Mass flow verification based on rate of pressure decay

Patent metadata

Field	Value
Publication number	US-11604089-B2
Application number	US-202017247091-A
Country	US
Kind code	B2
Filing date	Nov 30, 2020
Priority date	Mar 26, 2018
Publication date	Mar 14, 2023
Grant date	Mar 14, 2023

Abstract

An electronic device manufacturing system includes: a gas supply; a mass flow controller (MFC) coupled to the gas supply; an inlet coupled to the MFC; an outlet; a control volume serially coupled to the inlet to receive a gas flow; and a flow restrictor serially coupled to the control volume and the outlet. A controller is adapted to allow the gas supply to flow gas through the control volume and the flow restrictor to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. A process chamber is coupled to a flow path, which is coupled to the mass flow controller, the process chamber to receive one or more process chemistries via the mass flow controller.

First claim

What is claimed is:

1. An electronic device manufacturing system, comprising:
a gas supply;
a mass flow controller (MFC) coupled to the gas supply;
an inlet coupled to the MFC;
an outlet;
a control volume serially coupled to the inlet to receive a gas flow;
a flow restrictor serially and directly coupled to the control volume and to the outlet;
a controller adapted to allow the gas supply to flow gas through the control volume and the flow restrictor to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time; and
a process chamber coupled to a flow path, wherein the flow path includes the control volume and is coupled to the mass flow controller, the process chamber to receive one or more process chemistries via the mass flow controller.

2. The electronic device manufacturing system of claim 1 , further comprising a valve coupled between the inlet and the control volume, wherein the valve is operable by the controller to terminate the gas flow from the gas supply.

3. The electronic device manufacturing system of claim 1 , wherein the controller is to determine an error in the MFC by comparing a set point of the MFC to an actual mass flow calculated based on a volume of the control volume, wherein the volume is determined based on the rate of pressure decay in the control volume over time measured with a calibrated gas flow standard.

4. The electronic device manufacturing system of claim 1 , wherein the flow restrictor is at least one of a drilled orifice flow restrictor or a porous media flow restrictor.

5. The electronic device manufacturing system of claim 1 , further comprising a valve coupled between the control volume and the flow restrictor, the valve operable by the controller to cause pressure to build in the control volume.

6. The electronic device manufacturing system of claim 1 , further comprising a second volume couplable to the control volume and operable by the controller to boost pressure in the control volume by supplying a pressurized gas to the control volume.

7. The electronic device manufacturing system of claim 6 , further comprising:
a first valve for coupling the second volume to the inlet; and
a second valve for coupling the second volume to the control volume.

8. The electronic device manufacturing system of claim 1 , wherein the process chamber is to perform one or more of a reduced-pressure chemical vapor deposition process, a reduced-pressure epitaxy process, or at least one of deposition, oxidation, nitration, etching, polishing, cleaning, or a lithography process performed within the process chamber.

9. A method of verifying a mass flow controller, the method comprising:
causing a gas to flow from a gas supply through a calibrated flow standard, a control volume, and a flow restrictor at a stable pressure measured in the control volume, wherein the flow restrictor is serially and directly coupled to the control volume and to an outlet;
terminating the gas flow from the gas supply;
measuring a first rate of gas pressure decay in the control volume;
replacing the calibrated flow standard with the mass flow controller;
causing the gas to flow from the gas supply through the mass flow controller, the control volume, and the flow restrictor at a stable pressure measured in the control volume;
terminating the gas flow from the gas supply; and
measuring a second rate of gas pressure decay in the control volume for purposes of verifying the mass flow controller.

10. The method of claim 9 , further comprising determining an error of the mass flow controller by:
computing a volume of the control volume based on the first rate of gas pressure decay;
using the computed volume to determine an actual mass flow based on the second rate of gas pressure decay; and
comparing the actual mass flow to a set point of the mass flow controller.

11. The method of claim 10 , further comprising calibrating the mass flow controller based on the determined error of the mass flow controller.

12. The method of claim 9 , further comprising increasing the stable pressure in the control volume before measuring the first and second rates of gas pressure decay.

13. A non-transitory computer-readable storage medium on which computer readable instructions are stored, wherein the computer readable instructions, when executed by a processor, cause the processor to perform the method of claim 9 .

14. A system comprising:
an inlet coupled to a mass flow controller, which is coupled to a gas supply;
an outlet;
a control volume serially coupled to the inlet to receive a gas flow from the gas supply;
a flow restrictor serially and directly coupled to the control volume and to the outlet; and
a controller adapted to allow the gas supply to flow gas through the control volume and the flow restrictor to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time to verify the mass flow controller.

15. The system of claim 14 , further comprising a valve coupled between the inlet and the control volume, wherein the valve is operable by the controller to terminate the gas flow from the gas supply.

16. The system of claim 14 , wherein the controller is further to determine an error in the mass flow controller by comparing a set point of the mass flow controller to an actual mass flow calculated based on a volume of the control volume, wherein the volume is determined based on the rate of pressure decay in the control volume over time measured with a calibrated gas flow standard.

17. The system of claim 14 , wherein the flow restrictor is at least one of a drilled orifice flow restrictor or a porous media flow restrictor.

18. The system of claim 14 , further comprising a valve coupled between the control volume and the flow restrictor, the valve operable by the controller to cause pressure to build in the control volume.

19. The system of claim 14 , further comprising a second volume couplable to the control volume and operable by the controller to boost pressure in the control volume by supplying a pressurized gas to the control volume.

20. The system of claim 19 , further comprising:
a first valve for coupling the second volume to the inlet; and
a second valve for coupling the second volume to the control volume.

Assignees

• Applied Materials Inc

Inventors

• Ye Zhiyuan
• Hough Justin
• Josephson Marcel E

Classifications

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• G05D7/0635 Primary

  by action on throttling means (G05D7/0688, G05D7/0694 take precedence) · CPC title

• G01F1/80

  operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted · CPC title

• G01F25/10

  of flowmeters · CPC title

• G01F25/00 Primary

  Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume · CPC title