Laser apparatus and method of processing thin films

Patent metadata

Field	Value
Publication number	US-11600491-B2
Application number	US-201816635097-A
Country	US
Kind code	B2
Filing date	Jul 31, 2018
Priority date	Jul 31, 2017
Publication date	Mar 7, 2023
Grant date	Mar 7, 2023

Abstract

A method of fiber laser processing of thin film deposited on a substrate includes providing a laser beam from at least one fiber laser which is guided through a beam-shaping unit onto the thin film. The beam-shaping optics is configured to shape the laser beam into a line beam which irradiates a first irradiated thin film area Ab on a surface of the thin film, with the irradiated thin film area Ab being a fraction of the thin film area Af. By continuously displacing the beam shaping optics and the film relative to one another in a first direction at a distance dy between sequential irradiations, a sequence of uniform irradiated thin film areas Ab are formed on the film surface defining thus a first elongated column. Thereafter the beam shaped optics and film are displaced relative to one another at a distance dx in a second direction transverse to the first direction with the distance dx being smaller than a length of the irradiated film area Ab. With the steps performed to form respective columns, the elongated columns overlap one another covering the desired thin film area Af. The dx and dy distances are so selected that that each location of the film area Af is exposed to the shaped laser beam during a cumulative predetermined duration.

First claim

The invention claimed is:

1. A method of fiber laser processing of thin film deposited on a substrate, wherein a thin film area Af is defined by a width Wf and length Lf, comprising:
(a) providing a laser beam from at least one quasi-continuous fiber (QCW) fiber laser operating in a burst regime;
(b) directing the laser beam through a beam-shaping unit onto the thin film, thereby shaping the laser beam into a homogeneous line beam which irradiates a first thin film area Ab on a surface of the thin film, with the irradiated thin film area Ab corresponding to an individual burst, and being a fraction of the thin film area Af, wherein the film area Ab is defined by a length Lb and width Wb;
(c) continuously displacing the beam shaping unit and the film relative to one another in a first direction at a distance dy, wherein the dy distance is selected to prevent a thermal positive feedback between sequential irradiations above a predetermined dy threshold, thereby forming a sequence of uniform thin film areas Ab which along with the first thin film area Ab together define a first elongated column so that sequential areas Ab are either adjacent to one another or overlapped; and
(d) thereafter displacing the beam shaped optics and substrate with the film thereon relative to one another at a distance dx in a second direction transverse to the first direction and repeating steps (b)-(c), the distance dx being smaller than a length of the irradiated film area Ab, thereby forming a plurality of overlapped elongated columns on the thin film area Af, the dx and dy distances being so selected that that each location of the film area Af is exposed to the predetermined number of bursts ranging from 3 to 50.

2. The method of claim 1 , wherein directing the laser beam through the beam shaping unit includes:
guiding the laser beam through an array of lenslets, thereby splitting the laser beam into a plurality of beamlets propagating in a third direction which is skewed to the first direction Y and orthogonal to the second direction,
temporarily retarding the beamlets by guiding them through respective delay glass pairs, wherein the delay glass pairs each are configured with spaced positive and negative cylinder lenses which have substantially equal focal lengths and a common longitudinal axis extending in the third direction, the glass delay pairs each being provided with respective curved faces opposing one another so as to define an axial gap therebetween.

3. The method of claim 2 , wherein the temporarily retarding mitigates coherence effects and manufacturing tolerances of the homogenizer to form the homogeneous line beam with a beam width equal to the Wb, ranging between 3 and 50 μm, and aspect ratio of 1 to at least 500, the temporarily retarding including:
(a) axially displacing the spaced lenses of each pair towards and away from one another along the third direction, thereby focusing the beamlets in a common focal plane on the surface of the thin film,
(b) rotating the spaced lenses of each delay glass pair relative to one another about the common longitudinal axis which extends in the third direction,
(c) displacing the spaced lenses relative to one another perpendicular to the common longitudinal axis and the second direction X, or
(d) a combination of the (a) through (c).

