Vibration structure

Patent metadata

Field	Value
Publication number	US-11600764-B2
Application number	US-202016923331-A
Country	US
Kind code	B2
Filing date	Jul 8, 2020
Priority date	Dec 25, 2018
Publication date	Mar 7, 2023
Grant date	Mar 7, 2023

Abstract

A vibration structure that includes a film having a first electrode on a first main surface thereof, the first electrode defining a first connection region on the first main surface where the first electrode is not present, and the film is constructed to be deformed in a plane direction when a voltage is applied thereto; a frame-shaped member; a vibration portion surrounded by the frame-shaped member; a first connection member that connects the first main surface of the film to the frame-shaped member at the first connection region; a second connection member that connects the film to the vibration portion; and an extended electrode that is connected to the first electrode.

First claim

The invention claimed is:

1. A vibration structure comprising:
a film having a first electrode on a first main surface thereof, the first electrode defining a first connection region on the first main surface where the first electrode is not present, and the film is constructed to be deformed in a plane direction when a voltage is applied thereto;
a frame-shaped member;
a vibration portion surrounded by the frame-shaped member;
a first connection member that connects the first main surface of the film to the frame-shaped member at the first connection region;
a second connection member that connects the film to the vibration portion; and
an extended electrode that is connected to the first electrode.

2. The vibration structure according to claim 1 , further comprising:
a second electrode on a second main surface of the film opposite to the first main surface of the film, and
the second electrode defining a second connection region on the second main surface where the second electrode is not present, the second connection region being opposite to the first connection region.

3. The vibration structure according to claim 1 , wherein the first electrode defines a second connection region on the first main surface where the first electrode is not present, and the second connection member connects the film to the vibration portion at the second connection region.

4. The vibration structure according to claim 3 , further comprising:
a second electrode on a second main surface of the film opposite to the first main surface of the film, and
the second electrode defining a third connection region on the second main surface where the second electrode is not present, the third connection region being opposite to the first connection region.

5. The vibration structure according to claim 1 , wherein the second electrode defines a fourth connection region on the second main surface where the second electrode is not present, the fourth connection region being opposite to the second connection region.

6. The vibration structure according to claim 1 , wherein the extended electrode is positioned between the first connection member and the second connection member.

7. The vibration structure according to claim 1 , wherein the first connection member is positioned between the extended electrode and the second connection member.

8. The vibration structure according to claim 1 , wherein the first connection member extends in a width direction orthogonal to the plane direction in which the film is constructed to be deformed.

9. The vibration structure according to claim 1 , wherein the first connection member is a plurality of the first connection members disposed in a width direction orthogonal to the plane direction in which the film is constructed to be deformed.

10. The vibration structure according to claim 1 , wherein an area of the vibration portion is smaller than an area of a region surrounded by the frame-shaped member in a plan view of the vibration structure.

11. The vibration structure according to claim 1 , further comprising:
a support portion that connects the vibration portion and the frame-shaped member, and supports the vibration portion within the frame-shaped member.

12. The vibration structure according to claim 11 ,
wherein the support portion comprises a plurality of support portions disposed at different locations between the vibration portion and the frame-shaped member.

13. The vibration structure according to claim 12 , wherein the first electrode includes a notch, and the notch overlaps a support portion closest to the first connection member in a plan view of the vibration structure among the plurality of support portions.

14. The vibration structure according to claim 11 , wherein the first electrode includes a notch, and the notch overlaps the support portion in a plan view of the vibration structure.

Assignees

• Murata Manufacturing Co

Inventors

• Tominaga Toru
• Hashimoto Junichi
• Endo Jun
• Otera Shozo

Classifications

• H10N30/88

  Mounts; Supports; Enclosures; Casings · CPC title

• H10N30/875 Primary

  Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins · CPC title

• H10N30/206

  using only longitudinal or thickness displacement, e.g. d33 or d31 type devices · CPC title

• H03H9/17

  having a single resonator (crystal tuning forks H03H9/21) · CPC title

• H10N30/857

  Macromolecular compositions · CPC title