Control device for magnetic field generator, test apparatus, and magnetic field control method

Patent metadata

Field	Value
Publication number	US-11604232-B2
Application number	US-202117643045-A
Country	US
Kind code	B2
Filing date	Dec 7, 2021
Priority date	Feb 12, 2021
Publication date	Mar 14, 2023
Grant date	Mar 14, 2023

Abstract

A control device controls a magnetic field generated by a magnetic field generator, and includes a magnetic field controller that controls the magnetic field generator based on a detected value by a magnetic field sensor. The magnetic field controller receives a command value generated by the magnetic field generator, and the detected value. The magnetic field controller generates an error signal based on an error between the command value and the detected value and outputs to the magnetic field generator a control signal amplified by a control gain against the error. The control gain includes: a first gain that becomes smaller as a frequency of the error signal gets higher; and a second gain that gets larger as an amplitude of the error signal gets larger.

First claim

What is claimed is:

1. A control device that controls a magnetic field generated by a magnetic field generator, the control device comprising:
a magnetic field controller that controls the magnetic field generator based on a detected value of the magnetic field by a magnetic field sensor,
wherein the magnetic field controller receives:
a command value of the magnetic field generated by the magnetic field generator, and
the detected value by the magnetic field sensor that is fed back to the magnetic field controller,

the magnetic field controller generates an error signal based on an error between the command value and the detected value and outputs to the magnetic field generator a control signal amplified by a control gain against the error signal,
the control gain includes:
a first gain that becomes smaller as a frequency of the error signal gets higher; and
a second gain that gets larger as an amplitude of the error signal gets larger.

2. The control device according to claim 1 , wherein
the second gain is based on a command value response required for variation in the command value, an output value response required for variation in an output of the magnetic field generator, and a detected value response required for variation in the detection value of the magnetic sensor.

3. The control device according to claim 1 , wherein
the second gain increases continuously with the amplitude increasing.

4. A test apparatus that tests an electronic component under test, the test apparatus comprising:
a magnetic field generator that comprises a coil and a core and outputs a magnetic field to the electronic component under test;
a magnetic field sensor that detects the magnetic field; and
a magnetic field controller that controls the magnetic field generator based on a detected value of the magnetic field by the magnetic field sensor;
wherein the magnetic field controller receives:
a command value of the magnetic field generated by the magnetic field generator, and
the detected value by the magnetic field sensor that is fed back to the magnetic field controller,

the magnetic field controller generates an error signal based on an error between the command value and the detected value and outputs to the magnetic field generator a control signal amplified by a control gain against the error signal,
the control gain includes:
a first gain that becomes smaller as a frequency of the error signal gets higher; and
a second gain that gets larger as an amplitude of the error signal gets larger.

5. A method for controlling a magnetic field generated by a magnetic field generator, the method comprising:
obtaining, by a feedback control, a detected value of the magnetic field by a magnetic field sensor;
obtaining a command value of the magnetic field generated by the magnetic field generator;
generating an error signal based on an error between the command value and the detected value; and
outputting to the magnetic field generator a control signal amplified by a control gain against the error signal, wherein
the control gain includes:
a first gain that becomes smaller as a frequency of the error signal gets higher; and
a second gain that gets larger as an amplitude of the error signal gets larger.

Assignees

• Advantest Corp

Inventors

• Omuro Toshiyuki
• Kimura Takashi

Classifications

• G05B11/36 Primary

  with provision for obtaining particular characteristics, e.g. proportional, integral, differential · CPC title

• G05B11/42

  for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D. · CPC title

• G01R33/02

  Measuring direction or magnitude of magnetic fields or magnetic flux (G01R33/20 takes precedence) · CPC title

• G01R33/0017 Primary

  Means for compensating offset magnetic fields or the magnetic flux to be measured; Means for generating calibration magnetic fields · CPC title

• G05F7/00 Primary

  Regulating magnetic variables · CPC title