4. The method of claim 2 further comprising placing increasing number of delay glass pairs downstream from the cylindrical unit beginning with a lenslet next to a side lenslet of the array and sequentially manipulating each of the glass pairs to form the line beam.

5. The method of claim 1 , wherein the QCW fiber laser operatese with a duty cycle less than 100% so as to output the laser beam at a pulse repetition rate of at most 1 Ghz, which is higher than a burst repetition rate and sufficient to generate a thermal response of the thin film identical to that caused by the laser beam from the QCW fiber laser operating at 100% duty cycle.

6. The method of claim 1 further comprising generating and directing at least one additional laser beam on the thin film so as to have desired spatial intensity profiles in the first direction or second direction or first and second directions.

7. The method of claim 1 further comprising controlling polarization of the laser beam.

8. A fiber laser system for processing a thin film deposited on a substrate comprising:
a stage supporting the substrate;
at least one QCW fiber laser source outputting bursts of a laser beam along a light path;
an optical beam shaping unit configured to shape the laser beam into a homogeneous line beam which is incident onto a surface of the thin film with desired geometrical dimensions, intensity profile, and am optimal power to form a first irradiated thin film area Ab which corresponds to a single burst and constitutes a fraction of a total thin film area Af to be processed, the film area Ab being defined by a length Lb and width Wb; and
a processor configured to execute a series of steps comprising;
displacing the stage and optical beam shaping unit relative one another in the first direction at a distance dy so as to form a sequence of irradiated thin film areas Ab which cumulatively define a first elongated column of predetermined length and width, the distance dy being selected to be smaller than or equal to a width of the irradiated thin film area Ab to prevent a thermal positive feedback above a predetermined thermal threshold between sequential bursts,
displacing the stage and optical beam shaping unit relative to one another in a second direction X orthogonal to the first direction Y at a distance dx,
displacing the stage and optical beam shaping unit in the first direction to form a second column defined by the sequence of irridated thin film areas Ab and overlapping the first column, and
repeatedly and sequentialby displacing the stage and optical beam shaping unit in the first and second directions at respective distances dy and dx to form a plurality of overlapped columns on the thin film area Af until the total thin film area Af processed, the dx and dy distances being so selected that that each location of the film area Af is exposed to the predetermined number of bursts ranging from 3 to 50.

9. The fiber laser system of claim 8 , wherein the optical beam-shaping unit includes a homogenizer operative to mitigate coherence of the laser beam, the homogenizer including one or more arrays of lenslets segmenting the laser beam into multiple beamlets which propagate in a third direction skewed to the first direction and orthogonal to the second direction.

10. The fiber laser system of claim 9 further comprising one or more arrays of of delay glass pairs located in respective paths of beamlets and configured to compensate the homogenizer manufacturing tolerances, each delay glass pair having a common elongated axis which extends in the thud direction, and being configured with two axially spaced positive and negative cylinder lenses which are provided with respective convex and concave surfaces defining an axial gap therebetween.

11. The fiber laser of claim 10 , wherein the positive and negative cylinder lenses of each pair are displaceable relative to one another, wherein the displacement of positive and negative lenses of each pair is selected from the group of motions consisting of:
axial displacement of positive and negative cylinder lenses relative to one another so as to focus the plurality of beamlets in a common focal plane on the surface of the thin film,
linear displacement of positive and negative cylinder lenses relative to one another perpendicular to the longitudinal axis and second direction,
rotational displacement of positive and n

Assignees

• Ipg Photonics Corp

Inventors

• Alexander Limanov
• Von Dadelszen Michael
• Schoenly Joshua
• Leonardo Manuel

Classifications

• H10P72/0436

  mainly by radiation · CPC title

• H10P14/3454

  Amorphous · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/381 Primary

  Beam shaping, e.g. using a mask · CPC title

• H10D86/0229

  characterised by control of the annealing or irradiation parameters · CPC title