Imaging in curved arrays: methods to produce free-formed curved detectors

Patent metadata

Field	Value
Publication number	US-11600655-B2
Application number	US-202017027495-A
Country	US
Kind code	B2
Filing date	Sep 21, 2020
Priority date	Sep 19, 2019
Publication date	Mar 7, 2023
Grant date	Mar 7, 2023

Abstract

A detector including a detector membrane comprising a semiconductor sensor and a readout circuit, the detector membrane having a thickness of 100 micrometers or less and a curved surface conformed to a curved focal plane of an optical system imaging electromagnetic radiation onto the curved surface; and a mount or substrate attached to a backside of the detector membrane. A maximum of the strain experienced by the detector membrane is reduced by distribution of the strain induced by formation of the curved surface across all of the curved surface of the detector membrane, thereby allowing a decreased radius of curvature (more severe curving) as compared to without the distribution.

First claim

What is claimed is:

1. A detector, comprising:
a detector membrane comprising a semiconductor sensor and a readout circuit, the detector membrane having a thickness of 100 micrometers or less and a curved surface conformed to a curved focal plane of an optical system imaging electromagnetic radiation onto the curved surface; and
a mount attached to a backside of the detector membrane; wherein:
a maximum of a strain experienced by the detector membrane is reduced by distribution of the strain induced by formation of the curved surface across all of the curved surface of the detector membrane, thereby allowing an increased radius of curvature of the curved surface, and
the semiconductor sensor converts photons to charged particles and the readout circuit measures a quantity of the charged particles, the semiconductor sensor comprises an elemental semiconductor or compound semiconductor, and the readout circuit is integrated with the semiconductor sensor monolithically or in a hybrid fashion.

2. The detector of claim 1 , wherein an adhesion between the mount and the detector membrane distributes the strain.

3. The detector of claim 1 , wherein the elemental semiconductor or the compound semiconductor comprises silicon or a group III-V semiconductor, or a group II-VI semiconductor, and the detector membrane detects electromagnetic radiation having a wavelength in a range of 400 nm -16 microns.

4. The detector of claim 1 , wherein:
the detector membrane has a radius of curvature of 50 mm or less, and
the curved surface has an area receiving the electromagnetic radiation of at least 400 millimeters.

5. The detector of claim 1 , wherein the curved surface is spherical, parabolic, elliptical, or a custom designed shape.

6. A wearable infrared imager or a camera comprising the detector of claim 1 .

7. A detector, comprising:
a detector membrane comprising a semiconductor sensor and a readout circuit, the detector membrane having a thickness of 100 micrometers or less and a curved surface conformed to a curved focal plane of an optical system imaging electromagnetic radiation onto the curved surface; wherein:
the semiconductor sensor converts photons to charged particles and the readout circuit measures a quantity of the charged particles, the semiconductor sensor comprises an elemental semiconductor or compound semiconductor and the readout circuit is integrated with the semiconductor sensor monolithically or in a hybrid fashion;
the detector membrane comprises a radius of curvature of 50 mm or less; and
the curved surface has an area of at least 400 millimeters squared.

8. The detector of claim 1 , further comprising:
the strain having the distribution induced from applying one or more forces at a plurality of locations on the detector membrane and in one or more directions, the one or more forces deforming the detector membrane so as to form the curved surface of the detector membrane, wherein:
the forces applied in one direction are applied a frictionless manner with no friction between the detector membrane and an actuator applying the forces, or
when the one or more directions include a plurality of directions, the directions include one or more lateral directions in a tangential plane of a surface of the detector membrane;

the mount is progressively attached to the detector membrane as the forces are applied so that the mount sustains or supports a majority of the strain, wherein the detector membrane is adhered to an adhesive on a mount surface of the mount, the mount surface having a desired/designed/target radius of curvature of the curved surface.

9. The detector of claim 8 , further comprising the actuator comprising a flexible actuator membrane generating the forces and applying the one or more forces to the detector membrane via a physical contact between the flexible actuator membrane and the detector membrane.

10. The detector of claim 9 , wherein:
the flexible actuator membrane comprises a plurality of concentric conductors in a plane of the flexible actuator membrane positioned so that:
applying the forces comprises:
passing an electrical current in the concentric conductors, and
applying a magnetic field to induce a Lorentz force on the concentric conductors that laterally stretches or contracts the flexible actuator membrane, thereby delivering through the physical contact the one or more forces comprising a radial force inwards or outwards.

11. The detector of claim 9 , wherein:
the flexible actuator membrane comprises two layers each including a plurality of concentric fluidic channels in a plane of the flexible actuator membrane positioned so that
applying the forces comprises controlling a pressure of a fluid in the concentric fluidic channels causing the flexible actuator membrane to expand or contract, thereby delivering through the physical contact the one or more forces comprising a radial force inwards or outwards.

12. The detector of claim 8 , wherein:
the actuator comprises a flexible actuator membrane comprising a bimetallic plate comprising at least two materials having different coefficients of thermal expansion, such that heating and/or cooling the flexible actuator membrane to a plurality of temperatures causes the bimetallic plate to deform and applies the one or more forces to the detector membrane via a physical contact between the bimetallic plate and the detector membrane.

13. The detector of claim 8 , wherein the distribution of the strain is induced from applying the forces comprising sequentially heating or cooling the detector membrane while progressively attaching the detector membrane to the mount having the desired/designated/target radius of curvature, so as to seize the detector membrane upon the surface of the mount when the detector membrane is thermally stressed to an optimal strain for a given region of contact between the detector membrane and the mount.

14. The detector of claim 8 , further comprising a heat shrinking polymer applied to the detector membrane, wherein applying the forces comprises warming, to various degrees, only those regions of the detector membrane of specified radius from the center of the detector membrane.

15. The detector of claim 8 , wherein the distribution of the strain is induced by applying the one or more forces using concentrically arrayed piezo electric actuators on a flexible material, wherein:
the concentrically arrayed piezo electric actuators are set against a stiff platform at one end opposite the detector membrane and are attached to the detector membrane at the other of their ends, and
the flexible material between the concentrically arrayed piezo electric actuators allows the concentrically arrayed piezo electric actuators to tilt laterally during their longitudinal deformations.

16. The detector of claim 8 , further comprising:
a nested set of concentric cylinders physically contacted to the detector membrane, the concentric cylinders each having a different radius; and
each of the concentric cylinders positioned so that displacing the concentric cylinders against the detector membrane transfers the one or more forces deforming the detector membrane with increasing extent with larger radius of cylinder.

17. The detector claim 16 , wherein the nested set of concentric cylinders are positioned so that the concentric cylinders may be gradually displaced with a curved profile.

18. The detector of claim 8 , further comprising the detector membrane progressively attached to the mount using a frame supporting an elastomer, the elastomer patterned w

Assignees

• California Inst Of Techn

Inventors

• Jones Todd J
• Nikzad Shouleh

Classifications

• H10F77/1698

  the metallic or insulating substrates being flexible · CPC title

• H10F39/011

  Manufacture or treatment of image sensors covered by group H10F39/12 · CPC title

• H10F39/804

  Containers or encapsulations · CPC title

• H10F39/80

  Constructional details of image sensors · CPC title

• H10F39/157 Primary

  CCD or CID infrared image sensors · CPC title