Focused ultrasound transducer with electrically controllable focal length

Patent metadata

Field	Value
Publication number	US-11623248-B2
Application number	US-202016747868-A
Country	US
Kind code	B2
Filing date	Jan 21, 2020
Priority date	Jan 18, 2019
Publication date	Apr 11, 2023
Grant date	Apr 11, 2023

Abstract

A focused ultrasonic transducer includes a piezoelectric substrate having a first face and a second face, a back metal layer disposed over the first face, and a patterned metal layer disposed over the second face. The patterned metal layer includes a first plurality of concentric ring electrodes wherein each of the first plurality of concentric ring electrodes are wired to be individually accessible. A controller actuates a subset of the concentric ring electrodes such that electrical control of focal length is achieved by selecting a group of electrodes to actuate so that acoustic waves generated from selected electrodes arrive at a desired focal length in-phase and interfere constructively to create a focal spot of high acoustic intensity. The patterned metal layer optionally includes a first central electrode that is surrounded by the first plurality of concentric ring electrodes.

First claim

What is claimed is:

1. A focused ultrasonic transducer comprising:
a piezoelectric substrate having a first face and a second face;
a back metal layer disposed over the first face;
a patterned metal layer disposed over the second face, the patterned metal layer including a first plurality of concentric ring electrodes wherein each concentric electrode of the first plurality of concentric ring electrodes is wired to be individually accessible; and
a controller that actuates a subset of the concentric ring electrodes such that focal length electrical control is achieved by selecting a group of electrodes to actuate so that acoustic waves generated from selected electrodes arrive at a desired focal length in-phase and interfere constructively to create a focal spot of high acoustic intensity.

2. The focused ultrasonic transducer of claim 1 further comprising a first central electrode that is surrounded by the first plurality of concentric ring electrodes.

3. The focused ultrasonic transducer of claim 2 wherein the first central electrode is a circular ring or a circular disk.

4. The focused ultrasonic transducer of claim 1 wherein the concentric ring electrodes are sectored into a pie shape.

5. The focused ultrasonic transducer of claim 1 wherein the piezoelectric substrate or film comprises lead zirconate titanate, PMN-PT, lithium niobate, ZnO, AlN, AlScN, and combinations thereof.

6. The focused ultrasonic transducer of claim 1 wherein the piezoelectric substrate or film has an ultrasonic fundamental thickness-mode resonant frequency.

7. The focused ultrasonic transducer of claim 1 wherein the piezoelectric substrate or film has a fundamental thickness-mode resonant frequency from about 0.5 to 900 MHz.

8. The focused ultrasonic transducer of claim 1 wherein the focused ultrasonic transducer uses a bit resolution for controlling precision with the number of control bits being equal to the total number of electrodes on the first face.

9. The focused ultrasonic transducer of claim 1 wherein the first plurality of concentric ring electrodes includes from 3 to 128 concentric ring electrodes.

10. The focused ultrasonic transducer of claim 1 wherein the concentric ring electrodes have approximately an equal width.

11. The focused ultrasonic transducer of claim 1 wherein the concentric ring electrodes have different widths optimized for precision on focal length control.

12. The focused ultrasonic transducer of claim 1 further comprising a protective material encapsulating the focused ultrasonic transducer with air cavities within the protect material that block acoustic waves in a region and/or a conjugate region where the concentric ring electrodes are disturbed for electrical wiring-outs.

13. The focused ultrasonic transducer of claim 1 wherein the back metal layer is a second patterned metal layer including a second plurality of concentric ring electrodes wherein each concentric electrode of the second plurality of concentric ring electrodes is wired to be individually accessible.

14. The focused ultrasonic transducer of claim 13 wherein the back metal layer further includes a second central electrode that is surrounding by the second plurality of concentric ring electrodes.

15. The focused ultrasonic transducer of claim 14 wherein the second central electrode is a circular ring or a circular disk.

16. The focused ultrasonic transducer of claim 14 wherein the concentric ring electrodes are sectored into a pie shape.

17. The focused ultrasonic transducer of claim 14 wherein the focused ultrasonic transducer uses a bit resolution for controlling precision with the number of control bits being equal to the sum of the total number of electrodes on the first face plus the total number of electrodes on the second face.

18. A focused ultrasonic transducer comprising:
a piezoelectric substrate having a first face and a second face;
a back metal layer disposed over and contacting the first face;
a patterned metal layer disposed over the second face, the patterned metal layer including a first plurality of concentric ring electrodes wherein each concentric electrode of the first plurality of concentric ring electrodes is wired to be individually accessible;
a first central electrode that is surrounded by the first plurality of concentric ring electrodes; and
a controller that actuates a subset of the concentric ring electrodes such that focal length electrical control is achieved by selecting a group of electrodes to actuate so that acoustic waves generated from selected electrodes arrive at a desired focal length in-phase and interfere constructively to create a focal spot of high acoustic intensity.

Assignees

• Univ Southern California

Inventors

• Kim Eun Sok
• Zhao Lurui

Classifications

• G10K11/346

  using phase variation · CPC title

• B06B1/0622 Primary

  on one surface · CPC title

• B06B1/0696 Primary

  with a plurality of electrodes on both sides · CPC title