Front and back electrode trench capacitor

Patent metadata

Field	Value
Publication number	US-11605503-B2
Application number	US-202016781459-A
Country	US
Kind code	B2
Filing date	Feb 4, 2020
Priority date	Nov 30, 2017
Publication date	Mar 14, 2023
Grant date	Mar 14, 2023

Abstract

A capacitor that includes an insulating base material having a first main surface and a second main surface facing each other, the insulating base material defining first and second trenches extending from the first main surface into the base material such that first trench and the second trench overlap each other; a first conductor in the first trench; a first external electrode on the first main surface of the base material and connected to the first conductor; a second conductor in the second trench; and a second external electrode on the second main surface of the base material and connected to the second conductor.

First claim

The invention claimed is:

1. A capacitor comprising:
an insulating base material having a first main surface and a second main surface facing each other, the insulating base material defining a plurality of bottomed first trenches that extend into and terminate within the insulating base material from the first main surface of the insulating base material and defining a plurality of second trenches that extend from the first main surface to the second main surface so as to penetrate the insulating base material, the plurality of bottomed first trenches and the plurality of second trenches overlapping each other;
a plurality of first conductors each respectively in the plurality of bottomed first trenches, the plurality of first conductors having a first end at the first main surface of the insulating base material and a second bottom end that is not exposed at the second main surface of the insulating base material and the second bottom end is surrounded by the insulating base material;
a first external electrode on the first main surface of the base material and connected to the first end of each of the plurality of first conductors;
a plurality of second conductors each respectively in the plurality of second trenches; and
a second external electrode on the second main surface of the base material and connected to the plurality of second conductors.

2. The capacitor according to claim 1 , further comprising a conductor base material having a resistance component between the plurality of second trenches and the second external electrode.

3. The capacitor according to claim 1 , wherein the plurality of bottomed first trenches and the plurality of second trenches are groove-shaped, and have surfaces that face each other along a longitudinal direction of the plurality of bottomed first trenches and the plurality of second trenches.

4. The capacitor according to claim 3 , wherein the plurality of bottomed first trenches and the plurality of second trenches are spaced from each other so as to form a capacitance developing part therebetween.

5. The capacitor according to claim 1 , wherein the insulating base material comprises silicon oxide.

6. The capacitor according to claim 1 , wherein the first external electrode and the second external electrode comprise aluminum.

7. The capacitor according to claim 1 , wherein the plurality of bottomed first trenches and the plurality of second trenches are rectangular.

8. The capacitor according to claim 7 , wherein the plurality of bottomed first trenches and the plurality of second trenches are spaced from each other so as to form a capacitance developing part therebetween.

9. The capacitor according to claim 1 , wherein the first conductor and the second conductor comprise polysilicon.

10. The capacitor according to claim 1 , wherein the plurality of bottomed first trenches and the plurality of second trenches are spaced from each other so as to form a capacitance developing part therebetween.

Assignees

• Murata Manufacturing Co

Inventors

• Ashimine Tomoyuki
• Nakagawa Hiroshi
• Murase Yasuhiro

Classifications

• H10D1/692

  Electrodes · CPC title

• H01G4/008

  Selection of materials · CPC title

• H01G4/10 Primary

  Metal-oxide dielectrics {(H01G4/085 takes precedence)} · CPC title

• H01G4/40

  Structural combinations of fixed capacitors with other electric elements, the structure mainly consisting of a capacitor, e.g. RC combinations · CPC title

• H01G4/33

  Thin- or thick-film capacitors {(thin- or thick-film circuits; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor)} · CPC title