Frequency-modulating sensor array

Patent metadata

Field	Value
Publication number	US-11609136-B2
Application number	US-202217712095-A
Country	US
Kind code	B2
Filing date	Apr 2, 2022
Priority date	Sep 12, 2016
Publication date	Mar 21, 2023
Grant date	Mar 21, 2023

Abstract

Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.

First claim

What is claimed is:

1. A device comprising:
a surface having a region that is to receive a contact force;
a microelectromechanical systems (MEMS) resonator mounted in a fixed position relative to the region, the MEMS resonator having a body that is to vibrate under application of a drive signal and an electrode to output a signal that varies in dependence on a sensed resonant frequency of vibration of the MEMS resonator, wherein the sensed resonant frequency of vibration is to vary dependent on the contact force received by the region; and
circuitry to generate a digital value representing a magnitude of the contact force received by the region in dependence on the signal.

2. The device of claim 1 wherein:
the circuitry comprises a lookup table;
the lookup table is to store values representing variation in magnitude of the contact force received by the region, as a function of variation in the signal from the electrode; and
the digital value is dependent on an output of the lookup table.

3. The device of claim 2 wherein:
the MEMS resonator is first MEMS resonator;
the device further comprises a second MEMS resonator, the second MEMS resonator having a resonant frequency that does not vary according to force received by the force input surface; and
the digital value is dependent on both of the sensed resonant frequency of vibration and the resonant frequency that does not vary according to variation in force received by the force input surface.

4. The device of claim 3 wherein the device further comprises an electrical contact that is to output the digital value.

5. The device of claim 3 wherein:
the first MEMS resonator is a sensing resonator;
the second MEMS resonator is a control resonator that is to generate a reference resonant frequency; and
the digital value is dependent on a ratio between the sensed resonant frequency of vibration and the reference resonant frequency.

6. The device of claim 2 wherein:
the device further comprises a temperature sensor; and
the digital value is dependent on both of the sensed resonant frequency of vibration and a temperature sensed by the temperature sensor.

7. The device of claim 2 wherein:
the values represent polynomial coefficients; and
the circuitry is to apply a polynomial, dependent on the values, to mathematically calculate the digital value from the sensed resonant frequency of vibration.

8. The device of claim 2 wherein the values comprise a first value representing a neutral force received by the first region and a second value representing a maximum of contact force received by the first region, wherein the digital value is dependent upon a relationship between the signal to the first value and to the second value.

9. The device of claim 1 wherein the digital value is to vary linearly with variation in contact force received by the first region.

10. The device of claim 1 wherein:
the MEMS resonator is a first MEMS resonator, the body is a first body, the signal is a first signal, the electrode is a first electrode, the sensed resonant frequency of vibration is a first sensed resonant frequency of vibration, the region is a first region, and the digital value is a first digital value;
the force input surface has a second region that is also to receive a contact force;
the device further comprises a second MEMS resonator mounted in a fixed position relative to second region the force input surface, the second MEMS resonator having a second body that is to vibrate under application of a drive signal and a second electrode to output a second signal that varies in dependence on a second sensed resonant frequency of vibration, of the second MEMS resonator, wherein the second sensed resonant frequency of vibration is to vary dependent on the contact force received by the second region of the force input surface; and
the circuitry is to generate a second digital value representing a magnitude of the force contact to the second region of the force input surface, dependent on the second signal.

11. The device of claim 10 wherein the device comprises circuitry to generate at least one of a position on the force input surface or a direction of force contact to the force input surface, dependent on both of the first digital value and the second digital value.

12. The device of claim 1 wherein:
the circuitry comprises a sampling circuitry that is to sample the signal at respective sampling times, to generate respective sampled values; and
the circuitry comprises a filter that is to filter the respective sampled values, the digital value being dependent on an output of the filter.

13. The device of claim 1 wherein:
the device further comprises at least one electrical contact, to receive a power mode selection; and
the circuitry supports at least two power modes, selected according to the power mode selection, including a first power mode wherein the circuitry is disabled from generating the digital value from the signal, and a second power mode wherein the circuitry is enabled to generate the digital value from the signal,
comprises a sampling circuitry that is to sample the signal at respective sampling times, to generate respective sampled values; and
the circuitry comprises a filter that is to filter the respective sampled values, the digital value being dependent on an output of the filter.

14. The device of claim 1 wherein:
the device further comprises a substrate and a lid, the MEMS resonator being anchored to the substrate and being encapsulated within a cavity by the substrate and the lid; and
at least one of the substrate or the lid comprises a form factor that is to be deformed as a function of the contact force.

15. The device of claim 14 wherein the at least one of the substrate or the lid is conformally adhered to the surface.

16. A device comprising:
a surface having at least one region that is to receive a contact force;
a temperature sensor; and
for each respective region of the at least one region,
a first microelectromechanical systems (MEMS) resonator, each first MEMS resonator mounted in a fixed position relative to the respective region, each first MEMS resonator having a body that is to vibrate under application of a drive signal and an electrode to output a respective signal that varies in dependence on a sensed resonant frequency of vibration of the MEMS resonator, wherein the sensed resonant frequency of vibration is to vary dependent on the contact force received by the respective region, and
circuitry to a digital value representing a magnitude of the contact force received by the respective region in dependence on the respective signal and in dependence on sensed temperature.

17. The device of claim 16 wherein the temperature sensor comprises a second MEMS resonator, the second MEMS resonator to generate a reference frequency of resonant vibration, wherein each digital value is dependent on both of the respective signal and the reference frequency of resonant vibration.

18. The device of claim 16 further comprising an electrical contact to receive a low power mode selection, wherein when the low power mode is selected, the body of each first MEMS resonator is to continue to vibrate and wherein the circuitry is disabled from operation.

19. The device of claim 16 wherein the circuitry comprises, for each first MEMS resonator, a lookup table to store values representing variation in magnitude of the contact force received by the respective region, as a function of variation in the sensed resonant frequency of vi

Assignees

• Sitime Corp

Inventors

• Hagelin Paul M
• Grosjean Charles I
• Goncharov Lev

Classifications

• G01L1/146

  for measuring force distributions, e.g. using force arrays (G01L1/148 takes precedence) · CPC title

• G01L5/16 Primary

  for measuring several components of force · CPC title

• G01L9/001

  of an element not provided for in the following subgroups of G01L9/0008 · CPC title

• G01L1/205

  using distributed sensing elements · CPC title