Optical displacement sensor

Patent metadata

Field	Value
Publication number	US-11598629-B2
Application number	US-202117224546-A
Country	US
Kind code	B2
Filing date	Apr 7, 2021
Priority date	Apr 14, 2020
Publication date	Mar 7, 2023
Grant date	Mar 7, 2023

Abstract

An optical displacement sensor includes: a splitting unit that splits the light radiated from the light source into a first light ray and a second light ray; a reflection unit including a first reflection part and a second reflection part provided at a predetermined angle with respect to the first reflection part; and a fold-back reflection unit that folds-back and reflects the light that has gone through the reflection unit to the reflection unit. The optical displacement sensor is characterized in that the reflection unit reflects the first light ray and the second light ray that are split by the splitting unit and have gone through the diffraction unit from the first reflection part to the second reflection part, and reflects the first light ray and the second light ray that are reflected by the fold-back reflection unit from the second reflection part to the first reflection part.

First claim

What is claimed is:

1. An optical displacement sensor comprising:
a diffraction unit having diffraction gratings arranged at a predetermined period along a measurement direction;
a light source that radiates light to the diffraction unit; and
a light-receiving unit that receives light that has gone through the diffraction unit, characterized in that the optical displacement sensor comprises:
a splitting unit that splits the light radiated from the light source into a first light ray and a second light ray that is different from the first light ray;
a reflection unit having a first reflection part that reflects the light radiated from the light source and a second reflection part provided at a predetermined angle with respect to the first reflection part; and
a fold-back reflection unit that folds-back and reflects the light that has gone through the reflection unit to the reflection unit,
wherein the reflection unit reflects the first light ray and the second light ray that are split by the splitting unit and have gone through the diffraction unit from the first reflection part to the second reflection part, and reflects the first light ray and the second light ray that are reflected by the fold-back reflection unit from the second reflection part to the first reflection part, and
wherein the light-receiving unit receives the first light ray and the second light ray that have gone through the reflection unit and the fold-back reflection unit.

2. The optical displacement sensor according to claim 1 , characterized in that the splitting unit corresponds to the diffraction gratings included in the diffraction unit.

3. The optical displacement sensor according to claim 1 , characterized in that the splitting unit is a beam splitter that splits the light from the light source into two light rays that are different from each other.

4. The optical displacement sensor according to claim 1 , characterized in that the optical displacement sensor comprises a total reflection unit that totally reflects the first light ray and the second light ray in order to change directions of optical paths of the first light ray and the second light ray to predetermined directions.

5. The optical displacement sensor according to claim 1 , characterized in that:
the optical displacement sensor comprises an arithmetic unit that calculates the amount of displacement of an object to be measured based on the light received by the light-receiving unit;
the diffraction unit is attached to the object to be measured that moves in the measurement direction and moves in synchronization with the movement of the object to be measured; and
the arithmetic unit calculates, in association with the movement of the diffraction unit that moves in synchronization with the movement of the object to be measured, the amount of displacement due to the movement of the object to be measured detected from the light received by the light-receiving unit.

6. The optical displacement sensor according to claim 1 , characterized in that:
the optical displacement sensor comprises an arithmetic unit that calculates the amount of displacement of the object to be measured based on the light received by the light-receiving unit;
the diffraction unit is attached to the object to be measured that rotates around a predetermined axis, the predetermined axis being defined as a rotation axis, and rotates in synchronization with the rotation of the object to be measured; and
the arithmetic unit calculates, in association with the rotation of the diffraction unit that rotates in synchronization with the rotation of the object to be measured, the amount of angle displacement based on a change in phase detected from the light received by the light-receiving unit.

7. The optical displacement sensor according to claim 1 , characterized in that the diffraction unit is of a transmissive type that diffracts and transmits the light from the light source.

8. The optical displacement sensor according to claim 1 , characterized in that the diffraction unit is of a reflective type that diffracts and reflects the light from the light source.

9. An optical displacement sensor comprising:
a diffraction unit having diffraction gratings arranged at a predetermined period along a measurement direction;
a light source that radiates light to the diffraction unit; and
a light-receiving unit that receives light that has gone through the diffraction unit, characterized in that the optical displacement sensor comprises:
a splitting unit that splits the light radiated from the light source into a first light ray and a second light ray that is different from the first light ray at a predetermined splitting point, and that outputs each of the first light ray and the second light ray in a direction that is in plane symmetry with respect to a plane including the splitting point; and
a reflection unit having a first reflection part that reflects the light radiated from the light source and a second reflection part provided at a predetermined angle with respect to the first reflection part,
wherein the reflection unit comprises:
a first reflection unit including the second reflection part provided at a predetermined angle with respect to the first reflection part;
a second reflection unit that is different from the first reflection unit and that includes the second reflection part provided at the same angle as the predetermined angle in the first reflection unit with respect to the first reflection part,

wherein the first reflection unit and the second reflection unit are provided so that the first reflection parts and the second reflection parts are arranged in plane symmetry with respect to the plane including the splitting point, the plane being defined as a symmetry plane,
wherein the first reflection part of the first reflection unit is incident with one of the first light ray and the second light ray output from the splitting unit and reflects the incident light to the second reflection part of the first reflection unit,
wherein the first reflection part of the second reflection unit is incident with the other one of the first light ray and the second light ray output from the splitting unit and reflects the incident light to the second reflection part of the second reflection unit, and
wherein the light-receiving unit receives the first light ray and the second light ray that have gone through the first reflection unit and the second reflection unit.

10. The optical displacement sensor according to claim 9 , characterized in that the optical displacement sensor comprises a fold-back reflection unit that folds-back and reflects the light that has gone through the reflection unit to the reflection unit.

11. The optical displacement sensor according to claim 10 , characterized in that:
each of the first reflection part and the second reflection part includes a reflection surface that reflects light;
each of the first reflection unit and the second reflection unit has a first intersection line, the first intersection line being a line along which extension surfaces obtained by extending the respective reflection surfaces of the first reflection part and the second reflection part intersect one another;
the first intersection line of the first reflection unit and the first intersection line of the second reflection unit are arranged on the plane including the splitting point;
the fold-back reflection unit includes a first reflection plate that reflects the light, a second reflection plate provided at a predetermined angle with respect to the first reflection plate, and a second intersection line, the second intersection line being a line along which extension surface

Assignees

• Mitutoyo Corp

Inventors

• Kimura Akihide

Classifications

• G02B5/18

  Diffraction gratings {(holographic optical elements G02B5/32, G03H; integrally combined with optical fibres G02B6/02057; for coupling light guides G02B6/34; integrally combined with optical integrated light guides G02B6/12; grating systems G02B27/44)} · CPC title

• G01D5/38

  by diffraction gratings · CPC title

• G01B11/026 Primary

  by measuring distance between sensor and object (G01B11/0608 takes precedence) · CPC title

• G02B5/04

  Prisms · CPC title

• G01B11/02 Primary

  for measuring length, width or thickness (G01B11/08 takes precedence) · CPC title