Method for producing a pressure sensor device and pressure sensor device

Patent metadata

Field	Value
Publication number	US-11619559-B2
Application number	US-202117240180-A
Country	US
Kind code	B2
Filing date	Apr 26, 2021
Priority date	Apr 30, 2020
Publication date	Apr 4, 2023
Grant date	Apr 4, 2023

Abstract

A method for producing a pressure sensor device. The method includes providing a vessel that includes a cavity having side walls, the cavity including a floor and the side walls each including an upper side, which face away from the floor; providing a pressure sensor and situating the pressure sensor in the cavity and on the floor; filling the cavity with an oil so that the oil fills the cavity up to the upper sides of the side walls; applying a membrane onto the surface of the oil that completely covers the oil, and at least in some regions onto the upper sides of the side walls so that the membrane covers, circumferentially around the cavity, those regions of the upper sides of the side walls that lie against the oil, the membrane including a liquid material when applied onto the oil; and curing the liquid material of the membrane.

First claim

What is claimed is:

1. A method for producing a pressure sensor device, comprising the following steps:
providing a vessel that includes a cavity having side walls, the cavity including a floor and the side walls each including an upper side, which face away from the floor;
providing a pressure sensor and situating the pressure sensor in the cavity and on the floor;
filling the cavity with an oil in such a way that the oil fills the cavity up to the upper sides of the side walls and forms a surface;
applying a membrane onto the surface of the oil that completely covers the oil and at least in some regions onto the upper sides of the side walls, in such a way that the membrane covers, circumferentially around the cavity, those regions of the upper sides of the side walls that lie against the oil, the membrane including a liquid material when applied onto the oil; and
curing the liquid material of the membrane,
wherein the membrane seals the cavity from a surrounding environment in airtight, oil-tight, and watertight fashion,
wherein the membrane is applied in liquid form,
wherein the membrane is lipophilic, and wherein inner sides of the side walls are lipophilic.

2. The method as recited in claim 1 , in which the pressure sensor device is a microelectromechanical component.

3. The method as recited in claim 1 , wherein, before the application of the membrane onto the upper side of the side walls, there takes place a modification of a material property of the surface material of the vessel at least in some regions, after which the surface material becomes capable of being wetted by the material of the membrane and/or by the oil.

4. The method as recited in claim 1 , in which the oil is dosed using a microdispersion method and is introduced into the cavity.

5. The method as recited in claim 1 , wherein the membrane includes a liquid monomer or oligomer during application.

6. The method as recited in claim 5 , wherein the material of the membrane is hardened by radiation or heat after the application onto the oil and onto the upper sides of the side walls.

7. The method as recited in claim 1 , wherein the membrane has a homogenous thickness and is applied over the cavity and over the side walls.

8. The method as recited in claim 1 , wherein the membrane is applied onto the upper sides of the side walls and onto the oil in such a way that the oil and the upper sides are completely covered, and the material of the membrane is subsequently thinned back to a prespecified thickness.

9. A pressure sensor device, comprising:
a vessel that includes a cavity having side walls, the cavity including a floor and the side walls each including an upper side, facing away from the floor;
a pressure sensor that is situated in the cavity and on the floor;
an oil with which the cavity is filled in such a way that the oil fills the cavity up to the upper sides of the side walls and forms a surface; and
a membrane that is applied onto the surface of the oil and that lies on the surface, the membrane completely covering the oil and being applied at least in some regions onto the upper sides of the side walls in such a way that the membrane covers, circumferentially around the cavity, those regions of the upper sides of the side walls that lie on the oil,
wherein the membrane seals the cavity from a surrounding environment in airtight, oil-tight, and watertight fashion,
wherein the membrane is applied in liquid form,
wherein the membrane is lipophilic, and wherein inner sides of the side walls are lipophilic.

10. The pressure sensor device as recited in claim 9 , wherein the upper sides of the side walls include, at least in some regions, grooves and/or steps and/or undercuts, on which the membrane is fixable.

11. The pressure sensor device as recited in claim 9 , wherein the membrane has a uniform thickness.

12. The pressure sensor device as recited in claim 9 , wherein the membrane includes a polymer having reactive groups, or includes a polymer in which reactive groups can subsequently be produced.

13. The pressure sensor device as recited in claim 12 , wherein the membrane includes polybutadiene or polyether ether ketone.

Assignees

• Bosch Gmbh Robert

Inventors

• Kroner Elmar
• Guenter Friedhelm
• Kesel Ingo
• Friedl Joachim
• Scheiner Philipp
• Kuells Robert

Classifications

• B81C1/00269

  Bonding of solid lids or wafers to the substrate · CPC title

• B81B2201/0264

  Pressure sensors · CPC title

• G01L9/0086 Primary

  using variations in capacitance · CPC title

• B81B3/0018

  Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators · CPC title