Cleaning method and cleaning apparatus

Patent metadata

Field	Value
Publication number	US-11612915-B2
Application number	US-202117166399-A
Country	US
Kind code	B2
Filing date	Feb 3, 2021
Priority date	Feb 25, 2020
Publication date	Mar 28, 2023
Grant date	Mar 28, 2023

Abstract

There is provided a cleaning method and a cleaning apparatus capable of removing dirt on electrical contacts, the dirt being unable to be removed with deionized water, without adversely affecting a plating solution and a substrate holder which is a member for holding a substrate. A cleaning method according to the present disclosure is a cleaning method for a substrate holder having electrical contacts for supplying electric power to a substrate by contacting the substrate to plate the substrate, the method including a cleaning step of cleaning the electrical contacts attached to the substrate holder with a citric acid aqueous solution.

First claim

What is claimed is:

1. A cleaning method for a substrate holder having electrical contacts for supplying electric power to a substrate by contacting the substrate to plate the substrate, the method comprising:
a cleaning step of cleaning the electrical contacts of the substrate holder with a citric acid aqueous solution.

2. The cleaning method according to claim 1 , in which the substrate holder includes a first holding member having relay contacts configured to be electrically connected to an external power source, and a second holding member having the electrical contacts, the method comprising:
a separation step of separating the second holding member from the first holding member before the cleaning step,
wherein the cleaning step cleans the second holding member without cleaning the first holding member.

3. The cleaning method according to claim 1 , wherein
a percent concentration of mass of citric acid in the citric acid aqueous solution is 2 to 30%.

4. The cleaning method according to claim 1 , further comprising:
a rotation step of rotating a ring-shaped holding member having the electrical contacts in a circumferential direction,
wherein the cleaning step includes a step of spraying the citric acid aqueous solution on the electrical contact during the rotation step.

5. The cleaning method according to claim 1 , further comprising:
a first water cleaning step of cleaning the substrate holder with water before the cleaning step.

6. The cleaning method according to claim 1 , wherein
the cleaning step includes an immersion step of immersing, in the citric acid aqueous solution held in a cleaning tank, an entirety of a holding member having the electrical contacts, the holding member being a member forming at least part of the substrate holder.

7. The cleaning method according to claim 6 , further comprising:
a first water cleaning step of immersing the entirety of the holding member in water held in the cleaning tank, before the cleaning step.

8. The cleaning method according to claim 1 , further comprising:
a second water cleaning step of cleaning the substrate holder with the water after the cleaning step; and
a drying step of drying the substrate holder after the second water cleaning step.

9. The cleaning method according to claim 8 , wherein
the drying step includes:
an air sending step of sending air from a fan to the substrate holder; and
a heating step of heating the air to be sent to the substrate holder by a heater.

10. A cleaning apparatus, comprising:
a rotation member for holding a ring-shaped holding member that holds a substrate for plating and has electrical contacts brought into contact with the substrate;
an actuator for rotating the rotation member to rotate the holding member in a circumferential direction; and
a cleaning module for cleaning, with a citric acid aqueous solution, the holding member rotated by the rotation member.

11. The cleaning apparatus according to claim 10 , wherein
the holding member is a second holding member having the electrical contacts, and
a substrate holder includes a first holding member having relay contacts configured to be electrically connected to an external power source, and the second holding member.

12. The cleaning apparatus according to claim 10 , wherein
the cleaning module has a nozzle for spraying the citric acid aqueous solution on the holding member.

13. The cleaning apparatus according to claim 10 , wherein
the cleaning module includes a case holding the citric acid aqueous solution, and
a part of the holding member is configured to be immersed in the citric acid aqueous solution held in the case.

14. The cleaning apparatus according to claim 10 , further comprising:
a warm air device for sending warm air toward the holding member.

15. A cleaning apparatus for a holding member that has electrical contacts and is a member forming at least part of a substrate holder, the cleaning apparatus comprising:
a cleaning tank for holding a citric acid aqueous solution therein and immersing the holding member in the citric acid aqueous solution.

16. The cleaning apparatus according to claim 15 , wherein
the substrate holder includes a first holding member having relay contacts configured to be electrically connected to an external power source, and a second holding member having the electrical contacts, and
the holding member is the second holding member.

17. The cleaning apparatus according to claim 15 , comprising:
a carrier accommodated in the cleaning tank,
wherein the carrier includes a plurality of mesh plates for supporting the holding member, the plurality of mesh plates being arranged in an up-down direction.

18. The cleaning apparatus according to claim 17 , further comprising:
a first rod-shaped member configured to be rotatable; and
nozzles for spraying the citric acid aqueous solution, water, or air on the electrical contacts, the nozzles being attached to the first rod-shaped member and being rotatable integrally with the first rod-shaped member,
wherein the plurality of mesh plates have respective through holes through which the first rod-shaped member passes.

19. The cleaning apparatus according to claim 17 , further comprising:
a second rod-shaped member configured to be rotatable; and
agitating members attached to the second rod-shaped member for agitating a liquid in the cleaning tank by rotating integrally with the second rod-shaped member,
wherein the plurality of mesh plates have respective through holes through which the second rod-shaped member passes.

20. The cleaning apparatus according to claim 15 , further comprising:
a fan for sending air to the holding member; and
a heater for heating the air to be sent to the holding member.

Assignees

• Ebara Corp

Inventors

• Suzuki Kiyoshi

Classifications

• B08B3/04 Primary

  Cleaning involving contact with liquid · CPC title

• C25D21/00 Primary

  Processes for servicing or operating cells for electrolytic coating · CPC title

• B08B1/32

  using rotary cleaning members · CPC title

• B08B3/08

  the liquid having chemical or dissolving effect · CPC title

• B08B3/02

  Cleaning by the force of jets or sprays · CPC title