Method and apparatus for manufacturing defect-free monocrystalline silicon crystal

Patent metadata

Field	Value
Publication number	US-11618971-B2
Application number	US-202017037060-A
Country	US
Kind code	B2
Filing date	Sep 29, 2020
Priority date	Sep 29, 2020
Publication date	Apr 4, 2023
Grant date	Apr 4, 2023

Abstract

A crystal puller apparatus comprises a pulling assembly to pull a crystal from a silicon melt at a pull speed; a crucible that contains the silicon melt; a heat shield above a surface of the silicon melt; a lifter to change a gap between the heat shield and the surface of the silicon melt; and one or more computing devices to determine an adjustment to the gap using a Pv-Pi margin, at a given length of the crystal, in response to a change in the pull speed. The computer-implemented method by a computing device comprises determining a pull-speed command signal to control a diameter of the crystal; determining a lifter command signal to control a gap between a heat shield and a surface of a silicon melt from which the crystal is grown; and determining an adjustment to the gap, in response to a different pull-speed, using a Pv-Pi margin.

First claim

The invention claimed is:

1. A crystal puller apparatus, comprising:
a pulling assembly to pull a crystal from a silicon melt at a pull speed;
a crucible that contains the silicon melt;
a heat shield above a surface of the silicon melt;
a lifter to change a gap between the heat shield and the surface of the silicon melt; and
one or more computing devices including a storage medium having stored thereon instructions that when executed perform steps including:
accessing a margin profile, the margin profile including Pv-Pi margin data corresponding to each of various lengths of the crystal; and
determining adjustments to the gap using the Pv-Pi margin data in response to changes in the pull speed, wherein each of the Pv-Pi margin data includes ranges of the gap versus the pull speed which define a defect-free region on the crystal at a given crystal length.

2. The crystal puller apparatus of claim 1 wherein the Pv-Pi margin data comprises a first boundary for a Pv region and a second boundary for a Pi region.

3. The crystal puller apparatus of claim 2 wherein the Pv-Pi margin data further comprises a center margin at a halfway between the first boundary and the second boundary.

4. The crystal puller apparatus of claim 3 wherein the step of determining adjustments to the gap further includes determining adjustments to the gap using the center margin.

5. The crystal puller apparatus of claim 1 wherein the pull speed corresponds to a crystal growth rate (v) of a Voronkov ratio (v/G) and the gap constitutes a temperature gradient value (G) of the Voronkov ratio (v/G).

6. The crystal puller apparatus of claim 5 wherein the step of determining adjustments to the gap includes adjusting the gap in response to any change in the pull speed to maintain the Voronkov ratio at a desired value.

7. The crystal puller apparatus of claim 1 ,
wherein
the pulling assembly pulls the crystal at a desired diameter using a pull-speed profile that provides pull-speed values and a diameter profile that provides diameter values;
the lifter moves the crucible vertically to control the gap using a gap profile that provides gap values; and
the storage medium further having stored thereon instructions that when executed perform a step of changing one of the pull-speed values to provide a different pull speed to maintain an actual diameter of the crystal at the desired diameter, and, in response to the different pull speed, further adjust one of the gap values to provide a gap adjustment using the Pv-Pi margin data.

8. The crystal puller apparatus of claim 7 wherein the step of determining adjustments to the gap includes active temperature gradient control that determines a target gap in response to a change in pull speed using the Pv-Pi margin data, the pull-speed profile, and the gap profile.

9. The crystal puller apparatus of claim 8 , wherein the the target gap is determined from pre-determined functions of pull-speed versus gap at different crystal lengths, the pre-determined functions are within the Pv-Pi margin data which defines a range of acceptable ratios of v/G for growing the crystal substantially without defects, wherein v is a pull speed of the crystal and G is a temperature gradient of a solid-liquid interface of the crystal.

10. The crystal puller apparatus of claim 8 , wherein the storage medium further having stored thereon instructions that when executed perform steps comprising:
determining a pull-speed command signal to control a diameter of the crystal; and
determining a lifter command signal to control the gap.

11. The crystal puller apparatus of claim claim 10 , wherein the lifter command signal is determined by comparing a gap measurement to the target gap.

12. The crystal puller apparatus of claim 10 , wherein the pull-speed command signal is determined by first comparing a measured diameter of the crystal to a current diameter value from the diameter profile, which provides a pull-speed correction value, and second, by comparing the pull-speed correction value to a current pull-speed value from the pull-speed profile.

13. The crystal puller apparatus of claim 7 , wherein the diameter profile is determined based on a function of crystal diameter versus crystal length, and the pull-speed profile is determined based on a function of pull-speed versus crystal length.

Assignees

• Sumco Corp

Inventors

• Takanashi Keiichi
• Shimozaki Ippei

Classifications

• C30B15/22

  Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal · CPC title

• C30B15/203 Primary

  the relationship of pull rate (v) to axial thermal gradient (G) · CPC title

• C30B15/20

  Controlling or regulating (controlling or regulating in general G05) · CPC title

• C30B15/26

  using television detectors; using photo or X-ray detectors · CPC title

• C30B35/002 Primary

  Crucibles or containers · CPC title