Method of manufacturing display apparatus

Patent metadata

Field	Value
Publication number	US-11618940-B2
Application number	US-201916531866-A
Country	US
Kind code	B2
Filing date	Aug 5, 2019
Priority date	Nov 5, 2018
Publication date	Apr 4, 2023
Grant date	Apr 4, 2023

Abstract

A method of manufacturing a display apparatus includes: sequentially fixing a display substrate and a mask assembly to a carrier; transporting the mask assembly and the display substrate to a deposition unit via the carrier; and depositing a deposition material on the display substrate by passing the deposition material through the mask assembly, by using the deposition unit.

First claim

What is claimed is:

1. A method of manufacturing a display apparatus, the method comprising:
sequentially fixing a display substrate and a mask assembly to a carrier;
transporting the mask assembly and the display substrate to a deposition unit via the carrier; and
depositing a deposition material on the display substrate by passing the deposition material through the mask assembly, by using the deposition unit,
wherein the carrier comprises:
a body portion;
an electro permanent magnetic chuck arranged on a boundary portion of the body portion and configured to selectively fix the mask assembly; and
a substrate fixing unit arranged in the body portion to selectively fix the display substrate.

2. The method of claim 1 , wherein the carrier fixes the mask assembly by using the electro permanent magnetic chuck.

3. The method of claim 1 , further comprising moving the mask assembly to approach the display substrate via a magnetic force.

4. The method of claim 1 , further comprising separating the mask assembly from the carrier.

5. The method of claim 4 , further comprising separating the display substrate from the carrier.

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Kyubum
• Kim Sungjin
• Park Chunyoung
• Chang Uno

Classifications

• H10P72/00

  Handling or holding of wafers, substrates or devices during manufacture or treatment thereof · CPC title

• H10P72/7622 Primary

  characterised by supporting substrates others than wafers, e.g. chips · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/3304

  characterised by movements or sequence of movements of transfer devices · CPC title

• H10W72/01938

  in gaseous form, e.g. by CVD or PVD · CPC title