Sonic cleaning system and method of sonic cleaning a workpiece

Patent metadata

Field	Value
Publication number	US-11602776-B2
Application number	US-202016735489-A
Country	US
Kind code	B2
Filing date	Jan 6, 2020
Priority date	Jan 20, 2019
Publication date	Mar 14, 2023
Grant date	Mar 14, 2023

Abstract

In some embodiments, a sonic cleaning system includes a tank configured to receive a liquid that enables propagation of sonic waves and a cylindrical insert located within the tank. The cylindrical insert includes a first end having a first opening and a second end opposite the first end. The second end has a second opening. The cylindrical insert is configured to suspend a workpiece between the first opening and the second opening. The sonic cleaning system includes a sonic transducer located within the cylindrical insert.

First claim

What is claimed is:

1. A method for sonic cleaning of a workpiece, comprising:
filling a tank with a liquid, wherein the tank comprises:
a sonic transducer disposed on a transducer support located at a floor of the tank; and
an insert that is cylindrical, wherein the sonic transducer is positioned partially within the insert;

placing the workpiece in the insert; and
activating the sonic transducer.

2. The method of claim 1 , the sonic transducer is spaced a distance from the floor of the tank.

3. The method of claim 1 , wherein placing the workpiece in the insert comprises suspending the workpiece in the insert.

4. The method of claim 1 , wherein the tank comprises one or more walls, wherein the sonic transducer is mechanically isolated from the one or more walls and the floor of the tank.

5. The method of claim 1 , wherein the insert has a first end with a first opening and second end with a second opening, the second end being opposite the first end, and the method further comprises locating the second end proximate to the floor of the tank.

6. The method of claim 5 , wherein the workpiece is located in the first opening.

7. The method of claim 1 , wherein the tank comprises three or more flat sheets that are fastened together.

8. The method of claim 7 , wherein the three or more flat sheets comprise stainless steel.

9. A sonic cleaning system comprising:
a tank configured to contain a liquid that enables propagation of sonic waves;
a cylindrical insert disposed within the tank, the cylindrical insert including a first end having a first opening and a second end opposite the first end, the second end having a second opening, wherein the cylindrical insert is configured to receive a workpiece between the first opening and the second opening; and
a sonic transducer disposed on a transducer support located at a floor of the tank so that the sonic transducer is positioned partially within the cylindrical insert.

10. The sonic cleaning system of claim 9 , wherein the tank comprises three or more flat sheets that are fastened together.

11. The sonic cleaning system of claim 10 , wherein the three or more flat sheets comprise stainless steel.

12. A sonic cleaning system, comprising:
a tank configured to contain a liquid that enables propagation of sonic waves;
an insert disposed within the tank, the insert including a first end having a first opening and a second end opposite the first end, the second end having a second opening, wherein the insert is round or oval when viewed from the first end and configured to receive a workpiece between the first opening and the second opening; and
a sonic transducer disposed next to the second opening, wherein the sonic transducer is disposed on a transducer support located at a floor of the tank so that a space is formed between the sonic transducer and the floor of the tank, and the sonic transducer is positioned partially within the insert.

13. The sonic cleaning system of claim 12 , wherein the second end of the insert is located a distance from the floor.

14. The sonic cleaning system of claim 12 , wherein the insert is configured to suspend the workpiece within the insert.

15. The sonic cleaning system of claim 12 , further comprising a support configured to suspend the workpiece within the insert.

16. The sonic cleaning system of claim 12 , wherein the insert comprises a first material, wherein the first material reflects at least one of ultrasonic waves and megasonic waves.

17. The sonic cleaning system of claim 16 , wherein the insert comprises stainless steel.

18. The sonic cleaning system of claim 12 , wherein the tank comprises three or more flat sheets that are fastened together.

19. The sonic cleaning system of claim 18 , wherein the three or more flat sheets comprise stainless steel.

Assignees

• Applied Materials Inc

Inventors

• Coughlin Michael J
• Wang Jianqi

Classifications

• H10P72/0416

  with the semiconductor substrates being dipped in baths or vessels · CPC title

• B08B3/06

  using perforated drums in which the article or material is placed {(B08B3/042 takes precedence)} · CPC title

• B08B3/08

  the liquid having chemical or dissolving effect · CPC title

• B08B3/12 Primary

  by sonic or ultrasonic vibrations · CPC title

• B08B7/028

  Using ultrasounds · CPC title