Purge device, purge stocker, and purge method
US-2018247846-A1 · Aug 30, 2018 · US
US11608229B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11608229-B2 |
| Application number | US-201816642084-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 19, 2018 |
| Priority date | Sep 8, 2017 |
| Publication date | Mar 21, 2023 |
| Grant date | Mar 21, 2023 |
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A storage system includes shelves each with a nozzle to supply clean gas into containers, flow amount controllers to control a supply amount of clean gas to a nozzle, a transport apparatus to transfer the containers to and from the shelves, and a controller to control the transport apparatus and the flow amount controllers. The controller makes an assignment of at least one shelf in preparation to store an incoming container and before the occurrence of the incoming container, and controls a flow amount controlling device to supply clean gas to the nozzle in the at least one shelf, based upon the assignment.
Opening claim text (preview).
What is claimed is: 1. A storage system comprising: a plurality of shelves each including at least one nozzle to supply clean gas into containers; a plurality of flow amount controllers to respectively control a supply amount of the clean gas to the at least one nozzle; at least one transport apparatus to transfer the containers to and from the shelves; and a controller to control the at least one transport apparatus and the flow amount controllers; wherein the controller is programmed to: unload an incoming container on a shelf of the plurality of shelves; make an assignment of at least one shelf in preparation to store a next incoming container immediately after the unloading of the incoming container is completed and before the occurrence of the next incoming container into the storage system; control one of the flow amount controllers to supply the clean gas to the at least one nozzle in the at least one shelf, based upon the assignment; and start the supply of the clean gas to the at least one nozzle at a time when the assignment is made and before the occurrence of the next incoming container into the storage system. 2. The storage system according to claim 1 , wherein the storage system is a purge stocker and includes an entrance and dispatch port; the at least one transport apparatus transports the containers between the entrance and dispatch port and the shelves; and the controller is further configured or programmed to make the assignment of the at least one shelf in advance, before the next incoming container arrives at the entrance and dispatch port. 3. The storage system according to claim 1 , wherein the controller is further programmed to control the one of the flow amount controllers to intermittently supply the clean gas to the at least one nozzle in the at least one shelf. 4. The storage system according to claim 1 , wherein the at least one transport apparatus is provided with a transfer device entering into and unloading the next incoming container on the shelves; and the controller is further programmed to control the one of the flow amount controllers to supply a larger flow amount of the clean gas to the at least one nozzle, from when the transfer device starts advancement towards the at least one shelf and until completing unloading of the next incoming container, than an amount before the transfer device starts advancement. 5. A purge method in a storage system including a plurality of shelves each including at least one nozzle to supply clean gas into containers, a plurality of flow amount controllers to control a supply amount of the clean gas to the at least one nozzle, at least one transport apparatus to transfer the containers to and from the shelves, and a controller to control the at least one transport apparatus and the flow amount controllers, the method comprising: unloading an incoming container on a shelf of the plurality of shelves; making an assignment of at least one shelf in preparation to store a next incoming container immediately after the unloading of the incoming container is completed and before the occurrence of the next incoming container into the storage system, by the controller; supplying the clean gas to the at least one nozzle in the at least one shelf, based upon the assignment; and starting the supply of the clean gas to the at least one nozzle at a time when the assignment is made and before the occurrence of the next incoming container into the storage system. 6. The purge method according to claim 5 , wherein the at least one transport apparatus is provided with a transfer device entering into and unloading the next incoming container on the shelves, the method further comprising: controlling one of the flow amount controllers to supply a larger flow amount of the clean gas to the at least one nozzle, from when the transfer device starts advancement towards the at least one shelf and until completing unloading of the next incoming container, than an amount before the transfer device starts advancement. 7. The purge method according to claim 6 , further comprising: after the supplying the clean gas to the at least one nozzle, supplying the clean gas to a bottom portion of the next incoming container; and after the supplying the clean gas to the bottom portion of the incoming container, supplying the clean gas to an inside of the next incoming container. 8. The storage system according to claim 4 , wherein the controller is further programmed to: control the one of the flow amount controllers to supply the clean gas to a bottom portion of the next incoming container after the supply of the clean gas to the at least one nozzle; and control the one of the flow amount controllers to supply the clean gas to an inside of the next incoming container after the supply of the clean gas to the bottom portion of the next incoming container.
Storage means · CPC title
Overhead conveying · CPC title
Conveying cassettes, containers or carriers · CPC title
characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title
for conveying, e.g. between different workstations · CPC title
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