein the camera acquires the images in accordance with a frequency of from 1 Hz to 20 kHz.

19. The method of claim 17 , wherein directing the light pulses through an objective lens comprises at least one of:
directing the light pulses through a full thickness of the sample, and then through the objective lens; or
directing the light pulses through the objective lens toward one surface of the sample, and then directing a reflected light pulse from the surface back through the objective lens.

Assignees

• L Livermore Nat Security Llc

Inventors

• Yoo Jae Hyuck
• Feigenbaum Eyal
• Matthews Manyalibo Joseph

Classifications

• G02B21/0032

  Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06) · CPC title

• G02B21/008

  Details of detection or image processing, including general computer control · CPC title

• G01N21/8806 Primary

  Specially adapted optical and illumination features · CPC title

• G01N2201/102

  Video camera · CPC title

• G06T3/4038

  Image mosaicing, e.g. composing plane images from plane sub-images · CPC title