Devices and Methods for Sample Analysis
US-2018126381-A1 · May 10, 2018 · US
US11607682B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11607682-B2 |
| Application number | US-201916634309-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 29, 2019 |
| Priority date | Jan 15, 2019 |
| Publication date | Mar 21, 2023 |
| Grant date | Mar 21, 2023 |
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A detection chip, a using method for the same, and a reaction system. The detection chip includes a first substrate, a micro-cavity defining layer, and a heating electrode. The micro-cavity defining layer is on the first substrate and defines a plurality of micro-reaction chambers. The heating electrode is on the first substrate and is closer to the first substrate than the micro-cavity defining layer, and is configured to heat a plurality of micro-reaction chambers. The orthographic projection of the plurality of micro-reaction chambers on the first substrate is within the orthographic projection of the heating electrode on the first substrate.
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What is claimed is: 1. A detection chip, comprising: a first substrate; a micro-cavity defining layer, being on the first substrate and defining a plurality of micro-reaction chambers; and a heating electrode, being on the first substrate and closer to the first substrate than the micro-cavity defining layer, and configured to heat the plurality of micro-reaction chambers, wherein an orthographic projection of the plurality of micro-reaction chambers on the first substrate is within an orthographic projection of the heating electrode on the first substrate; the detection chip further comprises a plurality of control electrodes, the plurality of control electrodes are configured to simultaneously apply electrical signals to the heating electrode from different positions; the heating electrode is one planar electrode, orthographic projections of the plurality of micro-reaction chambers on the first substrate are within an orthographic projection of the one planar electrode on the first substrate, and an area of the orthographic projection of the one planar electrode on the first substrate is greater than a sum of areas of the orthographic projections of the plurality of micro-reaction chambers on the first substrate. 2. The detection chip according to claim 1 , wherein each of the plurality of micro-reaction chambers comprises a reaction well, and the reaction well comprises a sidewall and a bottom. 3. The detection chip according to claim 1 , wherein the plurality of micro-reaction chambers are arranged in an array on the first substrate. 4. The detection chip according to claim 2 , further comprising a hydrophilic layer, wherein the hydrophilic layer covers the sidewall and the bottom of each of the plurality of micro-reaction chambers, and the hydrophilic layer further covers a surface of the micro-cavity defining layer away from the first substrate. 5. The detection chip according to claim 4 , further comprising: a second substrate, disposed opposite to the first substrate; and a hydrophobic layer, being on a side of the second substrate facing the first substrate; wherein the micro-cavity defining layer is on a side of the first substrate facing the second substrate. 6. The detection chip according to claim 5 , wherein the control electrodes are on the first substrate and are electrically connected with the heating electrode through vias or overlap with the heating electrode. 7. The detection chip according to claim 6 , further comprising a first insulating layer, wherein the first insulating layer covers the control electrode, and the heating electrode is on the first insulating layer, the first insulating layer comprises the via penetrating the first insulating layer, and the heating electrode is electrically connected to the control electrode through the via. 8. The detection chip according to claim 1 , further comprising a second insulating layer, wherein the second insulating layer is between the heating electrode and the micro-cavity defining layer. 9. The detection chip according to claim 7 , wherein the first substrate comprises a reaction region and a peripheral region, the peripheral region at least partially surrounds the reaction region, the reaction region comprises a functional region, the micro-cavity defining layer is in the functional region, the control electrode and the via are in the peripheral region, and the heating electrode is in the reaction region and the peripheral region. 10. The detection chip according to claim 9 , further comprising a plurality of spacers, wherein the plurality of spacers are in the peripheral region and between the first substrate and the second substrate, and the plurality of spacers are configured to maintain a distance between the first substrate and the second substrate. 11. The detection chip according to claim 10 , wherein a height of the spacer is greater than a height of the micro-cavity defining layer in a direction perpendicular to the first substrate. 12. The detection chip according to claim 8 , further comprising a sample inlet and a sample outlet, wherein the reaction region further comprises a non-functional region, the sample inlet and the sample outlet are in the non-functional region and on different sides of the functional region, the sample inlet and the sample outlet penetrate the second substrate and the hydrophobic layer. 13. The detection chip according to claim 4 , wherein the first substrate and the second substrate are glass substrates, a material of the hydrophilic layer comprises silicon oxide, and a material of the hydrophobic layer comprises resin or silicon nitride, and a material of the micro-cavity defining layer comprises a photoresist. 14. The detection chip according to claim 1 , wherein a shape of each of the plurality of micro-reaction chambers is a cylinder, a diameter of a bottom of the cylinder ranges from 1 micron to 100 microns, and a height of the cylinder ranges from 5 microns to 100 microns. 15. The detection chip according to claim 8 , further comprising a first temperature sensor, wherein the first temperature sensor is on a side of the first substrate away from the micro-cavity defining layer, and the first temperature sensor is in the reaction region and is configured to detect a temperature of the reaction region. 16. A reaction system, comprising a control device and the detection chip according to claim 1 , wherein the control device is electrically connected to the detection chip, and is configured to apply an electrical signal to the detection chip to drive the heating electrode of the detection chip. 17. The reaction system according to claim 16 , further comprising a second temperature sensor, wherein the second temperature sensor is on a side of the first substrate of the detection chip away from the micro-cavity defining layer, the second temperature sensor is in the reaction region of the first substrate, and the second temperature sensor is configured to detect a temperature of the reaction region of the detection chip. 18. A reaction system, comprising a control device and the detection chip according to claim 8 , wherein the control device is electrically connected to the detection chip, and is configured to apply an electrical signal to the detection chip to drive the heating electrode of the detection chip. 19. A using method of a detection chip, the detection chip, comprising: a first substrate; a micro-cavity defining layer, being on the first substrate and defining a plurality of micro-reaction chambers; and a heating electrode, being on the first substrate and closer to the first substrate than the micro-cavity defining layer, and configured to heat the plurality of micro-reaction chambers, wherein an orthographic projection of the plurality of micro-reaction chambers on the first substrate is within an orthographic projection of the heating electrode on the first substrate, the detection chip further comprises a plurality of control electrodes, the plurality of control electrodes are configured to simultaneously apply electrical signals to the heating electrode from different positions; the heating electrode is one planar electrode, orthographic projections of the plurality of micro-reaction chambers on the first substrate are within an orthographic projection of the one planar electrode on the first substrate, and an area of the orthographic projection of the one planar electrode on the first substrate is greater than a sum of areas of the orthographic project
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