Tunable waveguide grating with a heating layer

Patent metadata

Field	Value
Publication number	US-11619785-B2
Application number	US-202117404173-A
Country	US
Kind code	B2
Filing date	Aug 17, 2021
Priority date	Aug 18, 2020
Publication date	Apr 4, 2023
Grant date	Apr 4, 2023

Abstract

An optical device including a waveguide grating is disclosed. The optical device may be used as an optical cavity for a laser device, for instance, of an integrated laser device for light detection and ranging (Lidar) applications. In one aspect, the optical device includes a waveguide grating for guiding light, a heating layer provided beneath or above the waveguide grating, and two or more contacts for passing a current through the heating layer, to generate heat in the heating layer. The heating layer is thermally coupled to the waveguide grating and is optically decoupled from the waveguide grating.

First claim

What is claimed is:

1. An optical device comprising:
a waveguide grating for guiding light;
a heating layer provided beneath the waveguide grating; and
two or more contacts for passing a current through the heating layer, to generate heat in the heating layer,
wherein the heating layer is thermally coupled to the waveguide grating and is optically decoupled from the waveguide grating,
wherein the heating layer is a patterned layer arranged below the waveguide grating, and wherein the heating layer is patterned to have a reduced thickness in an area directly underneath the waveguide grating relative to an area that is not directly underneath the waveguide grating, and wherein the heating layer is patterned to have one or more pedestals connected to the waveguide grating.

2. The optical device according to claim 1 , wherein:
the heating layer is configured to not influence an optical mode of the light guided in the waveguide grating.

3. The optical device according to claim 1 , wherein:
the heating layer is transparent in the wavelength range of the light guided in the waveguide grating.

4. The optical device according to claim 1 , wherein:
the heating layer is in direct thermal contact with the waveguide grating.

5. The optical device according to claim 1 , wherein:
the heating layer has a thickness in a range of 20-70 nm; and
the waveguide grating has a thickness of between 200-1200 nm.

6. The optical device according to claim 1 , wherein:
the heating layer comprises silicon, amorphous silicon, silicon carbide, germanium, a thin-film diamond, aluminum nitride, or boron nitride; and
the waveguide grating comprises silicon nitride, aluminum nitride, tantalum pentoxide, niobium pentoxide, or titanium oxide.

7. The optical device according to claim 1 , wherein:
the heating layer is a patterned silicon layer of a silicon-on-insulator substrate; and
the waveguide grating is made of silicon nitride.

8. The optical device according to claim 1 , wherein:
the waveguide grating and the heating layer are embedded into a dielectric material comprising an oxide.

9. The optical device according to claim 1 , wherein:
the waveguide grating comprises at least one of a waveguide core and a grating arranged on the waveguide core, a waveguide core and a grating arranged on a side of the waveguide core, a waveguide core and a grating engraved into the waveguide core, a waveguide core and a grating arranged next to the waveguide core, and a waveguide core and a grating provided parallel to the waveguide core.

10. The optical device according to claim 1 , wherein:
the two or more contacts include a first contact and a second contact;
the first contact is provided on one side of the waveguide grating and extends in parallel to the waveguide grating; and
the second contact is provided on the other side of the waveguide grating and extends in parallel to the waveguide grating.

11. A tunable laser device for Lidar applications, the tunable laser device comprising at least one optical device according to claim 1 , wherein the optical device is an optical cavity of the tunable laser device.

12. An optical device comprising:
a waveguide grating for guiding light;
a heating layer provided above the waveguide grating; and
two or more contacts for passing a current through the heating layer, to generate heat in the heating layer,
wherein the heating layer is thermally coupled to the waveguide grating and is optically decoupled from the waveguide grating,
wherein the heating layer is an unpatterned thin layer provided directly on top of the waveguide grating, and
wherein the heating layer is made of amorphous silicon or silicon carbide, and the waveguide grating is made of silicon nitride.

13. The optical device according to claim 12 , wherein:
the heating layer is configured to not influence an optical mode of the light guided in the waveguide grating.

14. The optical device according to claim 12 , wherein:
the heating layer is transparent in the wavelength range of the light guided in the waveguide grating.

15. The optical device according to claim 12 , wherein:
the heating layer is in direct thermal contact with the waveguide grating.

16. The optical device according to claim 12 , wherein:
the heating layer has a thickness in a range of 20-70 nm; and
the waveguide grating has a thickness of between 200-1200 nm.

17. The optical device according to claim 12 , wherein:
the waveguide grating and the heating layer are embedded into a dielectric material comprising an oxide.

18. The optical device according to claim 12 , wherein:
the waveguide grating comprises at least one of a waveguide core and a grating arranged on the waveguide core, a waveguide core and a grating arranged on a side of the waveguide core, a waveguide core and a grating engraved into the waveguide core, a waveguide core and a grating arranged next to the waveguide core, and a waveguide core and a grating provided parallel to the waveguide core.

19. The optical device according to claim 12 , wherein:
the two or more contacts include a first contact and a second contact;
the first contact is provided on one side of the waveguide grating and extends in parallel to the waveguide grating; and
the second contact is provided on the other side of the waveguide grating and extends in parallel to the waveguide grating.

20. A tunable laser device for Lidar applications, the tunable laser device comprising at least one optical device according to claim 11 , wherein the optical device is an optical cavity of the tunable laser device.

Assignees

• Imec Vzw

Inventors

• Caer Charles
• Dwivedi Sarvagya Paavan

Classifications

• G01S7/4814

  of transmitters alone · CPC title

• H01S5/0612

  controlled by temperature · CPC title

• H01S5/141

  using a wavelength selective device, e.g. a grating or etalon (H01S5/146 takes precedence) · CPC title

• G02F1/0147

  based on thermo-optic effects (G02F1/132 takes precedence) · CPC title

• H01S5/021 Primary

  Silicon based substrates · CPC title