System and method for designing MEMS mirror based on computed oscillation frequency

Patent metadata

Field	Value
Publication number	US-11610028-B2
Application number	US-202117192724-A
Country	US
Kind code	B2
Filing date	Mar 4, 2021
Priority date	Mar 4, 2021
Publication date	Mar 21, 2023
Grant date	Mar 21, 2023

Abstract

A method for designing an optical scanning mirror is provided. The method may include receiving, by a communication interface, a set of design parameters of the scanning mirror. The method may also include simulating scanning mirror oscillation, by at least one processor, based on the set of design parameters using a computer model. In certain aspects, the computer model may include a lookup table that correlates electrostatic force applied to a sample scanning mirror and angular displacement in the sample scanning mirror caused by the electrostatic force. The method may further include generating, by the at least one processor, mirror oscillation data as an output of the computer model for designing the scanning mirror. The mirror oscillation data may include a correlation of drive frequency, angular displacement, and time.

First claim

What is claimed is:

1. A non-transitory computer-readable medium having a computational toolbox stored thereon, the computational toolbox configured to simulate scanning mirror oscillation using a set of design parameters,
wherein the computational toolbox comprises a plurality of functional blocks configured as a computer model for simulating the scanning mirror oscillation, the functional blocks including a lookup table block storing a lookup table that correlates electrostatic force applied to a sample scanning mirror and angular displacement in the sample scanning mirror caused by the electrostatic force,
wherein the computer model simulates the scanning mirror oscillation in non-dimensional quantities and converts the scanning mirror oscillation to generate mirror oscillation data in dimensional quantities.

2. The non-transitory computer-readable medium of claim 1 , wherein the plurality of functional blocks further comprises:
a first coefficient block configured to compute a first coefficient based at least in part on the set of design parameters; and
a second coefficient block configured to compute a second coefficient based at least in part on the set of design parameters.

3. The non-transitory computer-readable medium of claim 2 , wherein the plurality of functional blocks further comprises:
a first integrator configured to convert angular acceleration information into angular velocity information; and
a second integrator configured to convert the angular velocity information into angular displacement information.

4. The non-transitory computer-readable medium of claim 3 , wherein the plurality of functional blocks further comprises:
a damping force block configured to compute a damping force based at least in part on the angular velocity information; and
a spring force block configured to compute a spring force based at least in part on the angular displacement information.

5. The non-transitory computer-readable medium of claim 4 , wherein the plurality of functional blocks further comprises:
a first waveform block configured to generate sinusoidal waveform information associated with a drive force frequency.

6. The non-transitory computer-readable medium of claim 5 , wherein the plurality of functional blocks further comprises:
a second waveform block configured to convert the sinusoidal waveform information to square waveform information;
a third waveform block configured to convert the sinusoidal waveform information to waveform information of a predetermined waveform shape different from sinusoidal;
a drive voltage block configured to compute drive voltage information based at least in part on the first coefficient and the waveform;
a comb drive force block configured to compute comb drive force information based at least in part on the drive voltage information, electrostatic force information, and the second coefficient;
at least one conversion block configured to convert one or more non-dimensional quantities in the comb drive force information to corresponding dimensional quantities; and
a mirror oscillation block configured to generate mirror oscillation data based at least in part on the comb drive force information converted to include corresponding dimensional quantities.

7. A method for designing a scanning mirror for an optical sensing system, comprising:
receiving, by a communication interface, a set of design parameters of the scanning mirror;
simulating scanning mirror oscillation, by at least one processor, based on the set of design parameters using a computer model, the computer model including a lookup table that correlates electrostatic force applied to a sample scanning mirror and angular displacement in the sample scanning mirror caused by the electrostatic force;
generating, by the at least one processor, mirror oscillation data as an output of the computer model for designing the scanning mirror, the mirror oscillation data including a correlation of drive frequency, angular displacement, and time; and
requesting, by the at least one processor, an adjusted set of design parameters of the scanning mirror when the mirror oscillation data do not meet a target performance,
wherein the computer model simulates the scanning mirror oscillation in non-dimensional quantities and converts the scanning mirror oscillation to generate the mirror oscillation data in dimensional quantities.

8. The method of claim 7 , further comprising:
receiving, by the communication interface, the adjusted set of design parameters of the scanning mirror;
simulating scanning mirror oscillation, by the at least one processor, based on the adjusted set of design parameters using the computer model; and
generating, by the at least one processor, updated mirror oscillation data as an output of the computer model.

9. The method of claim 7 , further comprising:
determining design alterations based on a comparison of the mirror oscillation data and the target performance; and
providing the design alternations when requesting the adjusted set of design parameters of the scanning mirror.

10. The method of claim 7 , wherein the simulating the scanning mirror oscillation further comprises:
determining, by the at least one processor, electrostatic force information associated with a scanning angle using the lookup table.

11. The method of claim 10 , wherein the simulating the scanning mirror oscillation further comprises:
inputting, by the at least one processor, angular acceleration information associated with the scanning mirror into the computer model;
converting, by the at least one processor, the angular acceleration information into angular velocity information; and
converting, by the at least one processor, the angular velocity information into angular displacement information.

12. The method of claim 11 , wherein the simulating the scanning mirror oscillation further comprises:
computing, by the at least one processor, a damping force based at least in part on the angular velocity information; and
computing, by the at least one processor, a spring force based at least in part on the angular displacement information.

13. The method of claim 12 , wherein the simulating the scanning mirror oscillation further comprises:
generating, by the at least one processor, waveform information associated with a drive voltage frequency used to drive the scanning mirror.

14. The method of claim 13 , wherein the waveform information is sinusoidal waveform information.

15. The method of claim 14 , wherein the simulating the scanning mirror oscillation further comprises:
converting, by the at least one processor, the sinusoidal waveform information to square waveform information.

16. The method of claim 14 , wherein the simulating the scanning mirror oscillation further comprises:
converting, by the at least one processor, the sinusoidal waveform information to waveform information of a predetermined waveform shape different from sinusoidal.

17. The method of claim 13 , wherein the simulating the scanning mirror oscillation further comprises:
computing, by the at least one processor, a first coefficient and a second coefficient based at least in part on the set of design parameters; and
computing, by the at least one processor, drive voltage information based at least in part on the first coefficient and the waveform information.

18. The method of claim 17 , wherein the simulating the scanning mirror oscillation further comprises:
computing, by the at least one processor, a comb drive force information based at lea

Assignees

• Beijing Voyager Tech Co Ltd

Inventors

• Wang Youmin
• Wang Yufeng
• Li Gary

Classifications

• G01S7/483

  Details of pulse systems · CPC title

• G02B26/0841 Primary

  the reflecting element being moved or deformed by electrostatic means · CPC title

• G06F30/10 Primary

  Geometric CAD · CPC title

• G02B27/0012

  Optical design, e.g. procedures, algorithms, optimisation routines · CPC title

• G01S7/4817

  relating to scanning · CPC title